8/22/2012	12:10:41 AM	Recipe started at 12:10 AM
8/22/2012	12:10:41 AM	Helium valve closed
8/22/2012	12:10:41 AM	H2 valve closed
8/22/2012	12:10:41 AM	BCl3 valve closed
8/22/2012	12:10:41 AM	PH3 valve closed
8/22/2012	12:10:41 AM	SiCl4 pre valve closed
8/22/2012	12:10:41 AM	SiCl4 post valve closed
8/22/2012	12:10:41 AM	Main Vac valve closed
8/22/2012	12:10:41 AM	Bubbler valve closed
8/22/2012	12:10:41 AM	Bypass valve opened
8/22/2012	12:10:41 AM	Helium MFC set to  0.000000
8/22/2012	12:10:41 AM	H2 MFC set to  0.000000
8/22/2012	12:10:41 AM	BCl3 MFC set to  0.000000
8/22/2012	12:10:41 AM	PH3 MFC set to  0.000000
8/22/2012	12:10:41 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:10:41 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:10:41 AM	Tube furnace set to 150
8/22/2012	12:10:42 AM	Helium valve closed
8/22/2012	12:10:42 AM	H2 valve closed
8/22/2012	12:10:42 AM	BCl3 valve closed
8/22/2012	12:10:42 AM	PH3 valve closed
8/22/2012	12:10:42 AM	SiCl4 pre valve closed
8/22/2012	12:10:42 AM	SiCl4 post valve closed
8/22/2012	12:10:42 AM	Main Vac valve closed
8/22/2012	12:10:42 AM	Bubbler valve closed
8/22/2012	12:10:42 AM	Bypass valve opened
8/22/2012	12:10:42 AM	Helium MFC set to  0.000000
8/22/2012	12:10:42 AM	H2 MFC set to  0.000000
8/22/2012	12:10:42 AM	BCl3 MFC set to  0.000000
8/22/2012	12:10:42 AM	PH3 MFC set to  0.000000
8/22/2012	12:10:42 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:10:42 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:10:42 AM	Tube furnace set to 150
8/22/2012	12:10:42 AM	Helium valve closed
8/22/2012	12:10:42 AM	H2 valve closed
8/22/2012	12:10:42 AM	BCl3 valve closed
8/22/2012	12:10:42 AM	PH3 valve closed
8/22/2012	12:10:42 AM	SiCl4 pre valve closed
8/22/2012	12:10:42 AM	SiCl4 post valve closed
8/22/2012	12:10:42 AM	Bypass valve closed
8/22/2012	12:10:43 AM	Bubbler valve closed
8/22/2012	12:10:43 AM	Main Vac valve opened
8/22/2012	12:10:43 AM	Helium MFC set to  0.000000
8/22/2012	12:10:43 AM	H2 MFC set to  0.000000
8/22/2012	12:10:43 AM	BCl3 MFC set to  0.000000
8/22/2012	12:10:43 AM	PH3 MFC set to  0.000000
8/22/2012	12:10:43 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:10:43 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:10:43 AM	Tube furnace set to 150
8/22/2012	12:10:44 AM	H2 valve closed
8/22/2012	12:10:44 AM	BCl3 valve closed
8/22/2012	12:10:44 AM	PH3 valve closed
8/22/2012	12:10:44 AM	SiCl4 pre valve closed
8/22/2012	12:10:44 AM	SiCl4 post valve closed
8/22/2012	12:10:44 AM	Bypass valve closed
8/22/2012	12:10:44 AM	Bubbler valve closed
8/22/2012	12:10:44 AM	Helium valve opened
8/22/2012	12:10:44 AM	Main Vac valve opened
8/22/2012	12:10:44 AM	Helium MFC set to  20.000000
8/22/2012	12:10:44 AM	H2 MFC set to  0.000000
8/22/2012	12:10:44 AM	BCl3 MFC set to  0.000000
8/22/2012	12:10:44 AM	PH3 MFC set to  0.000000
8/22/2012	12:10:44 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:10:44 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:10:44 AM	Tube furnace set to 150
8/22/2012	12:11:14 AM	Helium valve closed
8/22/2012	12:11:14 AM	H2 valve closed
8/22/2012	12:11:14 AM	BCl3 valve closed
8/22/2012	12:11:14 AM	PH3 valve closed
8/22/2012	12:11:14 AM	SiCl4 pre valve closed
8/22/2012	12:11:14 AM	SiCl4 post valve closed
8/22/2012	12:11:14 AM	Bypass valve closed
8/22/2012	12:11:14 AM	Bubbler valve closed
8/22/2012	12:11:14 AM	Main Vac valve opened
8/22/2012	12:11:14 AM	Helium MFC set to  0.000000
8/22/2012	12:11:14 AM	H2 MFC set to  0.000000
8/22/2012	12:11:14 AM	BCl3 MFC set to  0.000000
8/22/2012	12:11:14 AM	PH3 MFC set to  0.000000
8/22/2012	12:11:14 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:11:14 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:11:14 AM	Tube furnace set to 150
8/22/2012	12:11:44 AM	H2 valve closed
8/22/2012	12:11:44 AM	BCl3 valve closed
8/22/2012	12:11:44 AM	PH3 valve closed
8/22/2012	12:11:44 AM	SiCl4 pre valve closed
8/22/2012	12:11:44 AM	SiCl4 post valve closed
8/22/2012	12:11:44 AM	Bypass valve closed
8/22/2012	12:11:44 AM	Bubbler valve closed
8/22/2012	12:11:44 AM	Helium valve opened
8/22/2012	12:11:44 AM	Main Vac valve opened
8/22/2012	12:11:44 AM	Helium MFC set to  20.000000
8/22/2012	12:11:44 AM	H2 MFC set to  0.000000
8/22/2012	12:11:44 AM	BCl3 MFC set to  0.000000
8/22/2012	12:11:44 AM	PH3 MFC set to  0.000000
8/22/2012	12:11:44 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:11:45 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:11:45 AM	Tube furnace set to 150
8/22/2012	12:12:15 AM	Helium valve closed
8/22/2012	12:12:15 AM	H2 valve closed
8/22/2012	12:12:15 AM	BCl3 valve closed
8/22/2012	12:12:15 AM	PH3 valve closed
8/22/2012	12:12:15 AM	SiCl4 pre valve closed
8/22/2012	12:12:15 AM	SiCl4 post valve closed
8/22/2012	12:12:15 AM	Bypass valve closed
8/22/2012	12:12:15 AM	Bubbler valve closed
8/22/2012	12:12:15 AM	Main Vac valve opened
8/22/2012	12:12:15 AM	Helium MFC set to  0.000000
8/22/2012	12:12:15 AM	H2 MFC set to  0.000000
8/22/2012	12:12:15 AM	BCl3 MFC set to  0.000000
8/22/2012	12:12:15 AM	PH3 MFC set to  0.000000
8/22/2012	12:12:15 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:12:15 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:12:15 AM	Tube furnace set to 150
8/22/2012	12:12:45 AM	H2 valve closed
8/22/2012	12:12:45 AM	BCl3 valve closed
8/22/2012	12:12:45 AM	PH3 valve closed
8/22/2012	12:12:45 AM	SiCl4 pre valve closed
8/22/2012	12:12:45 AM	SiCl4 post valve closed
8/22/2012	12:12:45 AM	Bypass valve closed
8/22/2012	12:12:45 AM	Bubbler valve closed
8/22/2012	12:12:45 AM	Helium valve opened
8/22/2012	12:12:45 AM	Main Vac valve opened
8/22/2012	12:12:45 AM	Helium MFC set to  20.000000
8/22/2012	12:12:45 AM	H2 MFC set to  0.000000
8/22/2012	12:12:45 AM	BCl3 MFC set to  0.000000
8/22/2012	12:12:45 AM	PH3 MFC set to  0.000000
8/22/2012	12:12:45 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:12:45 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:12:45 AM	Tube furnace set to 150
8/22/2012	12:13:15 AM	Helium valve closed
8/22/2012	12:13:15 AM	H2 valve closed
8/22/2012	12:13:15 AM	BCl3 valve closed
8/22/2012	12:13:15 AM	PH3 valve closed
8/22/2012	12:13:15 AM	SiCl4 pre valve closed
8/22/2012	12:13:15 AM	SiCl4 post valve closed
8/22/2012	12:13:15 AM	Bypass valve closed
8/22/2012	12:13:15 AM	Bubbler valve closed
8/22/2012	12:13:15 AM	Main Vac valve opened
8/22/2012	12:13:15 AM	Helium MFC set to  0.000000
8/22/2012	12:13:15 AM	H2 MFC set to  0.000000
8/22/2012	12:13:15 AM	BCl3 MFC set to  0.000000
8/22/2012	12:13:15 AM	PH3 MFC set to  0.000000
8/22/2012	12:13:15 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:13:15 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:13:15 AM	Tube furnace set to 150
8/22/2012	12:13:45 AM	H2 valve closed
8/22/2012	12:13:45 AM	BCl3 valve closed
8/22/2012	12:13:45 AM	PH3 valve closed
8/22/2012	12:13:45 AM	SiCl4 pre valve closed
8/22/2012	12:13:45 AM	SiCl4 post valve closed
8/22/2012	12:13:45 AM	Bypass valve closed
8/22/2012	12:13:45 AM	Bubbler valve closed
8/22/2012	12:13:45 AM	Helium valve opened
8/22/2012	12:13:45 AM	Main Vac valve opened
8/22/2012	12:13:45 AM	Helium MFC set to  20.000000
8/22/2012	12:13:45 AM	H2 MFC set to  0.000000
8/22/2012	12:13:45 AM	BCl3 MFC set to  0.000000
8/22/2012	12:13:45 AM	PH3 MFC set to  0.000000
8/22/2012	12:13:45 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:13:45 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:13:46 AM	Tube furnace set to 150
8/22/2012	12:14:16 AM	Helium valve closed
8/22/2012	12:14:16 AM	H2 valve closed
8/22/2012	12:14:16 AM	BCl3 valve closed
8/22/2012	12:14:16 AM	PH3 valve closed
8/22/2012	12:14:16 AM	SiCl4 pre valve closed
8/22/2012	12:14:16 AM	SiCl4 post valve closed
8/22/2012	12:14:16 AM	Bypass valve closed
8/22/2012	12:14:16 AM	Bubbler valve closed
8/22/2012	12:14:16 AM	Main Vac valve opened
8/22/2012	12:14:16 AM	Helium MFC set to  0.000000
8/22/2012	12:14:16 AM	H2 MFC set to  0.000000
8/22/2012	12:14:16 AM	BCl3 MFC set to  0.000000
8/22/2012	12:14:16 AM	PH3 MFC set to  0.000000
8/22/2012	12:14:16 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:14:16 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:14:16 AM	Tube furnace set to 150
8/22/2012	12:14:46 AM	H2 valve closed
8/22/2012	12:14:46 AM	BCl3 valve closed
8/22/2012	12:14:46 AM	PH3 valve closed
8/22/2012	12:14:46 AM	SiCl4 pre valve closed
8/22/2012	12:14:46 AM	SiCl4 post valve closed
8/22/2012	12:14:46 AM	Bypass valve closed
8/22/2012	12:14:46 AM	Bubbler valve closed
8/22/2012	12:14:46 AM	Helium valve opened
8/22/2012	12:14:46 AM	Main Vac valve opened
8/22/2012	12:14:46 AM	Helium MFC set to  20.000000
8/22/2012	12:14:46 AM	H2 MFC set to  0.000000
8/22/2012	12:14:46 AM	BCl3 MFC set to  0.000000
8/22/2012	12:14:46 AM	PH3 MFC set to  0.000000
8/22/2012	12:14:46 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:14:46 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:14:46 AM	Tube furnace set to 150
8/22/2012	12:15:16 AM	Helium valve closed
8/22/2012	12:15:16 AM	H2 valve closed
8/22/2012	12:15:16 AM	BCl3 valve closed
8/22/2012	12:15:16 AM	PH3 valve closed
8/22/2012	12:15:16 AM	SiCl4 pre valve closed
8/22/2012	12:15:16 AM	SiCl4 post valve closed
8/22/2012	12:15:16 AM	Bypass valve closed
8/22/2012	12:15:16 AM	Bubbler valve closed
8/22/2012	12:15:16 AM	Main Vac valve opened
8/22/2012	12:15:16 AM	Helium MFC set to  0.000000
8/22/2012	12:15:16 AM	H2 MFC set to  0.000000
8/22/2012	12:15:16 AM	BCl3 MFC set to  0.000000
8/22/2012	12:15:16 AM	PH3 MFC set to  0.000000
8/22/2012	12:15:16 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:15:16 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:15:16 AM	Tube furnace set to 150
8/22/2012	12:15:46 AM	H2 valve closed
8/22/2012	12:15:46 AM	BCl3 valve closed
8/22/2012	12:15:46 AM	PH3 valve closed
8/22/2012	12:15:46 AM	SiCl4 pre valve closed
8/22/2012	12:15:46 AM	SiCl4 post valve closed
8/22/2012	12:15:46 AM	Bypass valve closed
8/22/2012	12:15:46 AM	Bubbler valve closed
8/22/2012	12:15:46 AM	Helium valve opened
8/22/2012	12:15:46 AM	Main Vac valve opened
8/22/2012	12:15:46 AM	Helium MFC set to  20.000000
8/22/2012	12:15:46 AM	H2 MFC set to  0.000000
8/22/2012	12:15:46 AM	BCl3 MFC set to  0.000000
8/22/2012	12:15:46 AM	PH3 MFC set to  0.000000
8/22/2012	12:15:46 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:15:46 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:15:47 AM	Tube furnace set to 150
8/22/2012	12:16:17 AM	Helium valve closed
8/22/2012	12:16:17 AM	H2 valve closed
8/22/2012	12:16:17 AM	BCl3 valve closed
8/22/2012	12:16:17 AM	PH3 valve closed
8/22/2012	12:16:17 AM	SiCl4 pre valve closed
8/22/2012	12:16:17 AM	SiCl4 post valve closed
8/22/2012	12:16:17 AM	Bypass valve closed
8/22/2012	12:16:17 AM	Bubbler valve closed
8/22/2012	12:16:17 AM	Main Vac valve opened
8/22/2012	12:16:17 AM	Helium MFC set to  0.000000
8/22/2012	12:16:17 AM	H2 MFC set to  0.000000
8/22/2012	12:16:17 AM	BCl3 MFC set to  0.000000
8/22/2012	12:16:17 AM	PH3 MFC set to  0.000000
8/22/2012	12:16:17 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:16:17 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:16:17 AM	Tube furnace set to 150
8/22/2012	12:16:47 AM	H2 valve closed
8/22/2012	12:16:47 AM	BCl3 valve closed
8/22/2012	12:16:47 AM	PH3 valve closed
8/22/2012	12:16:47 AM	SiCl4 pre valve closed
8/22/2012	12:16:47 AM	SiCl4 post valve closed
8/22/2012	12:16:47 AM	Bypass valve closed
8/22/2012	12:16:47 AM	Bubbler valve closed
8/22/2012	12:16:47 AM	Helium valve opened
8/22/2012	12:16:47 AM	Main Vac valve opened
8/22/2012	12:16:47 AM	Helium MFC set to  20.000000
8/22/2012	12:16:47 AM	H2 MFC set to  0.000000
8/22/2012	12:16:47 AM	BCl3 MFC set to  0.000000
8/22/2012	12:16:47 AM	PH3 MFC set to  0.000000
8/22/2012	12:16:47 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:16:47 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:16:47 AM	Tube furnace set to 150
8/22/2012	12:17:17 AM	Helium valve closed
8/22/2012	12:17:17 AM	H2 valve closed
8/22/2012	12:17:17 AM	BCl3 valve closed
8/22/2012	12:17:17 AM	PH3 valve closed
8/22/2012	12:17:17 AM	SiCl4 pre valve closed
8/22/2012	12:17:17 AM	SiCl4 post valve closed
8/22/2012	12:17:17 AM	Bypass valve closed
8/22/2012	12:17:17 AM	Bubbler valve closed
8/22/2012	12:17:17 AM	Main Vac valve opened
8/22/2012	12:17:17 AM	Helium MFC set to  0.000000
8/22/2012	12:17:17 AM	H2 MFC set to  0.000000
8/22/2012	12:17:17 AM	BCl3 MFC set to  0.000000
8/22/2012	12:17:17 AM	PH3 MFC set to  0.000000
8/22/2012	12:17:17 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:17:17 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:17:17 AM	Tube furnace set to 150
8/22/2012	12:17:47 AM	H2 valve closed
8/22/2012	12:17:47 AM	BCl3 valve closed
8/22/2012	12:17:47 AM	PH3 valve closed
8/22/2012	12:17:47 AM	SiCl4 pre valve closed
8/22/2012	12:17:47 AM	SiCl4 post valve closed
8/22/2012	12:17:47 AM	Bypass valve closed
8/22/2012	12:17:47 AM	Bubbler valve closed
8/22/2012	12:17:47 AM	Helium valve opened
8/22/2012	12:17:47 AM	Main Vac valve opened
8/22/2012	12:17:47 AM	Helium MFC set to  20.000000
8/22/2012	12:17:47 AM	H2 MFC set to  0.000000
8/22/2012	12:17:47 AM	BCl3 MFC set to  0.000000
8/22/2012	12:17:47 AM	PH3 MFC set to  0.000000
8/22/2012	12:17:47 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:17:47 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:17:48 AM	Tube furnace set to 150
8/22/2012	12:18:18 AM	Helium valve closed
8/22/2012	12:18:18 AM	H2 valve closed
8/22/2012	12:18:18 AM	BCl3 valve closed
8/22/2012	12:18:18 AM	PH3 valve closed
8/22/2012	12:18:18 AM	SiCl4 pre valve closed
8/22/2012	12:18:18 AM	SiCl4 post valve closed
8/22/2012	12:18:18 AM	Bypass valve closed
8/22/2012	12:18:18 AM	Bubbler valve closed
8/22/2012	12:18:18 AM	Main Vac valve opened
8/22/2012	12:18:18 AM	Helium MFC set to  0.000000
8/22/2012	12:18:18 AM	H2 MFC set to  0.000000
8/22/2012	12:18:18 AM	BCl3 MFC set to  0.000000
8/22/2012	12:18:18 AM	PH3 MFC set to  0.000000
8/22/2012	12:18:18 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:18:18 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:18:18 AM	Tube furnace set to 150
8/22/2012	12:18:33 AM	Run aborted at 12:18 AM
8/22/2012	12:18:33 AM	Helium valve closed
8/22/2012	12:18:33 AM	H2 valve closed
8/22/2012	12:18:33 AM	BCl3 valve closed
8/22/2012	12:18:33 AM	PH3 valve closed
8/22/2012	12:18:33 AM	SiCl4 pre valve closed
8/22/2012	12:18:33 AM	SiCl4 post valve closed
8/22/2012	12:18:33 AM	Bypass valve closed
8/22/2012	12:18:33 AM	Main Vac valve closed
8/22/2012	12:18:33 AM	Bubbler valve closed
8/22/2012	12:18:33 AM	Helium MFC set to  0.000000
8/22/2012	12:18:33 AM	H2 MFC set to  0.000000
8/22/2012	12:18:33 AM	BCl3 MFC set to  0.000000
8/22/2012	12:18:33 AM	PH3 MFC set to  0.000000
8/22/2012	12:18:33 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:18:34 AM	Tube furnace set to 0
8/22/2012	12:18:36 AM	Main Vac valve opened
8/22/2012	12:18:48 AM	Main Vac valve closed
8/22/2012	12:19:00 AM	Main Vac valve opened
8/22/2012	12:20:08 AM	Recipe started at 12:20 AM
8/22/2012	12:20:08 AM	Helium valve closed
8/22/2012	12:20:08 AM	H2 valve closed
8/22/2012	12:20:08 AM	BCl3 valve closed
8/22/2012	12:20:08 AM	PH3 valve closed
8/22/2012	12:20:08 AM	SiCl4 pre valve closed
8/22/2012	12:20:08 AM	SiCl4 post valve closed
8/22/2012	12:20:08 AM	Main Vac valve closed
8/22/2012	12:20:08 AM	Bypass valve closed
8/22/2012	12:20:08 AM	Bubbler valve closed
8/22/2012	12:20:08 AM	Helium MFC set to  0.000000
8/22/2012	12:20:08 AM	H2 MFC set to  0.000000
8/22/2012	12:20:08 AM	BCl3 MFC set to  0.000000
8/22/2012	12:20:08 AM	PH3 MFC set to  0.000000
8/22/2012	12:20:08 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:20:08 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:20:09 AM	Tube furnace set to 0
8/22/2012	12:20:12 AM	Helium valve closed
8/22/2012	12:20:12 AM	BCl3 valve closed
8/22/2012	12:20:12 AM	PH3 valve closed
8/22/2012	12:20:12 AM	SiCl4 pre valve closed
8/22/2012	12:20:12 AM	SiCl4 post valve closed
8/22/2012	12:20:12 AM	Main Vac valve closed
8/22/2012	12:20:12 AM	Bypass valve closed
8/22/2012	12:20:12 AM	Bubbler valve closed
8/22/2012	12:20:12 AM	H2 valve opened
8/22/2012	12:20:12 AM	Helium MFC set to  0.000000
8/22/2012	12:20:12 AM	H2 MFC set to  500.000000
8/22/2012	12:20:12 AM	BCl3 MFC set to  0.000000
8/22/2012	12:20:12 AM	PH3 MFC set to  0.000000
8/22/2012	12:20:12 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:20:12 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:20:12 AM	Tube furnace set to 50
8/22/2012	12:21:24 AM	Helium valve closed
8/22/2012	12:21:24 AM	BCl3 valve closed
8/22/2012	12:21:24 AM	PH3 valve closed
8/22/2012	12:21:24 AM	SiCl4 pre valve closed
8/22/2012	12:21:24 AM	SiCl4 post valve closed
8/22/2012	12:21:24 AM	Main Vac valve closed
8/22/2012	12:21:24 AM	Bypass valve closed
8/22/2012	12:21:24 AM	H2 valve opened
8/22/2012	12:21:24 AM	Bubbler valve opened
8/22/2012	12:21:24 AM	Helium MFC set to  0.000000
8/22/2012	12:21:24 AM	H2 MFC set to  500.000000
8/22/2012	12:21:24 AM	BCl3 MFC set to  0.000000
8/22/2012	12:21:24 AM	PH3 MFC set to  0.000000
8/22/2012	12:21:24 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:21:24 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:21:24 AM	Tube furnace set to 50
8/22/2012	12:21:25 AM	Helium valve closed
8/22/2012	12:21:25 AM	BCl3 valve closed
8/22/2012	12:21:25 AM	PH3 valve closed
8/22/2012	12:21:25 AM	SiCl4 pre valve closed
8/22/2012	12:21:25 AM	SiCl4 post valve closed
8/22/2012	12:21:25 AM	Main Vac valve closed
8/22/2012	12:21:25 AM	Bypass valve closed
8/22/2012	12:21:25 AM	H2 valve opened
8/22/2012	12:21:25 AM	Bubbler valve opened
8/22/2012	12:21:25 AM	Helium MFC set to  0.000000
8/22/2012	12:21:25 AM	H2 MFC set to  450.000000
8/22/2012	12:21:25 AM	BCl3 MFC set to  0.000000
8/22/2012	12:21:25 AM	PH3 MFC set to  0.000000
8/22/2012	12:21:25 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:21:25 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:21:25 AM	Tube furnace set to 1000
8/22/2012	12:41:25 AM	Helium valve closed
8/22/2012	12:41:25 AM	PH3 valve closed
8/22/2012	12:41:25 AM	Main Vac valve closed
8/22/2012	12:41:25 AM	Bypass valve closed
8/22/2012	12:41:25 AM	H2 valve opened
8/22/2012	12:41:25 AM	BCl3 valve opened
8/22/2012	12:41:25 AM	SiCl4 pre valve opened
8/22/2012	12:41:25 AM	SiCl4 post valve opened
8/22/2012	12:41:25 AM	Bubbler valve opened
8/22/2012	12:41:25 AM	Helium MFC set to  0.000000
8/22/2012	12:41:25 AM	H2 MFC set to  450.000000
8/22/2012	12:41:25 AM	BCl3 MFC set to  1.200000
8/22/2012	12:41:25 AM	PH3 MFC set to  0.000000
8/22/2012	12:41:25 AM	SiCl4 MFC set to  50.000000
8/22/2012	12:41:25 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:41:26 AM	Tube furnace set to 1000
8/22/2012	12:56:26 AM	Helium valve closed
8/22/2012	12:56:26 AM	BCl3 valve closed
8/22/2012	12:56:26 AM	PH3 valve closed
8/22/2012	12:56:26 AM	SiCl4 pre valve closed
8/22/2012	12:56:26 AM	SiCl4 post valve closed
8/22/2012	12:56:26 AM	Main Vac valve closed
8/22/2012	12:56:26 AM	Bypass valve closed
8/22/2012	12:56:26 AM	H2 valve opened
8/22/2012	12:56:26 AM	Bubbler valve opened
8/22/2012	12:56:26 AM	Helium MFC set to  0.000000
8/22/2012	12:56:26 AM	H2 MFC set to  500.000000
8/22/2012	12:56:26 AM	BCl3 MFC set to  0.000000
8/22/2012	12:56:26 AM	PH3 MFC set to  0.000000
8/22/2012	12:56:26 AM	SiCl4 MFC set to  0.000000
8/22/2012	12:56:26 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:56:26 AM	Tube furnace set to 750
8/22/2012	1:06:26 AM	H2 valve closed
8/22/2012	1:06:26 AM	BCl3 valve closed
8/22/2012	1:06:26 AM	PH3 valve closed
8/22/2012	1:06:26 AM	SiCl4 pre valve closed
8/22/2012	1:06:26 AM	SiCl4 post valve closed
8/22/2012	1:06:26 AM	Main Vac valve closed
8/22/2012	1:06:26 AM	Bypass valve closed
8/22/2012	1:06:26 AM	Helium valve opened
8/22/2012	1:06:26 AM	Bubbler valve opened
8/22/2012	1:06:26 AM	Helium MFC set to  400.000000
8/22/2012	1:06:26 AM	H2 MFC set to  0.000000
8/22/2012	1:06:26 AM	BCl3 MFC set to  0.000000
8/22/2012	1:06:26 AM	PH3 MFC set to  0.000000
8/22/2012	1:06:26 AM	SiCl4 MFC set to  0.000000
8/22/2012	1:06:26 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:06:26 AM	Tube furnace set to 0
8/22/2012	1:16:19 AM	Run aborted at 1:16 AM
8/22/2012	1:16:19 AM	Helium valve closed
8/22/2012	1:16:19 AM	H2 valve closed
8/22/2012	1:16:19 AM	BCl3 valve closed
8/22/2012	1:16:19 AM	PH3 valve closed
8/22/2012	1:16:19 AM	SiCl4 pre valve closed
8/22/2012	1:16:19 AM	SiCl4 post valve closed
8/22/2012	1:16:19 AM	Bypass valve closed
8/22/2012	1:16:19 AM	Main Vac valve closed
8/22/2012	1:16:19 AM	Bubbler valve closed
8/22/2012	1:16:19 AM	Helium MFC set to  0.000000
8/22/2012	1:16:19 AM	H2 MFC set to  0.000000
8/22/2012	1:16:19 AM	BCl3 MFC set to  0.000000
8/22/2012	1:16:19 AM	PH3 MFC set to  0.000000
8/22/2012	1:16:19 AM	SiCl4 MFC set to  0.000000
8/22/2012	1:16:19 AM	Tube furnace set to 0
8/22/2012	1:16:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	1:16:21 AM	Recipe started at 1:16 AM
8/22/2012	1:16:22 AM	Helium valve closed
8/22/2012	1:16:22 AM	H2 valve closed
8/22/2012	1:16:22 AM	BCl3 valve closed
8/22/2012	1:16:22 AM	PH3 valve closed
8/22/2012	1:16:22 AM	SiCl4 pre valve closed
8/22/2012	1:16:22 AM	SiCl4 post valve closed
8/22/2012	1:16:22 AM	Main Vac valve closed
8/22/2012	1:16:22 AM	Bypass valve closed
8/22/2012	1:16:22 AM	Bubbler valve closed
8/22/2012	1:16:22 AM	Helium MFC set to  0.000000
8/22/2012	1:16:22 AM	H2 MFC set to  0.000000
8/22/2012	1:16:22 AM	BCl3 MFC set to  0.000000
8/22/2012	1:16:22 AM	PH3 MFC set to  0.000000
8/22/2012	1:16:22 AM	SiCl4 MFC set to  0.000000
8/22/2012	1:16:22 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:16:22 AM	Tube furnace set to 0
8/22/2012	1:16:25 AM	H2 valve closed
8/22/2012	1:16:25 AM	BCl3 valve closed
8/22/2012	1:16:25 AM	PH3 valve closed
8/22/2012	1:16:25 AM	SiCl4 pre valve closed
8/22/2012	1:16:25 AM	SiCl4 post valve closed
8/22/2012	1:16:25 AM	Main Vac valve closed
8/22/2012	1:16:25 AM	Bypass valve closed
8/22/2012	1:16:25 AM	Bubbler valve closed
8/22/2012	1:16:25 AM	Helium valve opened
8/22/2012	1:16:25 AM	Helium MFC set to  500.000000
8/22/2012	1:16:25 AM	H2 MFC set to  0.000000
8/22/2012	1:16:25 AM	BCl3 MFC set to  0.000000
8/22/2012	1:16:25 AM	PH3 MFC set to  0.000000
8/22/2012	1:16:25 AM	SiCl4 MFC set to  0.000000
8/22/2012	1:16:25 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:16:25 AM	Tube furnace set to 0
8/22/2012	1:16:25 AM	Helium valve closed
8/22/2012	1:16:25 AM	H2 valve closed
8/22/2012	1:16:25 AM	BCl3 valve closed
8/22/2012	1:16:25 AM	PH3 valve closed
8/22/2012	1:16:25 AM	SiCl4 pre valve closed
8/22/2012	1:16:25 AM	SiCl4 post valve closed
8/22/2012	1:16:25 AM	Main Vac valve closed
8/22/2012	1:16:25 AM	Bypass valve closed
8/22/2012	1:16:25 AM	Bubbler valve closed
8/22/2012	1:16:25 AM	Helium MFC set to  0.000000
8/22/2012	1:16:25 AM	H2 MFC set to  0.000000
8/22/2012	1:16:25 AM	BCl3 MFC set to  0.000000
8/22/2012	1:16:25 AM	PH3 MFC set to  0.000000
8/22/2012	1:16:25 AM	SiCl4 MFC set to  0.000000
8/22/2012	1:16:25 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:16:25 AM	Tube furnace set to 0
8/22/2012	1:16:26 AM	Run finished at 1:16 AM
8/22/2012	1:16:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	1:22:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	1:22:48 AM	Recipe started at 1:22 AM
8/22/2012	1:22:48 AM	Helium valve closed
8/22/2012	1:22:48 AM	H2 valve closed
8/22/2012	1:22:48 AM	BCl3 valve closed
8/22/2012	1:22:48 AM	PH3 valve closed
8/22/2012	1:22:48 AM	SiCl4 pre valve closed
8/22/2012	1:22:48 AM	SiCl4 post valve closed
8/22/2012	1:22:48 AM	Main Vac valve closed
8/22/2012	1:22:48 AM	Bubbler valve closed
8/22/2012	1:22:48 AM	Bypass valve opened
8/22/2012	1:22:48 AM	Helium MFC set to  0.000000
8/22/2012	1:22:48 AM	H2 MFC set to  0.000000
8/22/2012	1:22:48 AM	BCl3 MFC set to  0.000000
8/22/2012	1:22:48 AM	PH3 MFC set to  0.000000
8/22/2012	1:22:48 AM	SiCl4 MFC set to  0.000000
8/22/2012	1:22:48 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:22:48 AM	Tube furnace set to 0
8/22/2012	1:24:06 AM	Helium valve closed
8/22/2012	1:24:06 AM	H2 valve closed
8/22/2012	1:24:06 AM	BCl3 valve closed
8/22/2012	1:24:06 AM	PH3 valve closed
8/22/2012	1:24:06 AM	SiCl4 pre valve closed
8/22/2012	1:24:06 AM	SiCl4 post valve closed
8/22/2012	1:24:06 AM	Main Vac valve closed
8/22/2012	1:24:06 AM	Bubbler valve closed
8/22/2012	1:24:06 AM	Bypass valve opened
8/22/2012	1:24:06 AM	Helium MFC set to  0.000000
8/22/2012	1:24:06 AM	H2 MFC set to  0.000000
8/22/2012	1:24:06 AM	BCl3 MFC set to  0.000000
8/22/2012	1:24:06 AM	PH3 MFC set to  0.000000
8/22/2012	1:24:06 AM	SiCl4 MFC set to  0.000000
8/22/2012	1:24:06 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:24:06 AM	Tube furnace set to 0
8/22/2012	1:25:06 AM	Helium valve closed
8/22/2012	1:25:06 AM	H2 valve closed
8/22/2012	1:25:06 AM	BCl3 valve closed
8/22/2012	1:25:06 AM	PH3 valve closed
8/22/2012	1:25:06 AM	SiCl4 pre valve closed
8/22/2012	1:25:06 AM	SiCl4 post valve closed
8/22/2012	1:25:06 AM	Bypass valve closed
8/22/2012	1:25:06 AM	Bubbler valve closed
8/22/2012	1:25:06 AM	Main Vac valve opened
8/22/2012	1:25:06 AM	Helium MFC set to  0.000000
8/22/2012	1:25:06 AM	H2 MFC set to  0.000000
8/22/2012	1:25:06 AM	BCl3 MFC set to  0.000000
8/22/2012	1:25:06 AM	PH3 MFC set to  0.000000
8/22/2012	1:25:06 AM	SiCl4 MFC set to  0.000000
8/22/2012	1:25:06 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:25:07 AM	Tube furnace set to 0
8/22/2012	1:25:08 AM	Run finished at 1:25 AM
8/22/2012	1:25:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	2:04:16 AM	Recipe started at 2:04 AM
8/22/2012	2:04:16 AM	Helium valve closed
8/22/2012	2:04:16 AM	H2 valve closed
8/22/2012	2:04:16 AM	BCl3 valve closed
8/22/2012	2:04:16 AM	PH3 valve closed
8/22/2012	2:04:16 AM	SiCl4 pre valve closed
8/22/2012	2:04:16 AM	SiCl4 post valve closed
8/22/2012	2:04:16 AM	Main Vac valve closed
8/22/2012	2:04:16 AM	Bubbler valve closed
8/22/2012	2:04:16 AM	Bypass valve opened
8/22/2012	2:04:16 AM	Helium MFC set to  0.000000
8/22/2012	2:04:16 AM	H2 MFC set to  0.000000
8/22/2012	2:04:16 AM	BCl3 MFC set to  0.000000
8/22/2012	2:04:16 AM	PH3 MFC set to  0.000000
8/22/2012	2:04:16 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:04:16 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:04:16 AM	Tube furnace set to 150
8/22/2012	2:04:16 AM	Helium valve closed
8/22/2012	2:04:16 AM	H2 valve closed
8/22/2012	2:04:16 AM	BCl3 valve closed
8/22/2012	2:04:16 AM	PH3 valve closed
8/22/2012	2:04:16 AM	SiCl4 pre valve closed
8/22/2012	2:04:16 AM	SiCl4 post valve closed
8/22/2012	2:04:16 AM	Main Vac valve closed
8/22/2012	2:04:16 AM	Bubbler valve closed
8/22/2012	2:04:16 AM	Bypass valve opened
8/22/2012	2:04:16 AM	Helium MFC set to  0.000000
8/22/2012	2:04:16 AM	H2 MFC set to  0.000000
8/22/2012	2:04:16 AM	BCl3 MFC set to  0.000000
8/22/2012	2:04:16 AM	PH3 MFC set to  0.000000
8/22/2012	2:04:16 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:04:16 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:04:16 AM	Tube furnace set to 150
8/22/2012	2:04:17 AM	Helium valve closed
8/22/2012	2:04:17 AM	H2 valve closed
8/22/2012	2:04:17 AM	BCl3 valve closed
8/22/2012	2:04:17 AM	PH3 valve closed
8/22/2012	2:04:17 AM	SiCl4 pre valve closed
8/22/2012	2:04:17 AM	SiCl4 post valve closed
8/22/2012	2:04:17 AM	Bypass valve closed
8/22/2012	2:04:17 AM	Bubbler valve closed
8/22/2012	2:04:17 AM	Main Vac valve opened
8/22/2012	2:04:17 AM	Helium MFC set to  0.000000
8/22/2012	2:04:17 AM	H2 MFC set to  0.000000
8/22/2012	2:04:17 AM	BCl3 MFC set to  0.000000
8/22/2012	2:04:17 AM	PH3 MFC set to  0.000000
8/22/2012	2:04:17 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:04:17 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:04:17 AM	Tube furnace set to 150
8/22/2012	2:04:18 AM	H2 valve closed
8/22/2012	2:04:18 AM	BCl3 valve closed
8/22/2012	2:04:18 AM	PH3 valve closed
8/22/2012	2:04:18 AM	SiCl4 pre valve closed
8/22/2012	2:04:18 AM	SiCl4 post valve closed
8/22/2012	2:04:18 AM	Bypass valve closed
8/22/2012	2:04:18 AM	Bubbler valve closed
8/22/2012	2:04:18 AM	Helium valve opened
8/22/2012	2:04:18 AM	Main Vac valve opened
8/22/2012	2:04:18 AM	Helium MFC set to  20.000000
8/22/2012	2:04:18 AM	H2 MFC set to  0.000000
8/22/2012	2:04:18 AM	BCl3 MFC set to  0.000000
8/22/2012	2:04:18 AM	PH3 MFC set to  0.000000
8/22/2012	2:04:18 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:04:18 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:04:18 AM	Tube furnace set to 150
8/22/2012	2:04:48 AM	Helium valve closed
8/22/2012	2:04:48 AM	H2 valve closed
8/22/2012	2:04:48 AM	BCl3 valve closed
8/22/2012	2:04:48 AM	PH3 valve closed
8/22/2012	2:04:48 AM	SiCl4 pre valve closed
8/22/2012	2:04:48 AM	SiCl4 post valve closed
8/22/2012	2:04:48 AM	Bypass valve closed
8/22/2012	2:04:48 AM	Bubbler valve closed
8/22/2012	2:04:48 AM	Main Vac valve opened
8/22/2012	2:04:48 AM	Helium MFC set to  0.000000
8/22/2012	2:04:48 AM	H2 MFC set to  0.000000
8/22/2012	2:04:48 AM	BCl3 MFC set to  0.000000
8/22/2012	2:04:48 AM	PH3 MFC set to  0.000000
8/22/2012	2:04:48 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:04:48 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:04:48 AM	Tube furnace set to 150
8/22/2012	2:05:18 AM	H2 valve closed
8/22/2012	2:05:18 AM	BCl3 valve closed
8/22/2012	2:05:18 AM	PH3 valve closed
8/22/2012	2:05:18 AM	SiCl4 pre valve closed
8/22/2012	2:05:18 AM	SiCl4 post valve closed
8/22/2012	2:05:18 AM	Bypass valve closed
8/22/2012	2:05:18 AM	Bubbler valve closed
8/22/2012	2:05:18 AM	Helium valve opened
8/22/2012	2:05:18 AM	Main Vac valve opened
8/22/2012	2:05:18 AM	Helium MFC set to  20.000000
8/22/2012	2:05:18 AM	H2 MFC set to  0.000000
8/22/2012	2:05:18 AM	BCl3 MFC set to  0.000000
8/22/2012	2:05:18 AM	PH3 MFC set to  0.000000
8/22/2012	2:05:18 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:05:18 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:05:19 AM	Tube furnace set to 150
8/22/2012	2:05:49 AM	Helium valve closed
8/22/2012	2:05:49 AM	H2 valve closed
8/22/2012	2:05:49 AM	BCl3 valve closed
8/22/2012	2:05:49 AM	PH3 valve closed
8/22/2012	2:05:49 AM	SiCl4 pre valve closed
8/22/2012	2:05:49 AM	SiCl4 post valve closed
8/22/2012	2:05:49 AM	Bypass valve closed
8/22/2012	2:05:49 AM	Bubbler valve closed
8/22/2012	2:05:49 AM	Main Vac valve opened
8/22/2012	2:05:49 AM	Helium MFC set to  0.000000
8/22/2012	2:05:49 AM	H2 MFC set to  0.000000
8/22/2012	2:05:49 AM	BCl3 MFC set to  0.000000
8/22/2012	2:05:49 AM	PH3 MFC set to  0.000000
8/22/2012	2:05:49 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:05:49 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:05:49 AM	Tube furnace set to 150
8/22/2012	2:06:19 AM	H2 valve closed
8/22/2012	2:06:19 AM	BCl3 valve closed
8/22/2012	2:06:19 AM	PH3 valve closed
8/22/2012	2:06:19 AM	SiCl4 pre valve closed
8/22/2012	2:06:19 AM	SiCl4 post valve closed
8/22/2012	2:06:19 AM	Bypass valve closed
8/22/2012	2:06:19 AM	Bubbler valve closed
8/22/2012	2:06:19 AM	Helium valve opened
8/22/2012	2:06:19 AM	Main Vac valve opened
8/22/2012	2:06:19 AM	Helium MFC set to  20.000000
8/22/2012	2:06:19 AM	H2 MFC set to  0.000000
8/22/2012	2:06:19 AM	BCl3 MFC set to  0.000000
8/22/2012	2:06:19 AM	PH3 MFC set to  0.000000
8/22/2012	2:06:19 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:06:19 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:06:19 AM	Tube furnace set to 150
8/22/2012	2:06:49 AM	Helium valve closed
8/22/2012	2:06:49 AM	H2 valve closed
8/22/2012	2:06:49 AM	BCl3 valve closed
8/22/2012	2:06:49 AM	PH3 valve closed
8/22/2012	2:06:49 AM	SiCl4 pre valve closed
8/22/2012	2:06:49 AM	SiCl4 post valve closed
8/22/2012	2:06:49 AM	Bypass valve closed
8/22/2012	2:06:49 AM	Bubbler valve closed
8/22/2012	2:06:49 AM	Main Vac valve opened
8/22/2012	2:06:49 AM	Helium MFC set to  0.000000
8/22/2012	2:06:49 AM	H2 MFC set to  0.000000
8/22/2012	2:06:49 AM	BCl3 MFC set to  0.000000
8/22/2012	2:06:49 AM	PH3 MFC set to  0.000000
8/22/2012	2:06:49 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:06:49 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:06:49 AM	Tube furnace set to 150
8/22/2012	2:07:19 AM	H2 valve closed
8/22/2012	2:07:19 AM	BCl3 valve closed
8/22/2012	2:07:19 AM	PH3 valve closed
8/22/2012	2:07:19 AM	SiCl4 pre valve closed
8/22/2012	2:07:19 AM	SiCl4 post valve closed
8/22/2012	2:07:19 AM	Bypass valve closed
8/22/2012	2:07:19 AM	Bubbler valve closed
8/22/2012	2:07:19 AM	Helium valve opened
8/22/2012	2:07:19 AM	Main Vac valve opened
8/22/2012	2:07:19 AM	Helium MFC set to  20.000000
8/22/2012	2:07:19 AM	H2 MFC set to  0.000000
8/22/2012	2:07:19 AM	BCl3 MFC set to  0.000000
8/22/2012	2:07:19 AM	PH3 MFC set to  0.000000
8/22/2012	2:07:19 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:07:19 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:07:20 AM	Tube furnace set to 150
8/22/2012	2:07:50 AM	Helium valve closed
8/22/2012	2:07:50 AM	H2 valve closed
8/22/2012	2:07:50 AM	BCl3 valve closed
8/22/2012	2:07:50 AM	PH3 valve closed
8/22/2012	2:07:50 AM	SiCl4 pre valve closed
8/22/2012	2:07:50 AM	SiCl4 post valve closed
8/22/2012	2:07:50 AM	Bypass valve closed
8/22/2012	2:07:50 AM	Bubbler valve closed
8/22/2012	2:07:50 AM	Main Vac valve opened
8/22/2012	2:07:50 AM	Helium MFC set to  0.000000
8/22/2012	2:07:50 AM	H2 MFC set to  0.000000
8/22/2012	2:07:50 AM	BCl3 MFC set to  0.000000
8/22/2012	2:07:50 AM	PH3 MFC set to  0.000000
8/22/2012	2:07:50 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:07:50 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:07:50 AM	Tube furnace set to 150
8/22/2012	2:08:20 AM	H2 valve closed
8/22/2012	2:08:20 AM	BCl3 valve closed
8/22/2012	2:08:20 AM	PH3 valve closed
8/22/2012	2:08:20 AM	SiCl4 pre valve closed
8/22/2012	2:08:20 AM	SiCl4 post valve closed
8/22/2012	2:08:20 AM	Bypass valve closed
8/22/2012	2:08:20 AM	Bubbler valve closed
8/22/2012	2:08:20 AM	Helium valve opened
8/22/2012	2:08:20 AM	Main Vac valve opened
8/22/2012	2:08:20 AM	Helium MFC set to  20.000000
8/22/2012	2:08:20 AM	H2 MFC set to  0.000000
8/22/2012	2:08:20 AM	BCl3 MFC set to  0.000000
8/22/2012	2:08:20 AM	PH3 MFC set to  0.000000
8/22/2012	2:08:20 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:08:20 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:08:20 AM	Tube furnace set to 150
8/22/2012	2:08:50 AM	Helium valve closed
8/22/2012	2:08:50 AM	H2 valve closed
8/22/2012	2:08:50 AM	BCl3 valve closed
8/22/2012	2:08:50 AM	PH3 valve closed
8/22/2012	2:08:50 AM	SiCl4 pre valve closed
8/22/2012	2:08:50 AM	SiCl4 post valve closed
8/22/2012	2:08:50 AM	Bypass valve closed
8/22/2012	2:08:50 AM	Bubbler valve closed
8/22/2012	2:08:50 AM	Main Vac valve opened
8/22/2012	2:08:50 AM	Helium MFC set to  0.000000
8/22/2012	2:08:50 AM	H2 MFC set to  0.000000
8/22/2012	2:08:50 AM	BCl3 MFC set to  0.000000
8/22/2012	2:08:50 AM	PH3 MFC set to  0.000000
8/22/2012	2:08:50 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:08:50 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:08:50 AM	Tube furnace set to 150
8/22/2012	2:09:20 AM	H2 valve closed
8/22/2012	2:09:20 AM	BCl3 valve closed
8/22/2012	2:09:20 AM	PH3 valve closed
8/22/2012	2:09:20 AM	SiCl4 pre valve closed
8/22/2012	2:09:20 AM	SiCl4 post valve closed
8/22/2012	2:09:20 AM	Bypass valve closed
8/22/2012	2:09:20 AM	Bubbler valve closed
8/22/2012	2:09:20 AM	Helium valve opened
8/22/2012	2:09:20 AM	Main Vac valve opened
8/22/2012	2:09:20 AM	Helium MFC set to  20.000000
8/22/2012	2:09:20 AM	H2 MFC set to  0.000000
8/22/2012	2:09:20 AM	BCl3 MFC set to  0.000000
8/22/2012	2:09:20 AM	PH3 MFC set to  0.000000
8/22/2012	2:09:20 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:09:20 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:09:21 AM	Tube furnace set to 150
8/22/2012	2:09:51 AM	Helium valve closed
8/22/2012	2:09:51 AM	H2 valve closed
8/22/2012	2:09:51 AM	BCl3 valve closed
8/22/2012	2:09:51 AM	PH3 valve closed
8/22/2012	2:09:51 AM	SiCl4 pre valve closed
8/22/2012	2:09:51 AM	SiCl4 post valve closed
8/22/2012	2:09:51 AM	Bypass valve closed
8/22/2012	2:09:51 AM	Bubbler valve closed
8/22/2012	2:09:51 AM	Main Vac valve opened
8/22/2012	2:09:51 AM	Helium MFC set to  0.000000
8/22/2012	2:09:51 AM	H2 MFC set to  0.000000
8/22/2012	2:09:51 AM	BCl3 MFC set to  0.000000
8/22/2012	2:09:51 AM	PH3 MFC set to  0.000000
8/22/2012	2:09:51 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:09:51 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:09:51 AM	Tube furnace set to 150
8/22/2012	2:10:21 AM	H2 valve closed
8/22/2012	2:10:21 AM	BCl3 valve closed
8/22/2012	2:10:21 AM	PH3 valve closed
8/22/2012	2:10:21 AM	SiCl4 pre valve closed
8/22/2012	2:10:21 AM	SiCl4 post valve closed
8/22/2012	2:10:21 AM	Bypass valve closed
8/22/2012	2:10:21 AM	Bubbler valve closed
8/22/2012	2:10:21 AM	Helium valve opened
8/22/2012	2:10:21 AM	Main Vac valve opened
8/22/2012	2:10:21 AM	Helium MFC set to  20.000000
8/22/2012	2:10:21 AM	H2 MFC set to  0.000000
8/22/2012	2:10:21 AM	BCl3 MFC set to  0.000000
8/22/2012	2:10:21 AM	PH3 MFC set to  0.000000
8/22/2012	2:10:21 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:10:21 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:10:21 AM	Tube furnace set to 150
8/22/2012	2:10:51 AM	Helium valve closed
8/22/2012	2:10:51 AM	H2 valve closed
8/22/2012	2:10:51 AM	BCl3 valve closed
8/22/2012	2:10:51 AM	PH3 valve closed
8/22/2012	2:10:51 AM	SiCl4 pre valve closed
8/22/2012	2:10:51 AM	SiCl4 post valve closed
8/22/2012	2:10:51 AM	Bypass valve closed
8/22/2012	2:10:51 AM	Bubbler valve closed
8/22/2012	2:10:51 AM	Main Vac valve opened
8/22/2012	2:10:51 AM	Helium MFC set to  0.000000
8/22/2012	2:10:51 AM	H2 MFC set to  0.000000
8/22/2012	2:10:51 AM	BCl3 MFC set to  0.000000
8/22/2012	2:10:51 AM	PH3 MFC set to  0.000000
8/22/2012	2:10:51 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:10:51 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:10:51 AM	Tube furnace set to 150
8/22/2012	2:11:21 AM	H2 valve closed
8/22/2012	2:11:21 AM	BCl3 valve closed
8/22/2012	2:11:21 AM	PH3 valve closed
8/22/2012	2:11:21 AM	SiCl4 pre valve closed
8/22/2012	2:11:21 AM	SiCl4 post valve closed
8/22/2012	2:11:21 AM	Bypass valve closed
8/22/2012	2:11:21 AM	Bubbler valve closed
8/22/2012	2:11:21 AM	Helium valve opened
8/22/2012	2:11:21 AM	Main Vac valve opened
8/22/2012	2:11:21 AM	Helium MFC set to  20.000000
8/22/2012	2:11:21 AM	H2 MFC set to  0.000000
8/22/2012	2:11:21 AM	BCl3 MFC set to  0.000000
8/22/2012	2:11:21 AM	PH3 MFC set to  0.000000
8/22/2012	2:11:21 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:11:21 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:11:22 AM	Tube furnace set to 150
8/22/2012	2:11:52 AM	Helium valve closed
8/22/2012	2:11:52 AM	H2 valve closed
8/22/2012	2:11:52 AM	BCl3 valve closed
8/22/2012	2:11:52 AM	PH3 valve closed
8/22/2012	2:11:52 AM	SiCl4 pre valve closed
8/22/2012	2:11:52 AM	SiCl4 post valve closed
8/22/2012	2:11:52 AM	Bypass valve closed
8/22/2012	2:11:52 AM	Bubbler valve closed
8/22/2012	2:11:52 AM	Main Vac valve opened
8/22/2012	2:11:52 AM	Helium MFC set to  0.000000
8/22/2012	2:11:52 AM	H2 MFC set to  0.000000
8/22/2012	2:11:52 AM	BCl3 MFC set to  0.000000
8/22/2012	2:11:52 AM	PH3 MFC set to  0.000000
8/22/2012	2:11:52 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:11:52 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:11:52 AM	Tube furnace set to 150
8/22/2012	2:12:22 AM	H2 valve closed
8/22/2012	2:12:22 AM	BCl3 valve closed
8/22/2012	2:12:22 AM	PH3 valve closed
8/22/2012	2:12:22 AM	SiCl4 pre valve closed
8/22/2012	2:12:22 AM	SiCl4 post valve closed
8/22/2012	2:12:22 AM	Bypass valve closed
8/22/2012	2:12:22 AM	Bubbler valve closed
8/22/2012	2:12:22 AM	Helium valve opened
8/22/2012	2:12:22 AM	Main Vac valve opened
8/22/2012	2:12:22 AM	Helium MFC set to  20.000000
8/22/2012	2:12:22 AM	H2 MFC set to  0.000000
8/22/2012	2:12:22 AM	BCl3 MFC set to  0.000000
8/22/2012	2:12:22 AM	PH3 MFC set to  0.000000
8/22/2012	2:12:22 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:12:22 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:12:22 AM	Tube furnace set to 150
8/22/2012	2:12:52 AM	Helium valve closed
8/22/2012	2:12:52 AM	H2 valve closed
8/22/2012	2:12:52 AM	BCl3 valve closed
8/22/2012	2:12:52 AM	PH3 valve closed
8/22/2012	2:12:52 AM	SiCl4 pre valve closed
8/22/2012	2:12:52 AM	SiCl4 post valve closed
8/22/2012	2:12:52 AM	Bypass valve closed
8/22/2012	2:12:52 AM	Bubbler valve closed
8/22/2012	2:12:52 AM	Main Vac valve opened
8/22/2012	2:12:52 AM	Helium MFC set to  0.000000
8/22/2012	2:12:52 AM	H2 MFC set to  0.000000
8/22/2012	2:12:52 AM	BCl3 MFC set to  0.000000
8/22/2012	2:12:52 AM	PH3 MFC set to  0.000000
8/22/2012	2:12:52 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:12:52 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:12:52 AM	Tube furnace set to 150
8/22/2012	2:13:22 AM	H2 valve closed
8/22/2012	2:13:22 AM	BCl3 valve closed
8/22/2012	2:13:22 AM	PH3 valve closed
8/22/2012	2:13:22 AM	SiCl4 pre valve closed
8/22/2012	2:13:22 AM	SiCl4 post valve closed
8/22/2012	2:13:22 AM	Bypass valve closed
8/22/2012	2:13:22 AM	Bubbler valve closed
8/22/2012	2:13:22 AM	Helium valve opened
8/22/2012	2:13:22 AM	Main Vac valve opened
8/22/2012	2:13:22 AM	Helium MFC set to  20.000000
8/22/2012	2:13:22 AM	H2 MFC set to  0.000000
8/22/2012	2:13:22 AM	BCl3 MFC set to  0.000000
8/22/2012	2:13:22 AM	PH3 MFC set to  0.000000
8/22/2012	2:13:22 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:13:22 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:13:23 AM	Tube furnace set to 150
8/22/2012	2:13:53 AM	Helium valve closed
8/22/2012	2:13:53 AM	H2 valve closed
8/22/2012	2:13:53 AM	BCl3 valve closed
8/22/2012	2:13:53 AM	PH3 valve closed
8/22/2012	2:13:53 AM	SiCl4 pre valve closed
8/22/2012	2:13:53 AM	SiCl4 post valve closed
8/22/2012	2:13:53 AM	Bypass valve closed
8/22/2012	2:13:53 AM	Bubbler valve closed
8/22/2012	2:13:53 AM	Main Vac valve opened
8/22/2012	2:13:53 AM	Helium MFC set to  0.000000
8/22/2012	2:13:53 AM	H2 MFC set to  0.000000
8/22/2012	2:13:53 AM	BCl3 MFC set to  0.000000
8/22/2012	2:13:53 AM	PH3 MFC set to  0.000000
8/22/2012	2:13:53 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:13:53 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:13:53 AM	Tube furnace set to 150
8/22/2012	2:13:54 AM	Run finished at 2:13 AM
8/22/2012	2:27:13 AM	Main Vac valve closed
8/22/2012	2:27:26 AM	Main Vac valve opened
8/22/2012	2:28:28 AM	Recipe started at 2:28 AM
8/22/2012	2:28:28 AM	Helium valve closed
8/22/2012	2:28:28 AM	H2 valve closed
8/22/2012	2:28:28 AM	BCl3 valve closed
8/22/2012	2:28:29 AM	PH3 valve closed
8/22/2012	2:28:29 AM	SiCl4 pre valve closed
8/22/2012	2:28:29 AM	SiCl4 post valve closed
8/22/2012	2:28:29 AM	Main Vac valve closed
8/22/2012	2:28:29 AM	Bypass valve closed
8/22/2012	2:28:29 AM	Bubbler valve closed
8/22/2012	2:28:29 AM	Helium MFC set to  0.000000
8/22/2012	2:28:29 AM	H2 MFC set to  0.000000
8/22/2012	2:28:29 AM	BCl3 MFC set to  0.000000
8/22/2012	2:28:29 AM	PH3 MFC set to  0.000000
8/22/2012	2:28:29 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:28:29 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:28:29 AM	Tube furnace set to 0
8/22/2012	2:28:32 AM	Helium valve closed
8/22/2012	2:28:32 AM	BCl3 valve closed
8/22/2012	2:28:32 AM	PH3 valve closed
8/22/2012	2:28:32 AM	SiCl4 pre valve closed
8/22/2012	2:28:32 AM	SiCl4 post valve closed
8/22/2012	2:28:32 AM	Main Vac valve closed
8/22/2012	2:28:32 AM	Bypass valve closed
8/22/2012	2:28:32 AM	Bubbler valve closed
8/22/2012	2:28:32 AM	H2 valve opened
8/22/2012	2:28:32 AM	Helium MFC set to  0.000000
8/22/2012	2:28:32 AM	H2 MFC set to  500.000000
8/22/2012	2:28:32 AM	BCl3 MFC set to  0.000000
8/22/2012	2:28:32 AM	PH3 MFC set to  0.000000
8/22/2012	2:28:32 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:28:32 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:28:32 AM	Tube furnace set to 50
8/22/2012	2:29:44 AM	Helium valve closed
8/22/2012	2:29:44 AM	BCl3 valve closed
8/22/2012	2:29:44 AM	PH3 valve closed
8/22/2012	2:29:44 AM	SiCl4 pre valve closed
8/22/2012	2:29:44 AM	SiCl4 post valve closed
8/22/2012	2:29:44 AM	Main Vac valve closed
8/22/2012	2:29:44 AM	Bypass valve closed
8/22/2012	2:29:44 AM	H2 valve opened
8/22/2012	2:29:44 AM	Bubbler valve opened
8/22/2012	2:29:44 AM	Helium MFC set to  0.000000
8/22/2012	2:29:44 AM	H2 MFC set to  500.000000
8/22/2012	2:29:44 AM	BCl3 MFC set to  0.000000
8/22/2012	2:29:44 AM	PH3 MFC set to  0.000000
8/22/2012	2:29:44 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:29:44 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:29:44 AM	Tube furnace set to 50
8/22/2012	2:29:45 AM	Helium valve closed
8/22/2012	2:29:45 AM	BCl3 valve closed
8/22/2012	2:29:45 AM	PH3 valve closed
8/22/2012	2:29:45 AM	SiCl4 pre valve closed
8/22/2012	2:29:45 AM	SiCl4 post valve closed
8/22/2012	2:29:45 AM	Main Vac valve closed
8/22/2012	2:29:45 AM	Bypass valve closed
8/22/2012	2:29:45 AM	H2 valve opened
8/22/2012	2:29:45 AM	Bubbler valve opened
8/22/2012	2:29:45 AM	Helium MFC set to  0.000000
8/22/2012	2:29:45 AM	H2 MFC set to  450.000000
8/22/2012	2:29:45 AM	BCl3 MFC set to  0.000000
8/22/2012	2:29:45 AM	PH3 MFC set to  0.000000
8/22/2012	2:29:45 AM	SiCl4 MFC set to  0.000000
8/22/2012	2:29:45 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:29:45 AM	Tube furnace set to 1000
8/22/2012	2:49:45 AM	Helium valve closed
8/22/2012	2:49:45 AM	PH3 valve closed
8/22/2012	2:49:45 AM	Main Vac valve closed
8/22/2012	2:49:45 AM	Bypass valve closed
8/22/2012	2:49:45 AM	H2 valve opened
8/22/2012	2:49:45 AM	BCl3 valve opened
8/22/2012	2:49:45 AM	SiCl4 pre valve opened
8/22/2012	2:49:45 AM	SiCl4 post valve opened
8/22/2012	2:49:46 AM	Bubbler valve opened
8/22/2012	2:49:46 AM	Helium MFC set to  0.000000
8/22/2012	2:49:46 AM	H2 MFC set to  450.000000
8/22/2012	2:49:46 AM	BCl3 MFC set to  1.200000
8/22/2012	2:49:46 AM	PH3 MFC set to  0.000000
8/22/2012	2:49:46 AM	SiCl4 MFC set to  50.000000
8/22/2012	2:49:46 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:49:46 AM	Tube furnace set to 1000
8/22/2012	3:04:46 AM	Helium valve closed
8/22/2012	3:04:46 AM	BCl3 valve closed
8/22/2012	3:04:46 AM	PH3 valve closed
8/22/2012	3:04:46 AM	SiCl4 pre valve closed
8/22/2012	3:04:46 AM	SiCl4 post valve closed
8/22/2012	3:04:46 AM	Main Vac valve closed
8/22/2012	3:04:46 AM	Bypass valve closed
8/22/2012	3:04:46 AM	H2 valve opened
8/22/2012	3:04:46 AM	Bubbler valve opened
8/22/2012	3:04:46 AM	Helium MFC set to  0.000000
8/22/2012	3:04:46 AM	H2 MFC set to  500.000000
8/22/2012	3:04:46 AM	BCl3 MFC set to  0.000000
8/22/2012	3:04:46 AM	PH3 MFC set to  0.000000
8/22/2012	3:04:46 AM	SiCl4 MFC set to  0.000000
8/22/2012	3:04:46 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:04:46 AM	Tube furnace set to 750
8/22/2012	3:14:46 AM	H2 valve closed
8/22/2012	3:14:46 AM	BCl3 valve closed
8/22/2012	3:14:46 AM	PH3 valve closed
8/22/2012	3:14:46 AM	SiCl4 pre valve closed
8/22/2012	3:14:46 AM	SiCl4 post valve closed
8/22/2012	3:14:46 AM	Main Vac valve closed
8/22/2012	3:14:46 AM	Bypass valve closed
8/22/2012	3:14:46 AM	Helium valve opened
8/22/2012	3:14:46 AM	Bubbler valve opened
8/22/2012	3:14:46 AM	Helium MFC set to  400.000000
8/22/2012	3:14:46 AM	H2 MFC set to  0.000000
8/22/2012	3:14:46 AM	BCl3 MFC set to  0.000000
8/22/2012	3:14:46 AM	PH3 MFC set to  0.000000
8/22/2012	3:14:46 AM	SiCl4 MFC set to  0.000000
8/22/2012	3:14:46 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:14:46 AM	Tube furnace set to 0
8/22/2012	3:30:34 AM	Run aborted at 3:30 AM
8/22/2012	3:30:34 AM	Helium valve closed
8/22/2012	3:30:34 AM	H2 valve closed
8/22/2012	3:30:34 AM	BCl3 valve closed
8/22/2012	3:30:34 AM	PH3 valve closed
8/22/2012	3:30:34 AM	SiCl4 pre valve closed
8/22/2012	3:30:34 AM	SiCl4 post valve closed
8/22/2012	3:30:34 AM	Bypass valve closed
8/22/2012	3:30:34 AM	Main Vac valve closed
8/22/2012	3:30:34 AM	Bubbler valve closed
8/22/2012	3:30:34 AM	Helium MFC set to  0.000000
8/22/2012	3:30:34 AM	H2 MFC set to  0.000000
8/22/2012	3:30:34 AM	BCl3 MFC set to  0.000000
8/22/2012	3:30:34 AM	PH3 MFC set to  0.000000
8/22/2012	3:30:34 AM	SiCl4 MFC set to  0.000000
8/22/2012	3:30:34 AM	Tube furnace set to 0
8/22/2012	3:32:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	3:32:46 AM	Recipe started at 3:32 AM
8/22/2012	3:32:46 AM	Helium valve closed
8/22/2012	3:32:46 AM	H2 valve closed
8/22/2012	3:32:46 AM	BCl3 valve closed
8/22/2012	3:32:46 AM	PH3 valve closed
8/22/2012	3:32:46 AM	SiCl4 pre valve closed
8/22/2012	3:32:46 AM	SiCl4 post valve closed
8/22/2012	3:32:46 AM	Main Vac valve closed
8/22/2012	3:32:46 AM	Bubbler valve closed
8/22/2012	3:32:46 AM	Bypass valve opened
8/22/2012	3:32:46 AM	Helium MFC set to  0.000000
8/22/2012	3:32:46 AM	H2 MFC set to  0.000000
8/22/2012	3:32:46 AM	BCl3 MFC set to  0.000000
8/22/2012	3:32:46 AM	PH3 MFC set to  0.000000
8/22/2012	3:32:46 AM	SiCl4 MFC set to  0.000000
8/22/2012	3:32:46 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:32:46 AM	Tube furnace set to 0
8/22/2012	3:33:58 AM	Helium valve closed
8/22/2012	3:33:58 AM	H2 valve closed
8/22/2012	3:33:58 AM	BCl3 valve closed
8/22/2012	3:33:58 AM	PH3 valve closed
8/22/2012	3:33:58 AM	SiCl4 pre valve closed
8/22/2012	3:33:58 AM	SiCl4 post valve closed
8/22/2012	3:33:58 AM	Main Vac valve closed
8/22/2012	3:33:58 AM	Bubbler valve closed
8/22/2012	3:33:58 AM	Bypass valve opened
8/22/2012	3:33:58 AM	Helium MFC set to  0.000000
8/22/2012	3:33:58 AM	H2 MFC set to  0.000000
8/22/2012	3:33:58 AM	BCl3 MFC set to  0.000000
8/22/2012	3:33:58 AM	PH3 MFC set to  0.000000
8/22/2012	3:33:58 AM	SiCl4 MFC set to  0.000000
8/22/2012	3:33:58 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:33:58 AM	Tube furnace set to 0
8/22/2012	3:34:58 AM	Helium valve closed
8/22/2012	3:34:58 AM	H2 valve closed
8/22/2012	3:34:58 AM	BCl3 valve closed
8/22/2012	3:34:58 AM	PH3 valve closed
8/22/2012	3:34:58 AM	SiCl4 pre valve closed
8/22/2012	3:34:58 AM	SiCl4 post valve closed
8/22/2012	3:34:58 AM	Bypass valve closed
8/22/2012	3:34:58 AM	Bubbler valve closed
8/22/2012	3:34:58 AM	Main Vac valve opened
8/22/2012	3:34:58 AM	Helium MFC set to  0.000000
8/22/2012	3:34:58 AM	H2 MFC set to  0.000000
8/22/2012	3:34:58 AM	BCl3 MFC set to  0.000000
8/22/2012	3:34:58 AM	PH3 MFC set to  0.000000
8/22/2012	3:34:58 AM	SiCl4 MFC set to  0.000000
8/22/2012	3:34:58 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:34:58 AM	Tube furnace set to 0
8/22/2012	3:34:59 AM	Run finished at 3:34 AM
8/22/2012	3:34:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	8:59:31 AM	Recipe started at 8:59 AM
8/22/2012	8:59:31 AM	Helium valve closed
8/22/2012	8:59:31 AM	H2 valve closed
8/22/2012	8:59:31 AM	BCl3 valve closed
8/22/2012	8:59:31 AM	PH3 valve closed
8/22/2012	8:59:31 AM	SiCl4 pre valve closed
8/22/2012	8:59:31 AM	SiCl4 post valve closed
8/22/2012	8:59:31 AM	Main Vac valve closed
8/22/2012	8:59:31 AM	Bubbler valve closed
8/22/2012	8:59:31 AM	Bypass valve opened
8/22/2012	8:59:31 AM	Helium MFC set to  0.000000
8/22/2012	8:59:31 AM	H2 MFC set to  0.000000
8/22/2012	8:59:31 AM	BCl3 MFC set to  0.000000
8/22/2012	8:59:31 AM	PH3 MFC set to  0.000000
8/22/2012	8:59:31 AM	SiCl4 MFC set to  0.000000
8/22/2012	8:59:31 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:59:31 AM	Tube furnace set to 150
8/22/2012	8:59:32 AM	Helium valve closed
8/22/2012	8:59:32 AM	H2 valve closed
8/22/2012	8:59:32 AM	BCl3 valve closed
8/22/2012	8:59:32 AM	PH3 valve closed
8/22/2012	8:59:32 AM	SiCl4 pre valve closed
8/22/2012	8:59:32 AM	SiCl4 post valve closed
8/22/2012	8:59:32 AM	Main Vac valve closed
8/22/2012	8:59:32 AM	Bubbler valve closed
8/22/2012	8:59:32 AM	Bypass valve opened
8/22/2012	8:59:32 AM	Helium MFC set to  0.000000
8/22/2012	8:59:32 AM	H2 MFC set to  0.000000
8/22/2012	8:59:32 AM	BCl3 MFC set to  0.000000
8/22/2012	8:59:32 AM	PH3 MFC set to  0.000000
8/22/2012	8:59:32 AM	SiCl4 MFC set to  0.000000
8/22/2012	8:59:32 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:59:32 AM	Tube furnace set to 150
8/22/2012	8:59:32 AM	Helium valve closed
8/22/2012	8:59:32 AM	H2 valve closed
8/22/2012	8:59:32 AM	BCl3 valve closed
8/22/2012	8:59:33 AM	PH3 valve closed
8/22/2012	8:59:33 AM	SiCl4 pre valve closed
8/22/2012	8:59:33 AM	SiCl4 post valve closed
8/22/2012	8:59:33 AM	Bypass valve closed
8/22/2012	8:59:33 AM	Bubbler valve closed
8/22/2012	8:59:33 AM	Main Vac valve opened
8/22/2012	8:59:33 AM	Helium MFC set to  0.000000
8/22/2012	8:59:33 AM	H2 MFC set to  0.000000
8/22/2012	8:59:33 AM	BCl3 MFC set to  0.000000
8/22/2012	8:59:33 AM	PH3 MFC set to  0.000000
8/22/2012	8:59:33 AM	SiCl4 MFC set to  0.000000
8/22/2012	8:59:33 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:59:33 AM	Tube furnace set to 150
8/22/2012	8:59:34 AM	H2 valve closed
8/22/2012	8:59:34 AM	BCl3 valve closed
8/22/2012	8:59:34 AM	PH3 valve closed
8/22/2012	8:59:34 AM	SiCl4 pre valve closed
8/22/2012	8:59:34 AM	SiCl4 post valve closed
8/22/2012	8:59:34 AM	Bypass valve closed
8/22/2012	8:59:34 AM	Bubbler valve closed
8/22/2012	8:59:34 AM	Helium valve opened
8/22/2012	8:59:34 AM	Main Vac valve opened
8/22/2012	8:59:34 AM	Helium MFC set to  20.000000
8/22/2012	8:59:34 AM	H2 MFC set to  0.000000
8/22/2012	8:59:34 AM	BCl3 MFC set to  0.000000
8/22/2012	8:59:34 AM	PH3 MFC set to  0.000000
8/22/2012	8:59:34 AM	SiCl4 MFC set to  0.000000
8/22/2012	8:59:34 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:59:34 AM	Tube furnace set to 150
8/22/2012	9:00:04 AM	Helium valve closed
8/22/2012	9:00:04 AM	H2 valve closed
8/22/2012	9:00:04 AM	BCl3 valve closed
8/22/2012	9:00:04 AM	PH3 valve closed
8/22/2012	9:00:04 AM	SiCl4 pre valve closed
8/22/2012	9:00:04 AM	SiCl4 post valve closed
8/22/2012	9:00:04 AM	Bypass valve closed
8/22/2012	9:00:04 AM	Bubbler valve closed
8/22/2012	9:00:04 AM	Main Vac valve opened
8/22/2012	9:00:04 AM	Helium MFC set to  0.000000
8/22/2012	9:00:04 AM	H2 MFC set to  0.000000
8/22/2012	9:00:04 AM	BCl3 MFC set to  0.000000
8/22/2012	9:00:04 AM	PH3 MFC set to  0.000000
8/22/2012	9:00:04 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:00:04 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:00:04 AM	Tube furnace set to 150
8/22/2012	9:00:34 AM	H2 valve closed
8/22/2012	9:00:34 AM	BCl3 valve closed
8/22/2012	9:00:34 AM	PH3 valve closed
8/22/2012	9:00:34 AM	SiCl4 pre valve closed
8/22/2012	9:00:34 AM	SiCl4 post valve closed
8/22/2012	9:00:34 AM	Bypass valve closed
8/22/2012	9:00:34 AM	Bubbler valve closed
8/22/2012	9:00:34 AM	Helium valve opened
8/22/2012	9:00:34 AM	Main Vac valve opened
8/22/2012	9:00:34 AM	Helium MFC set to  20.000000
8/22/2012	9:00:34 AM	H2 MFC set to  0.000000
8/22/2012	9:00:34 AM	BCl3 MFC set to  0.000000
8/22/2012	9:00:34 AM	PH3 MFC set to  0.000000
8/22/2012	9:00:34 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:00:34 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:00:34 AM	Tube furnace set to 150
8/22/2012	9:01:04 AM	Helium valve closed
8/22/2012	9:01:04 AM	H2 valve closed
8/22/2012	9:01:04 AM	BCl3 valve closed
8/22/2012	9:01:04 AM	PH3 valve closed
8/22/2012	9:01:04 AM	SiCl4 pre valve closed
8/22/2012	9:01:04 AM	SiCl4 post valve closed
8/22/2012	9:01:05 AM	Bypass valve closed
8/22/2012	9:01:05 AM	Bubbler valve closed
8/22/2012	9:01:05 AM	Main Vac valve opened
8/22/2012	9:01:05 AM	Helium MFC set to  0.000000
8/22/2012	9:01:05 AM	H2 MFC set to  0.000000
8/22/2012	9:01:05 AM	BCl3 MFC set to  0.000000
8/22/2012	9:01:05 AM	PH3 MFC set to  0.000000
8/22/2012	9:01:05 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:01:05 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:01:05 AM	Tube furnace set to 150
8/22/2012	9:01:35 AM	H2 valve closed
8/22/2012	9:01:35 AM	BCl3 valve closed
8/22/2012	9:01:35 AM	PH3 valve closed
8/22/2012	9:01:35 AM	SiCl4 pre valve closed
8/22/2012	9:01:35 AM	SiCl4 post valve closed
8/22/2012	9:01:35 AM	Bypass valve closed
8/22/2012	9:01:35 AM	Bubbler valve closed
8/22/2012	9:01:35 AM	Helium valve opened
8/22/2012	9:01:35 AM	Main Vac valve opened
8/22/2012	9:01:35 AM	Helium MFC set to  20.000000
8/22/2012	9:01:35 AM	H2 MFC set to  0.000000
8/22/2012	9:01:35 AM	BCl3 MFC set to  0.000000
8/22/2012	9:01:35 AM	PH3 MFC set to  0.000000
8/22/2012	9:01:35 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:01:35 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:01:35 AM	Tube furnace set to 150
8/22/2012	9:02:05 AM	Helium valve closed
8/22/2012	9:02:05 AM	H2 valve closed
8/22/2012	9:02:05 AM	BCl3 valve closed
8/22/2012	9:02:05 AM	PH3 valve closed
8/22/2012	9:02:05 AM	SiCl4 pre valve closed
8/22/2012	9:02:05 AM	SiCl4 post valve closed
8/22/2012	9:02:05 AM	Bypass valve closed
8/22/2012	9:02:05 AM	Bubbler valve closed
8/22/2012	9:02:05 AM	Main Vac valve opened
8/22/2012	9:02:05 AM	Helium MFC set to  0.000000
8/22/2012	9:02:05 AM	H2 MFC set to  0.000000
8/22/2012	9:02:05 AM	BCl3 MFC set to  0.000000
8/22/2012	9:02:05 AM	PH3 MFC set to  0.000000
8/22/2012	9:02:05 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:02:05 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:02:05 AM	Tube furnace set to 150
8/22/2012	9:02:35 AM	H2 valve closed
8/22/2012	9:02:35 AM	BCl3 valve closed
8/22/2012	9:02:35 AM	PH3 valve closed
8/22/2012	9:02:35 AM	SiCl4 pre valve closed
8/22/2012	9:02:35 AM	SiCl4 post valve closed
8/22/2012	9:02:35 AM	Bypass valve closed
8/22/2012	9:02:35 AM	Bubbler valve closed
8/22/2012	9:02:35 AM	Helium valve opened
8/22/2012	9:02:35 AM	Main Vac valve opened
8/22/2012	9:02:35 AM	Helium MFC set to  20.000000
8/22/2012	9:02:35 AM	H2 MFC set to  0.000000
8/22/2012	9:02:35 AM	BCl3 MFC set to  0.000000
8/22/2012	9:02:35 AM	PH3 MFC set to  0.000000
8/22/2012	9:02:35 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:02:35 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:02:35 AM	Tube furnace set to 150
8/22/2012	9:03:05 AM	Helium valve closed
8/22/2012	9:03:05 AM	H2 valve closed
8/22/2012	9:03:05 AM	BCl3 valve closed
8/22/2012	9:03:05 AM	PH3 valve closed
8/22/2012	9:03:05 AM	SiCl4 pre valve closed
8/22/2012	9:03:05 AM	SiCl4 post valve closed
8/22/2012	9:03:05 AM	Bypass valve closed
8/22/2012	9:03:05 AM	Bubbler valve closed
8/22/2012	9:03:05 AM	Main Vac valve opened
8/22/2012	9:03:06 AM	Helium MFC set to  0.000000
8/22/2012	9:03:06 AM	H2 MFC set to  0.000000
8/22/2012	9:03:06 AM	BCl3 MFC set to  0.000000
8/22/2012	9:03:06 AM	PH3 MFC set to  0.000000
8/22/2012	9:03:06 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:03:06 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:03:06 AM	Tube furnace set to 150
8/22/2012	9:03:36 AM	H2 valve closed
8/22/2012	9:03:36 AM	BCl3 valve closed
8/22/2012	9:03:36 AM	PH3 valve closed
8/22/2012	9:03:36 AM	SiCl4 pre valve closed
8/22/2012	9:03:36 AM	SiCl4 post valve closed
8/22/2012	9:03:36 AM	Bypass valve closed
8/22/2012	9:03:36 AM	Bubbler valve closed
8/22/2012	9:03:36 AM	Helium valve opened
8/22/2012	9:03:36 AM	Main Vac valve opened
8/22/2012	9:03:36 AM	Helium MFC set to  20.000000
8/22/2012	9:03:36 AM	H2 MFC set to  0.000000
8/22/2012	9:03:36 AM	BCl3 MFC set to  0.000000
8/22/2012	9:03:36 AM	PH3 MFC set to  0.000000
8/22/2012	9:03:36 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:03:36 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:03:36 AM	Tube furnace set to 150
8/22/2012	9:04:06 AM	Helium valve closed
8/22/2012	9:04:06 AM	H2 valve closed
8/22/2012	9:04:06 AM	BCl3 valve closed
8/22/2012	9:04:06 AM	PH3 valve closed
8/22/2012	9:04:06 AM	SiCl4 pre valve closed
8/22/2012	9:04:06 AM	SiCl4 post valve closed
8/22/2012	9:04:06 AM	Bypass valve closed
8/22/2012	9:04:06 AM	Bubbler valve closed
8/22/2012	9:04:06 AM	Main Vac valve opened
8/22/2012	9:04:06 AM	Helium MFC set to  0.000000
8/22/2012	9:04:06 AM	H2 MFC set to  0.000000
8/22/2012	9:04:06 AM	BCl3 MFC set to  0.000000
8/22/2012	9:04:06 AM	PH3 MFC set to  0.000000
8/22/2012	9:04:06 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:04:06 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:04:06 AM	Tube furnace set to 150
8/22/2012	9:04:36 AM	H2 valve closed
8/22/2012	9:04:36 AM	BCl3 valve closed
8/22/2012	9:04:36 AM	PH3 valve closed
8/22/2012	9:04:36 AM	SiCl4 pre valve closed
8/22/2012	9:04:36 AM	SiCl4 post valve closed
8/22/2012	9:04:36 AM	Bypass valve closed
8/22/2012	9:04:36 AM	Bubbler valve closed
8/22/2012	9:04:36 AM	Helium valve opened
8/22/2012	9:04:36 AM	Main Vac valve opened
8/22/2012	9:04:36 AM	Helium MFC set to  20.000000
8/22/2012	9:04:36 AM	H2 MFC set to  0.000000
8/22/2012	9:04:36 AM	BCl3 MFC set to  0.000000
8/22/2012	9:04:36 AM	PH3 MFC set to  0.000000
8/22/2012	9:04:36 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:04:36 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:04:36 AM	Tube furnace set to 150
8/22/2012	9:05:06 AM	Helium valve closed
8/22/2012	9:05:06 AM	H2 valve closed
8/22/2012	9:05:06 AM	BCl3 valve closed
8/22/2012	9:05:06 AM	PH3 valve closed
8/22/2012	9:05:06 AM	SiCl4 pre valve closed
8/22/2012	9:05:06 AM	SiCl4 post valve closed
8/22/2012	9:05:06 AM	Bypass valve closed
8/22/2012	9:05:06 AM	Bubbler valve closed
8/22/2012	9:05:06 AM	Main Vac valve opened
8/22/2012	9:05:06 AM	Helium MFC set to  0.000000
8/22/2012	9:05:06 AM	H2 MFC set to  0.000000
8/22/2012	9:05:06 AM	BCl3 MFC set to  0.000000
8/22/2012	9:05:06 AM	PH3 MFC set to  0.000000
8/22/2012	9:05:07 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:05:07 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:05:07 AM	Tube furnace set to 150
8/22/2012	9:05:37 AM	H2 valve closed
8/22/2012	9:05:37 AM	BCl3 valve closed
8/22/2012	9:05:37 AM	PH3 valve closed
8/22/2012	9:05:37 AM	SiCl4 pre valve closed
8/22/2012	9:05:37 AM	SiCl4 post valve closed
8/22/2012	9:05:37 AM	Bypass valve closed
8/22/2012	9:05:37 AM	Bubbler valve closed
8/22/2012	9:05:37 AM	Helium valve opened
8/22/2012	9:05:37 AM	Main Vac valve opened
8/22/2012	9:05:37 AM	Helium MFC set to  20.000000
8/22/2012	9:05:37 AM	H2 MFC set to  0.000000
8/22/2012	9:05:37 AM	BCl3 MFC set to  0.000000
8/22/2012	9:05:37 AM	PH3 MFC set to  0.000000
8/22/2012	9:05:37 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:05:37 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:05:37 AM	Tube furnace set to 150
8/22/2012	9:06:07 AM	Helium valve closed
8/22/2012	9:06:07 AM	H2 valve closed
8/22/2012	9:06:07 AM	BCl3 valve closed
8/22/2012	9:06:07 AM	PH3 valve closed
8/22/2012	9:06:07 AM	SiCl4 pre valve closed
8/22/2012	9:06:07 AM	SiCl4 post valve closed
8/22/2012	9:06:07 AM	Bypass valve closed
8/22/2012	9:06:07 AM	Bubbler valve closed
8/22/2012	9:06:07 AM	Main Vac valve opened
8/22/2012	9:06:07 AM	Helium MFC set to  0.000000
8/22/2012	9:06:07 AM	H2 MFC set to  0.000000
8/22/2012	9:06:07 AM	BCl3 MFC set to  0.000000
8/22/2012	9:06:07 AM	PH3 MFC set to  0.000000
8/22/2012	9:06:07 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:06:07 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:06:07 AM	Tube furnace set to 150
8/22/2012	9:06:37 AM	H2 valve closed
8/22/2012	9:06:37 AM	BCl3 valve closed
8/22/2012	9:06:37 AM	PH3 valve closed
8/22/2012	9:06:37 AM	SiCl4 pre valve closed
8/22/2012	9:06:37 AM	SiCl4 post valve closed
8/22/2012	9:06:37 AM	Bypass valve closed
8/22/2012	9:06:37 AM	Bubbler valve closed
8/22/2012	9:06:37 AM	Helium valve opened
8/22/2012	9:06:37 AM	Main Vac valve opened
8/22/2012	9:06:37 AM	Helium MFC set to  20.000000
8/22/2012	9:06:37 AM	H2 MFC set to  0.000000
8/22/2012	9:06:37 AM	BCl3 MFC set to  0.000000
8/22/2012	9:06:37 AM	PH3 MFC set to  0.000000
8/22/2012	9:06:37 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:06:37 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:06:37 AM	Tube furnace set to 150
8/22/2012	9:07:07 AM	Helium valve closed
8/22/2012	9:07:07 AM	H2 valve closed
8/22/2012	9:07:07 AM	BCl3 valve closed
8/22/2012	9:07:07 AM	PH3 valve closed
8/22/2012	9:07:07 AM	SiCl4 pre valve closed
8/22/2012	9:07:07 AM	SiCl4 post valve closed
8/22/2012	9:07:07 AM	Bypass valve closed
8/22/2012	9:07:07 AM	Bubbler valve closed
8/22/2012	9:07:07 AM	Main Vac valve opened
8/22/2012	9:07:07 AM	Helium MFC set to  0.000000
8/22/2012	9:07:07 AM	H2 MFC set to  0.000000
8/22/2012	9:07:07 AM	BCl3 MFC set to  0.000000
8/22/2012	9:07:07 AM	PH3 MFC set to  0.000000
8/22/2012	9:07:07 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:07:07 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:07:08 AM	Tube furnace set to 150
8/22/2012	9:07:38 AM	H2 valve closed
8/22/2012	9:07:38 AM	BCl3 valve closed
8/22/2012	9:07:38 AM	PH3 valve closed
8/22/2012	9:07:38 AM	SiCl4 pre valve closed
8/22/2012	9:07:38 AM	SiCl4 post valve closed
8/22/2012	9:07:38 AM	Bypass valve closed
8/22/2012	9:07:38 AM	Bubbler valve closed
8/22/2012	9:07:38 AM	Helium valve opened
8/22/2012	9:07:38 AM	Main Vac valve opened
8/22/2012	9:07:38 AM	Helium MFC set to  20.000000
8/22/2012	9:07:38 AM	H2 MFC set to  0.000000
8/22/2012	9:07:38 AM	BCl3 MFC set to  0.000000
8/22/2012	9:07:38 AM	PH3 MFC set to  0.000000
8/22/2012	9:07:38 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:07:38 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:07:38 AM	Tube furnace set to 150
8/22/2012	9:08:08 AM	Helium valve closed
8/22/2012	9:08:08 AM	H2 valve closed
8/22/2012	9:08:08 AM	BCl3 valve closed
8/22/2012	9:08:08 AM	PH3 valve closed
8/22/2012	9:08:08 AM	SiCl4 pre valve closed
8/22/2012	9:08:08 AM	SiCl4 post valve closed
8/22/2012	9:08:08 AM	Bypass valve closed
8/22/2012	9:08:08 AM	Bubbler valve closed
8/22/2012	9:08:08 AM	Main Vac valve opened
8/22/2012	9:08:08 AM	Helium MFC set to  0.000000
8/22/2012	9:08:08 AM	H2 MFC set to  0.000000
8/22/2012	9:08:08 AM	BCl3 MFC set to  0.000000
8/22/2012	9:08:08 AM	PH3 MFC set to  0.000000
8/22/2012	9:08:08 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:08:08 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:08:08 AM	Tube furnace set to 150
8/22/2012	9:08:38 AM	H2 valve closed
8/22/2012	9:08:38 AM	BCl3 valve closed
8/22/2012	9:08:38 AM	PH3 valve closed
8/22/2012	9:08:38 AM	SiCl4 pre valve closed
8/22/2012	9:08:38 AM	SiCl4 post valve closed
8/22/2012	9:08:38 AM	Bypass valve closed
8/22/2012	9:08:38 AM	Bubbler valve closed
8/22/2012	9:08:38 AM	Helium valve opened
8/22/2012	9:08:38 AM	Main Vac valve opened
8/22/2012	9:08:38 AM	Helium MFC set to  20.000000
8/22/2012	9:08:38 AM	H2 MFC set to  0.000000
8/22/2012	9:08:38 AM	BCl3 MFC set to  0.000000
8/22/2012	9:08:38 AM	PH3 MFC set to  0.000000
8/22/2012	9:08:38 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:08:38 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:08:38 AM	Tube furnace set to 150
8/22/2012	9:09:08 AM	Helium valve closed
8/22/2012	9:09:08 AM	H2 valve closed
8/22/2012	9:09:08 AM	BCl3 valve closed
8/22/2012	9:09:08 AM	PH3 valve closed
8/22/2012	9:09:08 AM	SiCl4 pre valve closed
8/22/2012	9:09:08 AM	SiCl4 post valve closed
8/22/2012	9:09:08 AM	Bypass valve closed
8/22/2012	9:09:08 AM	Bubbler valve closed
8/22/2012	9:09:08 AM	Main Vac valve opened
8/22/2012	9:09:08 AM	Helium MFC set to  0.000000
8/22/2012	9:09:08 AM	H2 MFC set to  0.000000
8/22/2012	9:09:08 AM	BCl3 MFC set to  0.000000
8/22/2012	9:09:08 AM	PH3 MFC set to  0.000000
8/22/2012	9:09:08 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:09:08 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:09:09 AM	Tube furnace set to 150
8/22/2012	9:09:10 AM	Run finished at 9:09 AM
8/22/2012	9:10:56 AM	Main Vac valve closed
8/22/2012	9:11:10 AM	Main Vac valve opened
8/22/2012	9:12:51 AM	Recipe started at 9:12 AM
8/22/2012	9:12:51 AM	Helium valve closed
8/22/2012	9:12:51 AM	H2 valve closed
8/22/2012	9:12:51 AM	BCl3 valve closed
8/22/2012	9:12:51 AM	PH3 valve closed
8/22/2012	9:12:51 AM	SiCl4 pre valve closed
8/22/2012	9:12:51 AM	SiCl4 post valve closed
8/22/2012	9:12:51 AM	Main Vac valve closed
8/22/2012	9:12:51 AM	Bypass valve closed
8/22/2012	9:12:51 AM	Bubbler valve closed
8/22/2012	9:12:51 AM	Helium MFC set to  0.000000
8/22/2012	9:12:51 AM	H2 MFC set to  0.000000
8/22/2012	9:12:51 AM	BCl3 MFC set to  0.000000
8/22/2012	9:12:51 AM	PH3 MFC set to  0.000000
8/22/2012	9:12:51 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:12:51 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:12:52 AM	Tube furnace set to 0
8/22/2012	9:12:55 AM	Helium valve closed
8/22/2012	9:12:55 AM	BCl3 valve closed
8/22/2012	9:12:55 AM	PH3 valve closed
8/22/2012	9:12:55 AM	SiCl4 pre valve closed
8/22/2012	9:12:55 AM	SiCl4 post valve closed
8/22/2012	9:12:55 AM	Main Vac valve closed
8/22/2012	9:12:55 AM	Bypass valve closed
8/22/2012	9:12:55 AM	Bubbler valve closed
8/22/2012	9:12:55 AM	H2 valve opened
8/22/2012	9:12:55 AM	Helium MFC set to  0.000000
8/22/2012	9:12:55 AM	H2 MFC set to  500.000000
8/22/2012	9:12:55 AM	BCl3 MFC set to  0.000000
8/22/2012	9:12:55 AM	PH3 MFC set to  0.000000
8/22/2012	9:12:55 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:12:55 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:12:55 AM	Tube furnace set to 50
8/22/2012	9:14:07 AM	Helium valve closed
8/22/2012	9:14:07 AM	BCl3 valve closed
8/22/2012	9:14:07 AM	PH3 valve closed
8/22/2012	9:14:07 AM	SiCl4 pre valve closed
8/22/2012	9:14:07 AM	SiCl4 post valve closed
8/22/2012	9:14:07 AM	Main Vac valve closed
8/22/2012	9:14:07 AM	Bypass valve closed
8/22/2012	9:14:07 AM	H2 valve opened
8/22/2012	9:14:07 AM	Bubbler valve opened
8/22/2012	9:14:07 AM	Helium MFC set to  0.000000
8/22/2012	9:14:07 AM	H2 MFC set to  500.000000
8/22/2012	9:14:07 AM	BCl3 MFC set to  0.000000
8/22/2012	9:14:07 AM	PH3 MFC set to  0.000000
8/22/2012	9:14:07 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:14:07 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:14:07 AM	Tube furnace set to 50
8/22/2012	9:14:08 AM	Helium valve closed
8/22/2012	9:14:08 AM	BCl3 valve closed
8/22/2012	9:14:08 AM	PH3 valve closed
8/22/2012	9:14:08 AM	SiCl4 pre valve closed
8/22/2012	9:14:08 AM	SiCl4 post valve closed
8/22/2012	9:14:08 AM	Main Vac valve closed
8/22/2012	9:14:08 AM	Bypass valve closed
8/22/2012	9:14:08 AM	H2 valve opened
8/22/2012	9:14:08 AM	Bubbler valve opened
8/22/2012	9:14:08 AM	Helium MFC set to  0.000000
8/22/2012	9:14:08 AM	H2 MFC set to  450.000000
8/22/2012	9:14:08 AM	BCl3 MFC set to  0.000000
8/22/2012	9:14:08 AM	PH3 MFC set to  0.000000
8/22/2012	9:14:08 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:14:08 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:14:08 AM	Tube furnace set to 1000
8/22/2012	9:34:08 AM	Helium valve closed
8/22/2012	9:34:08 AM	PH3 valve closed
8/22/2012	9:34:08 AM	Main Vac valve closed
8/22/2012	9:34:08 AM	Bypass valve closed
8/22/2012	9:34:08 AM	H2 valve opened
8/22/2012	9:34:08 AM	BCl3 valve opened
8/22/2012	9:34:08 AM	SiCl4 pre valve opened
8/22/2012	9:34:08 AM	SiCl4 post valve opened
8/22/2012	9:34:08 AM	Bubbler valve opened
8/22/2012	9:34:08 AM	Helium MFC set to  0.000000
8/22/2012	9:34:08 AM	H2 MFC set to  450.000000
8/22/2012	9:34:08 AM	BCl3 MFC set to  1.200000
8/22/2012	9:34:08 AM	PH3 MFC set to  0.000000
8/22/2012	9:34:08 AM	SiCl4 MFC set to  50.000000
8/22/2012	9:34:08 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:34:09 AM	Tube furnace set to 1000
8/22/2012	9:49:09 AM	Helium valve closed
8/22/2012	9:49:09 AM	BCl3 valve closed
8/22/2012	9:49:09 AM	PH3 valve closed
8/22/2012	9:49:09 AM	SiCl4 pre valve closed
8/22/2012	9:49:09 AM	SiCl4 post valve closed
8/22/2012	9:49:09 AM	Main Vac valve closed
8/22/2012	9:49:09 AM	Bypass valve closed
8/22/2012	9:49:09 AM	H2 valve opened
8/22/2012	9:49:09 AM	Bubbler valve opened
8/22/2012	9:49:09 AM	Helium MFC set to  0.000000
8/22/2012	9:49:09 AM	H2 MFC set to  500.000000
8/22/2012	9:49:09 AM	BCl3 MFC set to  0.000000
8/22/2012	9:49:09 AM	PH3 MFC set to  0.000000
8/22/2012	9:49:09 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:49:09 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:49:09 AM	Tube furnace set to 750
8/22/2012	9:59:09 AM	H2 valve closed
8/22/2012	9:59:09 AM	BCl3 valve closed
8/22/2012	9:59:09 AM	PH3 valve closed
8/22/2012	9:59:09 AM	SiCl4 pre valve closed
8/22/2012	9:59:09 AM	SiCl4 post valve closed
8/22/2012	9:59:09 AM	Main Vac valve closed
8/22/2012	9:59:09 AM	Bypass valve closed
8/22/2012	9:59:09 AM	Helium valve opened
8/22/2012	9:59:09 AM	Bubbler valve opened
8/22/2012	9:59:09 AM	Helium MFC set to  400.000000
8/22/2012	9:59:09 AM	H2 MFC set to  0.000000
8/22/2012	9:59:09 AM	BCl3 MFC set to  0.000000
8/22/2012	9:59:09 AM	PH3 MFC set to  0.000000
8/22/2012	9:59:09 AM	SiCl4 MFC set to  0.000000
8/22/2012	9:59:09 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:59:09 AM	Tube furnace set to 0
8/22/2012	10:13:38 AM	Run aborted at 10:13 AM
8/22/2012	10:13:38 AM	Helium valve closed
8/22/2012	10:13:38 AM	H2 valve closed
8/22/2012	10:13:38 AM	BCl3 valve closed
8/22/2012	10:13:38 AM	PH3 valve closed
8/22/2012	10:13:38 AM	SiCl4 pre valve closed
8/22/2012	10:13:38 AM	SiCl4 post valve closed
8/22/2012	10:13:38 AM	Bypass valve closed
8/22/2012	10:13:38 AM	Main Vac valve closed
8/22/2012	10:13:38 AM	Bubbler valve closed
8/22/2012	10:13:38 AM	Helium MFC set to  0.000000
8/22/2012	10:13:38 AM	H2 MFC set to  0.000000
8/22/2012	10:13:38 AM	BCl3 MFC set to  0.000000
8/22/2012	10:13:38 AM	PH3 MFC set to  0.000000
8/22/2012	10:13:38 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:13:38 AM	Tube furnace set to 0
8/22/2012	10:13:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	10:13:41 AM	Recipe started at 10:13 AM
8/22/2012	10:13:41 AM	Helium valve closed
8/22/2012	10:13:41 AM	H2 valve closed
8/22/2012	10:13:41 AM	BCl3 valve closed
8/22/2012	10:13:41 AM	PH3 valve closed
8/22/2012	10:13:41 AM	SiCl4 pre valve closed
8/22/2012	10:13:41 AM	SiCl4 post valve closed
8/22/2012	10:13:41 AM	Main Vac valve closed
8/22/2012	10:13:41 AM	Bypass valve closed
8/22/2012	10:13:41 AM	Bubbler valve closed
8/22/2012	10:13:41 AM	Helium MFC set to  0.000000
8/22/2012	10:13:41 AM	H2 MFC set to  0.000000
8/22/2012	10:13:41 AM	BCl3 MFC set to  0.000000
8/22/2012	10:13:41 AM	PH3 MFC set to  0.000000
8/22/2012	10:13:41 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:13:41 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:13:41 AM	Tube furnace set to 0
8/22/2012	10:13:44 AM	H2 valve closed
8/22/2012	10:13:44 AM	BCl3 valve closed
8/22/2012	10:13:44 AM	PH3 valve closed
8/22/2012	10:13:44 AM	SiCl4 pre valve closed
8/22/2012	10:13:44 AM	SiCl4 post valve closed
8/22/2012	10:13:44 AM	Main Vac valve closed
8/22/2012	10:13:44 AM	Bypass valve closed
8/22/2012	10:13:44 AM	Bubbler valve closed
8/22/2012	10:13:44 AM	Helium valve opened
8/22/2012	10:13:44 AM	Helium MFC set to  500.000000
8/22/2012	10:13:44 AM	H2 MFC set to  0.000000
8/22/2012	10:13:44 AM	BCl3 MFC set to  0.000000
8/22/2012	10:13:44 AM	PH3 MFC set to  0.000000
8/22/2012	10:13:44 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:13:44 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:13:44 AM	Tube furnace set to 0
8/22/2012	10:13:45 AM	Helium valve closed
8/22/2012	10:13:45 AM	H2 valve closed
8/22/2012	10:13:45 AM	BCl3 valve closed
8/22/2012	10:13:45 AM	PH3 valve closed
8/22/2012	10:13:45 AM	SiCl4 pre valve closed
8/22/2012	10:13:45 AM	SiCl4 post valve closed
8/22/2012	10:13:45 AM	Main Vac valve closed
8/22/2012	10:13:45 AM	Bypass valve closed
8/22/2012	10:13:45 AM	Bubbler valve closed
8/22/2012	10:13:45 AM	Helium MFC set to  0.000000
8/22/2012	10:13:45 AM	H2 MFC set to  0.000000
8/22/2012	10:13:45 AM	BCl3 MFC set to  0.000000
8/22/2012	10:13:45 AM	PH3 MFC set to  0.000000
8/22/2012	10:13:45 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:13:45 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:13:45 AM	Tube furnace set to 0
8/22/2012	10:13:46 AM	Run finished at 10:13 AM
8/22/2012	10:13:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	10:21:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	10:21:07 AM	Recipe started at 10:21 AM
8/22/2012	10:21:07 AM	Helium valve closed
8/22/2012	10:21:07 AM	H2 valve closed
8/22/2012	10:21:07 AM	BCl3 valve closed
8/22/2012	10:21:07 AM	PH3 valve closed
8/22/2012	10:21:07 AM	SiCl4 pre valve closed
8/22/2012	10:21:07 AM	SiCl4 post valve closed
8/22/2012	10:21:07 AM	Main Vac valve closed
8/22/2012	10:21:07 AM	Bubbler valve closed
8/22/2012	10:21:08 AM	Bypass valve opened
8/22/2012	10:21:08 AM	Helium MFC set to  0.000000
8/22/2012	10:21:08 AM	H2 MFC set to  0.000000
8/22/2012	10:21:08 AM	BCl3 MFC set to  0.000000
8/22/2012	10:21:08 AM	PH3 MFC set to  0.000000
8/22/2012	10:21:08 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:21:08 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:21:08 AM	Tube furnace set to 0
8/22/2012	10:22:28 AM	Helium valve closed
8/22/2012	10:22:28 AM	H2 valve closed
8/22/2012	10:22:28 AM	BCl3 valve closed
8/22/2012	10:22:28 AM	PH3 valve closed
8/22/2012	10:22:28 AM	SiCl4 pre valve closed
8/22/2012	10:22:28 AM	SiCl4 post valve closed
8/22/2012	10:22:28 AM	Main Vac valve closed
8/22/2012	10:22:28 AM	Bubbler valve closed
8/22/2012	10:22:28 AM	Bypass valve opened
8/22/2012	10:22:28 AM	Helium MFC set to  0.000000
8/22/2012	10:22:28 AM	H2 MFC set to  0.000000
8/22/2012	10:22:28 AM	BCl3 MFC set to  0.000000
8/22/2012	10:22:28 AM	PH3 MFC set to  0.000000
8/22/2012	10:22:28 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:22:28 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:22:28 AM	Tube furnace set to 0
8/22/2012	10:23:28 AM	Helium valve closed
8/22/2012	10:23:28 AM	H2 valve closed
8/22/2012	10:23:28 AM	BCl3 valve closed
8/22/2012	10:23:28 AM	PH3 valve closed
8/22/2012	10:23:28 AM	SiCl4 pre valve closed
8/22/2012	10:23:28 AM	SiCl4 post valve closed
8/22/2012	10:23:28 AM	Bypass valve closed
8/22/2012	10:23:28 AM	Bubbler valve closed
8/22/2012	10:23:28 AM	Main Vac valve opened
8/22/2012	10:23:28 AM	Helium MFC set to  0.000000
8/22/2012	10:23:28 AM	H2 MFC set to  0.000000
8/22/2012	10:23:28 AM	BCl3 MFC set to  0.000000
8/22/2012	10:23:28 AM	PH3 MFC set to  0.000000
8/22/2012	10:23:28 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:23:28 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:23:28 AM	Tube furnace set to 0
8/22/2012	10:23:29 AM	Run finished at 10:23 AM
8/22/2012	10:23:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	10:36:37 AM	Recipe started at 10:36 AM
8/22/2012	10:36:37 AM	Helium valve closed
8/22/2012	10:36:37 AM	H2 valve closed
8/22/2012	10:36:37 AM	BCl3 valve closed
8/22/2012	10:36:37 AM	PH3 valve closed
8/22/2012	10:36:37 AM	SiCl4 pre valve closed
8/22/2012	10:36:37 AM	SiCl4 post valve closed
8/22/2012	10:36:37 AM	Main Vac valve closed
8/22/2012	10:36:37 AM	Bubbler valve closed
8/22/2012	10:36:37 AM	Bypass valve opened
8/22/2012	10:36:37 AM	Helium MFC set to  0.000000
8/22/2012	10:36:37 AM	H2 MFC set to  0.000000
8/22/2012	10:36:37 AM	BCl3 MFC set to  0.000000
8/22/2012	10:36:37 AM	PH3 MFC set to  0.000000
8/22/2012	10:36:37 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:36:37 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:36:37 AM	Tube furnace set to 150
8/22/2012	10:36:38 AM	Helium valve closed
8/22/2012	10:36:38 AM	H2 valve closed
8/22/2012	10:36:38 AM	BCl3 valve closed
8/22/2012	10:36:38 AM	PH3 valve closed
8/22/2012	10:36:38 AM	SiCl4 pre valve closed
8/22/2012	10:36:38 AM	SiCl4 post valve closed
8/22/2012	10:36:38 AM	Main Vac valve closed
8/22/2012	10:36:38 AM	Bubbler valve closed
8/22/2012	10:36:38 AM	Bypass valve opened
8/22/2012	10:36:38 AM	Helium MFC set to  0.000000
8/22/2012	10:36:38 AM	H2 MFC set to  0.000000
8/22/2012	10:36:38 AM	BCl3 MFC set to  0.000000
8/22/2012	10:36:38 AM	PH3 MFC set to  0.000000
8/22/2012	10:36:38 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:36:38 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:36:38 AM	Tube furnace set to 150
8/22/2012	10:36:39 AM	Helium valve closed
8/22/2012	10:36:40 AM	H2 valve closed
8/22/2012	10:36:40 AM	BCl3 valve closed
8/22/2012	10:36:40 AM	PH3 valve closed
8/22/2012	10:36:40 AM	SiCl4 pre valve closed
8/22/2012	10:36:40 AM	SiCl4 post valve closed
8/22/2012	10:36:40 AM	Bypass valve closed
8/22/2012	10:36:40 AM	Bubbler valve closed
8/22/2012	10:36:40 AM	Main Vac valve opened
8/22/2012	10:36:40 AM	Helium MFC set to  0.000000
8/22/2012	10:36:40 AM	H2 MFC set to  0.000000
8/22/2012	10:36:40 AM	BCl3 MFC set to  0.000000
8/22/2012	10:36:40 AM	PH3 MFC set to  0.000000
8/22/2012	10:36:40 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:36:40 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:36:40 AM	Tube furnace set to 150
8/22/2012	10:36:40 AM	H2 valve closed
8/22/2012	10:36:40 AM	BCl3 valve closed
8/22/2012	10:36:41 AM	PH3 valve closed
8/22/2012	10:36:41 AM	SiCl4 pre valve closed
8/22/2012	10:36:41 AM	SiCl4 post valve closed
8/22/2012	10:36:41 AM	Bypass valve closed
8/22/2012	10:36:41 AM	Bubbler valve closed
8/22/2012	10:36:41 AM	Helium valve opened
8/22/2012	10:36:41 AM	Main Vac valve opened
8/22/2012	10:36:41 AM	Helium MFC set to  20.000000
8/22/2012	10:36:41 AM	H2 MFC set to  0.000000
8/22/2012	10:36:41 AM	BCl3 MFC set to  0.000000
8/22/2012	10:36:41 AM	PH3 MFC set to  0.000000
8/22/2012	10:36:41 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:36:41 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:36:41 AM	Tube furnace set to 150
8/22/2012	10:37:11 AM	Helium valve closed
8/22/2012	10:37:11 AM	H2 valve closed
8/22/2012	10:37:11 AM	BCl3 valve closed
8/22/2012	10:37:11 AM	PH3 valve closed
8/22/2012	10:37:11 AM	SiCl4 pre valve closed
8/22/2012	10:37:11 AM	SiCl4 post valve closed
8/22/2012	10:37:11 AM	Bypass valve closed
8/22/2012	10:37:11 AM	Bubbler valve closed
8/22/2012	10:37:11 AM	Main Vac valve opened
8/22/2012	10:37:11 AM	Helium MFC set to  0.000000
8/22/2012	10:37:11 AM	H2 MFC set to  0.000000
8/22/2012	10:37:11 AM	BCl3 MFC set to  0.000000
8/22/2012	10:37:11 AM	PH3 MFC set to  0.000000
8/22/2012	10:37:11 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:37:11 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:37:11 AM	Tube furnace set to 150
8/22/2012	10:37:41 AM	H2 valve closed
8/22/2012	10:37:41 AM	BCl3 valve closed
8/22/2012	10:37:41 AM	PH3 valve closed
8/22/2012	10:37:41 AM	SiCl4 pre valve closed
8/22/2012	10:37:41 AM	SiCl4 post valve closed
8/22/2012	10:37:41 AM	Bypass valve closed
8/22/2012	10:37:41 AM	Bubbler valve closed
8/22/2012	10:37:41 AM	Helium valve opened
8/22/2012	10:37:41 AM	Main Vac valve opened
8/22/2012	10:37:41 AM	Helium MFC set to  20.000000
8/22/2012	10:37:41 AM	H2 MFC set to  0.000000
8/22/2012	10:37:41 AM	BCl3 MFC set to  0.000000
8/22/2012	10:37:41 AM	PH3 MFC set to  0.000000
8/22/2012	10:37:41 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:37:41 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:37:41 AM	Tube furnace set to 150
8/22/2012	10:38:11 AM	Helium valve closed
8/22/2012	10:38:11 AM	H2 valve closed
8/22/2012	10:38:11 AM	BCl3 valve closed
8/22/2012	10:38:11 AM	PH3 valve closed
8/22/2012	10:38:11 AM	SiCl4 pre valve closed
8/22/2012	10:38:11 AM	SiCl4 post valve closed
8/22/2012	10:38:11 AM	Bypass valve closed
8/22/2012	10:38:11 AM	Bubbler valve closed
8/22/2012	10:38:11 AM	Main Vac valve opened
8/22/2012	10:38:11 AM	Helium MFC set to  0.000000
8/22/2012	10:38:11 AM	H2 MFC set to  0.000000
8/22/2012	10:38:11 AM	BCl3 MFC set to  0.000000
8/22/2012	10:38:11 AM	PH3 MFC set to  0.000000
8/22/2012	10:38:11 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:38:11 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:38:11 AM	Tube furnace set to 150
8/22/2012	10:38:41 AM	H2 valve closed
8/22/2012	10:38:41 AM	BCl3 valve closed
8/22/2012	10:38:41 AM	PH3 valve closed
8/22/2012	10:38:41 AM	SiCl4 pre valve closed
8/22/2012	10:38:42 AM	SiCl4 post valve closed
8/22/2012	10:38:42 AM	Bypass valve closed
8/22/2012	10:38:42 AM	Bubbler valve closed
8/22/2012	10:38:42 AM	Helium valve opened
8/22/2012	10:38:42 AM	Main Vac valve opened
8/22/2012	10:38:42 AM	Helium MFC set to  20.000000
8/22/2012	10:38:42 AM	H2 MFC set to  0.000000
8/22/2012	10:38:42 AM	BCl3 MFC set to  0.000000
8/22/2012	10:38:42 AM	PH3 MFC set to  0.000000
8/22/2012	10:38:42 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:38:42 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:38:42 AM	Tube furnace set to 150
8/22/2012	10:39:12 AM	Helium valve closed
8/22/2012	10:39:12 AM	H2 valve closed
8/22/2012	10:39:12 AM	BCl3 valve closed
8/22/2012	10:39:12 AM	PH3 valve closed
8/22/2012	10:39:12 AM	SiCl4 pre valve closed
8/22/2012	10:39:12 AM	SiCl4 post valve closed
8/22/2012	10:39:12 AM	Bypass valve closed
8/22/2012	10:39:12 AM	Bubbler valve closed
8/22/2012	10:39:12 AM	Main Vac valve opened
8/22/2012	10:39:12 AM	Helium MFC set to  0.000000
8/22/2012	10:39:12 AM	H2 MFC set to  0.000000
8/22/2012	10:39:12 AM	BCl3 MFC set to  0.000000
8/22/2012	10:39:12 AM	PH3 MFC set to  0.000000
8/22/2012	10:39:12 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:39:12 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:39:12 AM	Tube furnace set to 150
8/22/2012	10:39:42 AM	H2 valve closed
8/22/2012	10:39:42 AM	BCl3 valve closed
8/22/2012	10:39:42 AM	PH3 valve closed
8/22/2012	10:39:42 AM	SiCl4 pre valve closed
8/22/2012	10:39:42 AM	SiCl4 post valve closed
8/22/2012	10:39:42 AM	Bypass valve closed
8/22/2012	10:39:42 AM	Bubbler valve closed
8/22/2012	10:39:42 AM	Helium valve opened
8/22/2012	10:39:42 AM	Main Vac valve opened
8/22/2012	10:39:42 AM	Helium MFC set to  20.000000
8/22/2012	10:39:42 AM	H2 MFC set to  0.000000
8/22/2012	10:39:42 AM	BCl3 MFC set to  0.000000
8/22/2012	10:39:42 AM	PH3 MFC set to  0.000000
8/22/2012	10:39:42 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:39:42 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:39:42 AM	Tube furnace set to 150
8/22/2012	10:40:12 AM	Helium valve closed
8/22/2012	10:40:12 AM	H2 valve closed
8/22/2012	10:40:12 AM	BCl3 valve closed
8/22/2012	10:40:12 AM	PH3 valve closed
8/22/2012	10:40:12 AM	SiCl4 pre valve closed
8/22/2012	10:40:12 AM	SiCl4 post valve closed
8/22/2012	10:40:12 AM	Bypass valve closed
8/22/2012	10:40:12 AM	Bubbler valve closed
8/22/2012	10:40:12 AM	Main Vac valve opened
8/22/2012	10:40:12 AM	Helium MFC set to  0.000000
8/22/2012	10:40:12 AM	H2 MFC set to  0.000000
8/22/2012	10:40:12 AM	BCl3 MFC set to  0.000000
8/22/2012	10:40:12 AM	PH3 MFC set to  0.000000
8/22/2012	10:40:12 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:40:12 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:40:12 AM	Tube furnace set to 150
8/22/2012	10:40:42 AM	H2 valve closed
8/22/2012	10:40:42 AM	BCl3 valve closed
8/22/2012	10:40:42 AM	PH3 valve closed
8/22/2012	10:40:42 AM	SiCl4 pre valve closed
8/22/2012	10:40:42 AM	SiCl4 post valve closed
8/22/2012	10:40:43 AM	Bypass valve closed
8/22/2012	10:40:43 AM	Bubbler valve closed
8/22/2012	10:40:43 AM	Helium valve opened
8/22/2012	10:40:43 AM	Main Vac valve opened
8/22/2012	10:40:43 AM	Helium MFC set to  20.000000
8/22/2012	10:40:43 AM	H2 MFC set to  0.000000
8/22/2012	10:40:43 AM	BCl3 MFC set to  0.000000
8/22/2012	10:40:43 AM	PH3 MFC set to  0.000000
8/22/2012	10:40:43 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:40:43 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:40:43 AM	Tube furnace set to 150
8/22/2012	10:41:13 AM	Helium valve closed
8/22/2012	10:41:13 AM	H2 valve closed
8/22/2012	10:41:13 AM	BCl3 valve closed
8/22/2012	10:41:13 AM	PH3 valve closed
8/22/2012	10:41:13 AM	SiCl4 pre valve closed
8/22/2012	10:41:13 AM	SiCl4 post valve closed
8/22/2012	10:41:13 AM	Bypass valve closed
8/22/2012	10:41:13 AM	Bubbler valve closed
8/22/2012	10:41:13 AM	Main Vac valve opened
8/22/2012	10:41:13 AM	Helium MFC set to  0.000000
8/22/2012	10:41:13 AM	H2 MFC set to  0.000000
8/22/2012	10:41:13 AM	BCl3 MFC set to  0.000000
8/22/2012	10:41:13 AM	PH3 MFC set to  0.000000
8/22/2012	10:41:13 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:41:13 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:41:13 AM	Tube furnace set to 150
8/22/2012	10:41:43 AM	H2 valve closed
8/22/2012	10:41:43 AM	BCl3 valve closed
8/22/2012	10:41:43 AM	PH3 valve closed
8/22/2012	10:41:43 AM	SiCl4 pre valve closed
8/22/2012	10:41:43 AM	SiCl4 post valve closed
8/22/2012	10:41:43 AM	Bypass valve closed
8/22/2012	10:41:43 AM	Bubbler valve closed
8/22/2012	10:41:43 AM	Helium valve opened
8/22/2012	10:41:43 AM	Main Vac valve opened
8/22/2012	10:41:43 AM	Helium MFC set to  20.000000
8/22/2012	10:41:43 AM	H2 MFC set to  0.000000
8/22/2012	10:41:43 AM	BCl3 MFC set to  0.000000
8/22/2012	10:41:43 AM	PH3 MFC set to  0.000000
8/22/2012	10:41:43 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:41:43 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:41:43 AM	Tube furnace set to 150
8/22/2012	10:42:13 AM	Helium valve closed
8/22/2012	10:42:13 AM	H2 valve closed
8/22/2012	10:42:13 AM	BCl3 valve closed
8/22/2012	10:42:13 AM	PH3 valve closed
8/22/2012	10:42:13 AM	SiCl4 pre valve closed
8/22/2012	10:42:13 AM	SiCl4 post valve closed
8/22/2012	10:42:13 AM	Bypass valve closed
8/22/2012	10:42:13 AM	Bubbler valve closed
8/22/2012	10:42:13 AM	Main Vac valve opened
8/22/2012	10:42:13 AM	Helium MFC set to  0.000000
8/22/2012	10:42:13 AM	H2 MFC set to  0.000000
8/22/2012	10:42:13 AM	BCl3 MFC set to  0.000000
8/22/2012	10:42:13 AM	PH3 MFC set to  0.000000
8/22/2012	10:42:13 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:42:13 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:42:13 AM	Tube furnace set to 150
8/22/2012	10:42:43 AM	H2 valve closed
8/22/2012	10:42:43 AM	BCl3 valve closed
8/22/2012	10:42:43 AM	PH3 valve closed
8/22/2012	10:42:43 AM	SiCl4 pre valve closed
8/22/2012	10:42:43 AM	SiCl4 post valve closed
8/22/2012	10:42:43 AM	Bypass valve closed
8/22/2012	10:42:43 AM	Bubbler valve closed
8/22/2012	10:42:44 AM	Helium valve opened
8/22/2012	10:42:44 AM	Main Vac valve opened
8/22/2012	10:42:44 AM	Helium MFC set to  20.000000
8/22/2012	10:42:44 AM	H2 MFC set to  0.000000
8/22/2012	10:42:44 AM	BCl3 MFC set to  0.000000
8/22/2012	10:42:44 AM	PH3 MFC set to  0.000000
8/22/2012	10:42:44 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:42:44 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:42:44 AM	Tube furnace set to 150
8/22/2012	10:43:14 AM	Helium valve closed
8/22/2012	10:43:14 AM	H2 valve closed
8/22/2012	10:43:14 AM	BCl3 valve closed
8/22/2012	10:43:14 AM	PH3 valve closed
8/22/2012	10:43:14 AM	SiCl4 pre valve closed
8/22/2012	10:43:14 AM	SiCl4 post valve closed
8/22/2012	10:43:14 AM	Bypass valve closed
8/22/2012	10:43:14 AM	Bubbler valve closed
8/22/2012	10:43:14 AM	Main Vac valve opened
8/22/2012	10:43:14 AM	Helium MFC set to  0.000000
8/22/2012	10:43:14 AM	H2 MFC set to  0.000000
8/22/2012	10:43:14 AM	BCl3 MFC set to  0.000000
8/22/2012	10:43:14 AM	PH3 MFC set to  0.000000
8/22/2012	10:43:14 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:43:14 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:43:14 AM	Tube furnace set to 150
8/22/2012	10:43:44 AM	H2 valve closed
8/22/2012	10:43:44 AM	BCl3 valve closed
8/22/2012	10:43:44 AM	PH3 valve closed
8/22/2012	10:43:44 AM	SiCl4 pre valve closed
8/22/2012	10:43:44 AM	SiCl4 post valve closed
8/22/2012	10:43:44 AM	Bypass valve closed
8/22/2012	10:43:44 AM	Bubbler valve closed
8/22/2012	10:43:44 AM	Helium valve opened
8/22/2012	10:43:44 AM	Main Vac valve opened
8/22/2012	10:43:44 AM	Helium MFC set to  20.000000
8/22/2012	10:43:44 AM	H2 MFC set to  0.000000
8/22/2012	10:43:44 AM	BCl3 MFC set to  0.000000
8/22/2012	10:43:44 AM	PH3 MFC set to  0.000000
8/22/2012	10:43:44 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:43:44 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:43:44 AM	Tube furnace set to 150
8/22/2012	10:44:14 AM	Helium valve closed
8/22/2012	10:44:14 AM	H2 valve closed
8/22/2012	10:44:14 AM	BCl3 valve closed
8/22/2012	10:44:14 AM	PH3 valve closed
8/22/2012	10:44:14 AM	SiCl4 pre valve closed
8/22/2012	10:44:14 AM	SiCl4 post valve closed
8/22/2012	10:44:14 AM	Bypass valve closed
8/22/2012	10:44:14 AM	Bubbler valve closed
8/22/2012	10:44:14 AM	Main Vac valve opened
8/22/2012	10:44:14 AM	Helium MFC set to  0.000000
8/22/2012	10:44:14 AM	H2 MFC set to  0.000000
8/22/2012	10:44:14 AM	BCl3 MFC set to  0.000000
8/22/2012	10:44:14 AM	PH3 MFC set to  0.000000
8/22/2012	10:44:14 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:44:14 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:44:14 AM	Tube furnace set to 150
8/22/2012	10:44:44 AM	H2 valve closed
8/22/2012	10:44:44 AM	BCl3 valve closed
8/22/2012	10:44:44 AM	PH3 valve closed
8/22/2012	10:44:44 AM	SiCl4 pre valve closed
8/22/2012	10:44:44 AM	SiCl4 post valve closed
8/22/2012	10:44:44 AM	Bypass valve closed
8/22/2012	10:44:44 AM	Bubbler valve closed
8/22/2012	10:44:44 AM	Helium valve opened
8/22/2012	10:44:44 AM	Main Vac valve opened
8/22/2012	10:44:45 AM	Helium MFC set to  20.000000
8/22/2012	10:44:45 AM	H2 MFC set to  0.000000
8/22/2012	10:44:45 AM	BCl3 MFC set to  0.000000
8/22/2012	10:44:45 AM	PH3 MFC set to  0.000000
8/22/2012	10:44:45 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:44:45 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:44:45 AM	Tube furnace set to 150
8/22/2012	10:45:15 AM	Helium valve closed
8/22/2012	10:45:15 AM	H2 valve closed
8/22/2012	10:45:15 AM	BCl3 valve closed
8/22/2012	10:45:15 AM	PH3 valve closed
8/22/2012	10:45:15 AM	SiCl4 pre valve closed
8/22/2012	10:45:15 AM	SiCl4 post valve closed
8/22/2012	10:45:15 AM	Bypass valve closed
8/22/2012	10:45:15 AM	Bubbler valve closed
8/22/2012	10:45:15 AM	Main Vac valve opened
8/22/2012	10:45:15 AM	Helium MFC set to  0.000000
8/22/2012	10:45:15 AM	H2 MFC set to  0.000000
8/22/2012	10:45:15 AM	BCl3 MFC set to  0.000000
8/22/2012	10:45:15 AM	PH3 MFC set to  0.000000
8/22/2012	10:45:15 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:45:15 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:45:15 AM	Tube furnace set to 150
8/22/2012	10:45:45 AM	H2 valve closed
8/22/2012	10:45:45 AM	BCl3 valve closed
8/22/2012	10:45:45 AM	PH3 valve closed
8/22/2012	10:45:45 AM	SiCl4 pre valve closed
8/22/2012	10:45:45 AM	SiCl4 post valve closed
8/22/2012	10:45:45 AM	Bypass valve closed
8/22/2012	10:45:45 AM	Bubbler valve closed
8/22/2012	10:45:45 AM	Helium valve opened
8/22/2012	10:45:45 AM	Main Vac valve opened
8/22/2012	10:45:45 AM	Helium MFC set to  20.000000
8/22/2012	10:45:45 AM	H2 MFC set to  0.000000
8/22/2012	10:45:45 AM	BCl3 MFC set to  0.000000
8/22/2012	10:45:45 AM	PH3 MFC set to  0.000000
8/22/2012	10:45:45 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:45:45 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:45:45 AM	Tube furnace set to 150
8/22/2012	10:46:15 AM	Helium valve closed
8/22/2012	10:46:15 AM	H2 valve closed
8/22/2012	10:46:15 AM	BCl3 valve closed
8/22/2012	10:46:15 AM	PH3 valve closed
8/22/2012	10:46:15 AM	SiCl4 pre valve closed
8/22/2012	10:46:15 AM	SiCl4 post valve closed
8/22/2012	10:46:15 AM	Bypass valve closed
8/22/2012	10:46:15 AM	Bubbler valve closed
8/22/2012	10:46:15 AM	Main Vac valve opened
8/22/2012	10:46:15 AM	Helium MFC set to  0.000000
8/22/2012	10:46:15 AM	H2 MFC set to  0.000000
8/22/2012	10:46:15 AM	BCl3 MFC set to  0.000000
8/22/2012	10:46:15 AM	PH3 MFC set to  0.000000
8/22/2012	10:46:15 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:46:15 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:46:15 AM	Tube furnace set to 150
8/22/2012	10:46:16 AM	Run finished at 10:46 AM
8/22/2012	10:56:08 AM	Main Vac valve closed
8/22/2012	10:56:23 AM	Main Vac valve opened
8/22/2012	10:56:34 AM	Recipe started at 10:56 AM
8/22/2012	10:56:34 AM	Helium valve closed
8/22/2012	10:56:34 AM	H2 valve closed
8/22/2012	10:56:34 AM	BCl3 valve closed
8/22/2012	10:56:34 AM	PH3 valve closed
8/22/2012	10:56:34 AM	SiCl4 pre valve closed
8/22/2012	10:56:34 AM	SiCl4 post valve closed
8/22/2012	10:56:34 AM	Main Vac valve closed
8/22/2012	10:56:34 AM	Bubbler valve closed
8/22/2012	10:56:34 AM	Bypass valve opened
8/22/2012	10:56:34 AM	Helium MFC set to  0.000000
8/22/2012	10:56:34 AM	H2 MFC set to  0.000000
8/22/2012	10:56:34 AM	BCl3 MFC set to  0.000000
8/22/2012	10:56:34 AM	PH3 MFC set to  0.000000
8/22/2012	10:56:34 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:56:34 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:56:34 AM	Tube furnace set to 150
8/22/2012	10:56:35 AM	Helium valve closed
8/22/2012	10:56:35 AM	H2 valve closed
8/22/2012	10:56:35 AM	BCl3 valve closed
8/22/2012	10:56:35 AM	PH3 valve closed
8/22/2012	10:56:35 AM	SiCl4 pre valve closed
8/22/2012	10:56:35 AM	SiCl4 post valve closed
8/22/2012	10:56:35 AM	Main Vac valve closed
8/22/2012	10:56:35 AM	Bubbler valve closed
8/22/2012	10:56:35 AM	Bypass valve opened
8/22/2012	10:56:35 AM	Helium MFC set to  0.000000
8/22/2012	10:56:35 AM	H2 MFC set to  0.000000
8/22/2012	10:56:35 AM	BCl3 MFC set to  0.000000
8/22/2012	10:56:35 AM	PH3 MFC set to  0.000000
8/22/2012	10:56:35 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:56:35 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:56:35 AM	Tube furnace set to 150
8/22/2012	10:56:35 AM	Helium valve closed
8/22/2012	10:56:35 AM	H2 valve closed
8/22/2012	10:56:35 AM	BCl3 valve closed
8/22/2012	10:56:35 AM	PH3 valve closed
8/22/2012	10:56:35 AM	SiCl4 pre valve closed
8/22/2012	10:56:35 AM	SiCl4 post valve closed
8/22/2012	10:56:35 AM	Bypass valve closed
8/22/2012	10:56:35 AM	Bubbler valve closed
8/22/2012	10:56:35 AM	Main Vac valve opened
8/22/2012	10:56:35 AM	Helium MFC set to  0.000000
8/22/2012	10:56:35 AM	H2 MFC set to  0.000000
8/22/2012	10:56:35 AM	BCl3 MFC set to  0.000000
8/22/2012	10:56:35 AM	PH3 MFC set to  0.000000
8/22/2012	10:56:35 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:56:35 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:56:36 AM	Tube furnace set to 150
8/22/2012	10:56:36 AM	H2 valve closed
8/22/2012	10:56:36 AM	BCl3 valve closed
8/22/2012	10:56:36 AM	PH3 valve closed
8/22/2012	10:56:36 AM	SiCl4 pre valve closed
8/22/2012	10:56:36 AM	SiCl4 post valve closed
8/22/2012	10:56:36 AM	Bypass valve closed
8/22/2012	10:56:36 AM	Bubbler valve closed
8/22/2012	10:56:36 AM	Helium valve opened
8/22/2012	10:56:36 AM	Main Vac valve opened
8/22/2012	10:56:36 AM	Helium MFC set to  20.000000
8/22/2012	10:56:36 AM	H2 MFC set to  0.000000
8/22/2012	10:56:36 AM	BCl3 MFC set to  0.000000
8/22/2012	10:56:36 AM	PH3 MFC set to  0.000000
8/22/2012	10:56:36 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:56:36 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:56:36 AM	Tube furnace set to 150
8/22/2012	10:57:07 AM	Helium valve closed
8/22/2012	10:57:07 AM	H2 valve closed
8/22/2012	10:57:07 AM	BCl3 valve closed
8/22/2012	10:57:07 AM	PH3 valve closed
8/22/2012	10:57:07 AM	SiCl4 pre valve closed
8/22/2012	10:57:07 AM	SiCl4 post valve closed
8/22/2012	10:57:07 AM	Bypass valve closed
8/22/2012	10:57:07 AM	Bubbler valve closed
8/22/2012	10:57:07 AM	Main Vac valve opened
8/22/2012	10:57:07 AM	Helium MFC set to  0.000000
8/22/2012	10:57:07 AM	H2 MFC set to  0.000000
8/22/2012	10:57:07 AM	BCl3 MFC set to  0.000000
8/22/2012	10:57:07 AM	PH3 MFC set to  0.000000
8/22/2012	10:57:07 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:57:07 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:57:07 AM	Tube furnace set to 150
8/22/2012	10:57:37 AM	H2 valve closed
8/22/2012	10:57:37 AM	BCl3 valve closed
8/22/2012	10:57:37 AM	PH3 valve closed
8/22/2012	10:57:37 AM	SiCl4 pre valve closed
8/22/2012	10:57:37 AM	SiCl4 post valve closed
8/22/2012	10:57:37 AM	Bypass valve closed
8/22/2012	10:57:37 AM	Bubbler valve closed
8/22/2012	10:57:37 AM	Helium valve opened
8/22/2012	10:57:37 AM	Main Vac valve opened
8/22/2012	10:57:37 AM	Helium MFC set to  20.000000
8/22/2012	10:57:37 AM	H2 MFC set to  0.000000
8/22/2012	10:57:37 AM	BCl3 MFC set to  0.000000
8/22/2012	10:57:37 AM	PH3 MFC set to  0.000000
8/22/2012	10:57:37 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:57:37 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:57:37 AM	Tube furnace set to 150
8/22/2012	10:58:07 AM	Helium valve closed
8/22/2012	10:58:07 AM	H2 valve closed
8/22/2012	10:58:07 AM	BCl3 valve closed
8/22/2012	10:58:07 AM	PH3 valve closed
8/22/2012	10:58:07 AM	SiCl4 pre valve closed
8/22/2012	10:58:07 AM	SiCl4 post valve closed
8/22/2012	10:58:07 AM	Bypass valve closed
8/22/2012	10:58:07 AM	Bubbler valve closed
8/22/2012	10:58:07 AM	Main Vac valve opened
8/22/2012	10:58:07 AM	Helium MFC set to  0.000000
8/22/2012	10:58:07 AM	H2 MFC set to  0.000000
8/22/2012	10:58:07 AM	BCl3 MFC set to  0.000000
8/22/2012	10:58:07 AM	PH3 MFC set to  0.000000
8/22/2012	10:58:07 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:58:07 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:58:07 AM	Tube furnace set to 150
8/22/2012	10:58:37 AM	H2 valve closed
8/22/2012	10:58:37 AM	BCl3 valve closed
8/22/2012	10:58:37 AM	PH3 valve closed
8/22/2012	10:58:37 AM	SiCl4 pre valve closed
8/22/2012	10:58:37 AM	SiCl4 post valve closed
8/22/2012	10:58:37 AM	Bypass valve closed
8/22/2012	10:58:37 AM	Bubbler valve closed
8/22/2012	10:58:37 AM	Helium valve opened
8/22/2012	10:58:37 AM	Main Vac valve opened
8/22/2012	10:58:37 AM	Helium MFC set to  20.000000
8/22/2012	10:58:37 AM	H2 MFC set to  0.000000
8/22/2012	10:58:37 AM	BCl3 MFC set to  0.000000
8/22/2012	10:58:37 AM	PH3 MFC set to  0.000000
8/22/2012	10:58:37 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:58:37 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:58:37 AM	Tube furnace set to 150
8/22/2012	10:59:08 AM	Helium valve closed
8/22/2012	10:59:08 AM	H2 valve closed
8/22/2012	10:59:08 AM	BCl3 valve closed
8/22/2012	10:59:08 AM	PH3 valve closed
8/22/2012	10:59:08 AM	SiCl4 pre valve closed
8/22/2012	10:59:08 AM	SiCl4 post valve closed
8/22/2012	10:59:08 AM	Bypass valve closed
8/22/2012	10:59:08 AM	Bubbler valve closed
8/22/2012	10:59:08 AM	Main Vac valve opened
8/22/2012	10:59:08 AM	Helium MFC set to  0.000000
8/22/2012	10:59:08 AM	H2 MFC set to  0.000000
8/22/2012	10:59:08 AM	BCl3 MFC set to  0.000000
8/22/2012	10:59:08 AM	PH3 MFC set to  0.000000
8/22/2012	10:59:08 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:59:08 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:59:08 AM	Tube furnace set to 150
8/22/2012	10:59:38 AM	H2 valve closed
8/22/2012	10:59:38 AM	BCl3 valve closed
8/22/2012	10:59:38 AM	PH3 valve closed
8/22/2012	10:59:38 AM	SiCl4 pre valve closed
8/22/2012	10:59:38 AM	SiCl4 post valve closed
8/22/2012	10:59:38 AM	Bypass valve closed
8/22/2012	10:59:38 AM	Bubbler valve closed
8/22/2012	10:59:38 AM	Helium valve opened
8/22/2012	10:59:38 AM	Main Vac valve opened
8/22/2012	10:59:38 AM	Helium MFC set to  20.000000
8/22/2012	10:59:38 AM	H2 MFC set to  0.000000
8/22/2012	10:59:38 AM	BCl3 MFC set to  0.000000
8/22/2012	10:59:38 AM	PH3 MFC set to  0.000000
8/22/2012	10:59:38 AM	SiCl4 MFC set to  0.000000
8/22/2012	10:59:38 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:59:38 AM	Tube furnace set to 150
8/22/2012	11:00:08 AM	Helium valve closed
8/22/2012	11:00:08 AM	H2 valve closed
8/22/2012	11:00:08 AM	BCl3 valve closed
8/22/2012	11:00:08 AM	PH3 valve closed
8/22/2012	11:00:08 AM	SiCl4 pre valve closed
8/22/2012	11:00:08 AM	SiCl4 post valve closed
8/22/2012	11:00:08 AM	Bypass valve closed
8/22/2012	11:00:08 AM	Bubbler valve closed
8/22/2012	11:00:08 AM	Main Vac valve opened
8/22/2012	11:00:08 AM	Helium MFC set to  0.000000
8/22/2012	11:00:08 AM	H2 MFC set to  0.000000
8/22/2012	11:00:08 AM	BCl3 MFC set to  0.000000
8/22/2012	11:00:08 AM	PH3 MFC set to  0.000000
8/22/2012	11:00:08 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:00:08 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:00:08 AM	Tube furnace set to 150
8/22/2012	11:00:38 AM	H2 valve closed
8/22/2012	11:00:38 AM	BCl3 valve closed
8/22/2012	11:00:38 AM	PH3 valve closed
8/22/2012	11:00:38 AM	SiCl4 pre valve closed
8/22/2012	11:00:38 AM	SiCl4 post valve closed
8/22/2012	11:00:38 AM	Bypass valve closed
8/22/2012	11:00:38 AM	Bubbler valve closed
8/22/2012	11:00:38 AM	Helium valve opened
8/22/2012	11:00:38 AM	Main Vac valve opened
8/22/2012	11:00:38 AM	Helium MFC set to  20.000000
8/22/2012	11:00:38 AM	H2 MFC set to  0.000000
8/22/2012	11:00:38 AM	BCl3 MFC set to  0.000000
8/22/2012	11:00:38 AM	PH3 MFC set to  0.000000
8/22/2012	11:00:38 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:00:38 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:00:38 AM	Tube furnace set to 150
8/22/2012	11:01:09 AM	Helium valve closed
8/22/2012	11:01:09 AM	H2 valve closed
8/22/2012	11:01:09 AM	BCl3 valve closed
8/22/2012	11:01:09 AM	PH3 valve closed
8/22/2012	11:01:09 AM	SiCl4 pre valve closed
8/22/2012	11:01:09 AM	SiCl4 post valve closed
8/22/2012	11:01:09 AM	Bypass valve closed
8/22/2012	11:01:09 AM	Bubbler valve closed
8/22/2012	11:01:09 AM	Main Vac valve opened
8/22/2012	11:01:09 AM	Helium MFC set to  0.000000
8/22/2012	11:01:09 AM	H2 MFC set to  0.000000
8/22/2012	11:01:09 AM	BCl3 MFC set to  0.000000
8/22/2012	11:01:09 AM	PH3 MFC set to  0.000000
8/22/2012	11:01:09 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:01:09 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:01:09 AM	Tube furnace set to 150
8/22/2012	11:01:39 AM	H2 valve closed
8/22/2012	11:01:39 AM	BCl3 valve closed
8/22/2012	11:01:39 AM	PH3 valve closed
8/22/2012	11:01:39 AM	SiCl4 pre valve closed
8/22/2012	11:01:39 AM	SiCl4 post valve closed
8/22/2012	11:01:39 AM	Bypass valve closed
8/22/2012	11:01:39 AM	Bubbler valve closed
8/22/2012	11:01:39 AM	Helium valve opened
8/22/2012	11:01:39 AM	Main Vac valve opened
8/22/2012	11:01:39 AM	Helium MFC set to  20.000000
8/22/2012	11:01:39 AM	H2 MFC set to  0.000000
8/22/2012	11:01:39 AM	BCl3 MFC set to  0.000000
8/22/2012	11:01:39 AM	PH3 MFC set to  0.000000
8/22/2012	11:01:39 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:01:39 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:01:39 AM	Tube furnace set to 150
8/22/2012	11:02:09 AM	Helium valve closed
8/22/2012	11:02:09 AM	H2 valve closed
8/22/2012	11:02:09 AM	BCl3 valve closed
8/22/2012	11:02:09 AM	PH3 valve closed
8/22/2012	11:02:09 AM	SiCl4 pre valve closed
8/22/2012	11:02:09 AM	SiCl4 post valve closed
8/22/2012	11:02:09 AM	Bypass valve closed
8/22/2012	11:02:09 AM	Bubbler valve closed
8/22/2012	11:02:09 AM	Main Vac valve opened
8/22/2012	11:02:09 AM	Helium MFC set to  0.000000
8/22/2012	11:02:09 AM	H2 MFC set to  0.000000
8/22/2012	11:02:09 AM	BCl3 MFC set to  0.000000
8/22/2012	11:02:09 AM	PH3 MFC set to  0.000000
8/22/2012	11:02:09 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:02:09 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:02:09 AM	Tube furnace set to 150
8/22/2012	11:02:39 AM	H2 valve closed
8/22/2012	11:02:39 AM	BCl3 valve closed
8/22/2012	11:02:39 AM	PH3 valve closed
8/22/2012	11:02:39 AM	SiCl4 pre valve closed
8/22/2012	11:02:39 AM	SiCl4 post valve closed
8/22/2012	11:02:39 AM	Bypass valve closed
8/22/2012	11:02:39 AM	Bubbler valve closed
8/22/2012	11:02:39 AM	Helium valve opened
8/22/2012	11:02:39 AM	Main Vac valve opened
8/22/2012	11:02:39 AM	Helium MFC set to  20.000000
8/22/2012	11:02:39 AM	H2 MFC set to  0.000000
8/22/2012	11:02:39 AM	BCl3 MFC set to  0.000000
8/22/2012	11:02:39 AM	PH3 MFC set to  0.000000
8/22/2012	11:02:39 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:02:39 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:02:39 AM	Tube furnace set to 150
8/22/2012	11:03:10 AM	Helium valve closed
8/22/2012	11:03:10 AM	H2 valve closed
8/22/2012	11:03:10 AM	BCl3 valve closed
8/22/2012	11:03:10 AM	PH3 valve closed
8/22/2012	11:03:10 AM	SiCl4 pre valve closed
8/22/2012	11:03:10 AM	SiCl4 post valve closed
8/22/2012	11:03:10 AM	Bypass valve closed
8/22/2012	11:03:10 AM	Bubbler valve closed
8/22/2012	11:03:10 AM	Main Vac valve opened
8/22/2012	11:03:10 AM	Helium MFC set to  0.000000
8/22/2012	11:03:10 AM	H2 MFC set to  0.000000
8/22/2012	11:03:10 AM	BCl3 MFC set to  0.000000
8/22/2012	11:03:10 AM	PH3 MFC set to  0.000000
8/22/2012	11:03:10 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:03:10 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:03:10 AM	Tube furnace set to 150
8/22/2012	11:03:40 AM	H2 valve closed
8/22/2012	11:03:40 AM	BCl3 valve closed
8/22/2012	11:03:40 AM	PH3 valve closed
8/22/2012	11:03:40 AM	SiCl4 pre valve closed
8/22/2012	11:03:40 AM	SiCl4 post valve closed
8/22/2012	11:03:40 AM	Bypass valve closed
8/22/2012	11:03:40 AM	Bubbler valve closed
8/22/2012	11:03:40 AM	Helium valve opened
8/22/2012	11:03:40 AM	Main Vac valve opened
8/22/2012	11:03:40 AM	Helium MFC set to  20.000000
8/22/2012	11:03:40 AM	H2 MFC set to  0.000000
8/22/2012	11:03:40 AM	BCl3 MFC set to  0.000000
8/22/2012	11:03:40 AM	PH3 MFC set to  0.000000
8/22/2012	11:03:40 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:03:40 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:03:40 AM	Tube furnace set to 150
8/22/2012	11:04:10 AM	Helium valve closed
8/22/2012	11:04:10 AM	H2 valve closed
8/22/2012	11:04:10 AM	BCl3 valve closed
8/22/2012	11:04:10 AM	PH3 valve closed
8/22/2012	11:04:10 AM	SiCl4 pre valve closed
8/22/2012	11:04:10 AM	SiCl4 post valve closed
8/22/2012	11:04:10 AM	Bypass valve closed
8/22/2012	11:04:10 AM	Bubbler valve closed
8/22/2012	11:04:10 AM	Main Vac valve opened
8/22/2012	11:04:10 AM	Helium MFC set to  0.000000
8/22/2012	11:04:10 AM	H2 MFC set to  0.000000
8/22/2012	11:04:10 AM	BCl3 MFC set to  0.000000
8/22/2012	11:04:10 AM	PH3 MFC set to  0.000000
8/22/2012	11:04:10 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:04:10 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:04:10 AM	Tube furnace set to 150
8/22/2012	11:04:40 AM	H2 valve closed
8/22/2012	11:04:40 AM	BCl3 valve closed
8/22/2012	11:04:40 AM	PH3 valve closed
8/22/2012	11:04:40 AM	SiCl4 pre valve closed
8/22/2012	11:04:40 AM	SiCl4 post valve closed
8/22/2012	11:04:40 AM	Bypass valve closed
8/22/2012	11:04:40 AM	Bubbler valve closed
8/22/2012	11:04:40 AM	Helium valve opened
8/22/2012	11:04:40 AM	Main Vac valve opened
8/22/2012	11:04:40 AM	Helium MFC set to  20.000000
8/22/2012	11:04:40 AM	H2 MFC set to  0.000000
8/22/2012	11:04:40 AM	BCl3 MFC set to  0.000000
8/22/2012	11:04:40 AM	PH3 MFC set to  0.000000
8/22/2012	11:04:40 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:04:40 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:04:40 AM	Tube furnace set to 150
8/22/2012	11:05:10 AM	Helium valve closed
8/22/2012	11:05:10 AM	H2 valve closed
8/22/2012	11:05:10 AM	BCl3 valve closed
8/22/2012	11:05:11 AM	PH3 valve closed
8/22/2012	11:05:11 AM	SiCl4 pre valve closed
8/22/2012	11:05:11 AM	SiCl4 post valve closed
8/22/2012	11:05:11 AM	Bypass valve closed
8/22/2012	11:05:11 AM	Bubbler valve closed
8/22/2012	11:05:11 AM	Main Vac valve opened
8/22/2012	11:05:11 AM	Helium MFC set to  0.000000
8/22/2012	11:05:11 AM	H2 MFC set to  0.000000
8/22/2012	11:05:11 AM	BCl3 MFC set to  0.000000
8/22/2012	11:05:11 AM	PH3 MFC set to  0.000000
8/22/2012	11:05:11 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:05:11 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:05:11 AM	Tube furnace set to 150
8/22/2012	11:05:41 AM	H2 valve closed
8/22/2012	11:05:41 AM	BCl3 valve closed
8/22/2012	11:05:41 AM	PH3 valve closed
8/22/2012	11:05:41 AM	SiCl4 pre valve closed
8/22/2012	11:05:41 AM	SiCl4 post valve closed
8/22/2012	11:05:41 AM	Bypass valve closed
8/22/2012	11:05:41 AM	Bubbler valve closed
8/22/2012	11:05:41 AM	Helium valve opened
8/22/2012	11:05:41 AM	Main Vac valve opened
8/22/2012	11:05:41 AM	Helium MFC set to  20.000000
8/22/2012	11:05:41 AM	H2 MFC set to  0.000000
8/22/2012	11:05:41 AM	BCl3 MFC set to  0.000000
8/22/2012	11:05:41 AM	PH3 MFC set to  0.000000
8/22/2012	11:05:41 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:05:41 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:05:41 AM	Tube furnace set to 150
8/22/2012	11:06:11 AM	Helium valve closed
8/22/2012	11:06:11 AM	H2 valve closed
8/22/2012	11:06:11 AM	BCl3 valve closed
8/22/2012	11:06:11 AM	PH3 valve closed
8/22/2012	11:06:11 AM	SiCl4 pre valve closed
8/22/2012	11:06:11 AM	SiCl4 post valve closed
8/22/2012	11:06:11 AM	Bypass valve closed
8/22/2012	11:06:11 AM	Bubbler valve closed
8/22/2012	11:06:11 AM	Main Vac valve opened
8/22/2012	11:06:11 AM	Helium MFC set to  0.000000
8/22/2012	11:06:11 AM	H2 MFC set to  0.000000
8/22/2012	11:06:11 AM	BCl3 MFC set to  0.000000
8/22/2012	11:06:11 AM	PH3 MFC set to  0.000000
8/22/2012	11:06:11 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:06:11 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:06:11 AM	Tube furnace set to 150
8/22/2012	11:06:12 AM	Run finished at 11:06 AM
8/22/2012	11:11:11 AM	Main Vac valve closed
8/22/2012	11:11:23 AM	Main Vac valve opened
8/22/2012	11:12:54 AM	Recipe started at 11:12 AM
8/22/2012	11:12:54 AM	Helium valve closed
8/22/2012	11:12:54 AM	H2 valve closed
8/22/2012	11:12:54 AM	BCl3 valve closed
8/22/2012	11:12:54 AM	PH3 valve closed
8/22/2012	11:12:54 AM	SiCl4 pre valve closed
8/22/2012	11:12:54 AM	SiCl4 post valve closed
8/22/2012	11:12:54 AM	Main Vac valve closed
8/22/2012	11:12:54 AM	Bypass valve closed
8/22/2012	11:12:54 AM	Bubbler valve closed
8/22/2012	11:12:54 AM	Helium MFC set to  0.000000
8/22/2012	11:12:54 AM	H2 MFC set to  0.000000
8/22/2012	11:12:54 AM	BCl3 MFC set to  0.000000
8/22/2012	11:12:54 AM	PH3 MFC set to  0.000000
8/22/2012	11:12:54 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:12:54 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:12:55 AM	Tube furnace set to 0
8/22/2012	11:12:58 AM	Helium valve closed
8/22/2012	11:12:58 AM	BCl3 valve closed
8/22/2012	11:12:58 AM	PH3 valve closed
8/22/2012	11:12:58 AM	SiCl4 pre valve closed
8/22/2012	11:12:58 AM	SiCl4 post valve closed
8/22/2012	11:12:58 AM	Main Vac valve closed
8/22/2012	11:12:58 AM	Bypass valve closed
8/22/2012	11:12:58 AM	Bubbler valve closed
8/22/2012	11:12:58 AM	H2 valve opened
8/22/2012	11:12:58 AM	Helium MFC set to  0.000000
8/22/2012	11:12:58 AM	H2 MFC set to  500.000000
8/22/2012	11:12:58 AM	BCl3 MFC set to  0.000000
8/22/2012	11:12:58 AM	PH3 MFC set to  0.000000
8/22/2012	11:12:58 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:12:58 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:12:58 AM	Tube furnace set to 50
8/22/2012	11:14:10 AM	Helium valve closed
8/22/2012	11:14:10 AM	BCl3 valve closed
8/22/2012	11:14:10 AM	PH3 valve closed
8/22/2012	11:14:10 AM	SiCl4 pre valve closed
8/22/2012	11:14:10 AM	SiCl4 post valve closed
8/22/2012	11:14:10 AM	Main Vac valve closed
8/22/2012	11:14:10 AM	Bypass valve closed
8/22/2012	11:14:10 AM	H2 valve opened
8/22/2012	11:14:10 AM	Bubbler valve opened
8/22/2012	11:14:10 AM	Helium MFC set to  0.000000
8/22/2012	11:14:10 AM	H2 MFC set to  500.000000
8/22/2012	11:14:10 AM	BCl3 MFC set to  0.000000
8/22/2012	11:14:10 AM	PH3 MFC set to  0.000000
8/22/2012	11:14:10 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:14:10 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:14:10 AM	Tube furnace set to 50
8/22/2012	11:14:11 AM	Helium valve closed
8/22/2012	11:14:11 AM	BCl3 valve closed
8/22/2012	11:14:11 AM	PH3 valve closed
8/22/2012	11:14:11 AM	SiCl4 pre valve closed
8/22/2012	11:14:11 AM	SiCl4 post valve closed
8/22/2012	11:14:11 AM	Main Vac valve closed
8/22/2012	11:14:11 AM	Bypass valve closed
8/22/2012	11:14:11 AM	H2 valve opened
8/22/2012	11:14:11 AM	Bubbler valve opened
8/22/2012	11:14:11 AM	Helium MFC set to  0.000000
8/22/2012	11:14:11 AM	H2 MFC set to  450.000000
8/22/2012	11:14:11 AM	BCl3 MFC set to  0.000000
8/22/2012	11:14:11 AM	PH3 MFC set to  0.000000
8/22/2012	11:14:11 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:14:11 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:14:11 AM	Tube furnace set to 1000
8/22/2012	11:34:11 AM	Helium valve closed
8/22/2012	11:34:11 AM	PH3 valve closed
8/22/2012	11:34:11 AM	Main Vac valve closed
8/22/2012	11:34:11 AM	Bypass valve closed
8/22/2012	11:34:11 AM	H2 valve opened
8/22/2012	11:34:11 AM	BCl3 valve opened
8/22/2012	11:34:11 AM	SiCl4 pre valve opened
8/22/2012	11:34:11 AM	SiCl4 post valve opened
8/22/2012	11:34:11 AM	Bubbler valve opened
8/22/2012	11:34:11 AM	Helium MFC set to  0.000000
8/22/2012	11:34:11 AM	H2 MFC set to  450.000000
8/22/2012	11:34:11 AM	BCl3 MFC set to  1.200000
8/22/2012	11:34:11 AM	PH3 MFC set to  0.000000
8/22/2012	11:34:11 AM	SiCl4 MFC set to  50.000000
8/22/2012	11:34:11 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:34:11 AM	Tube furnace set to 1000
8/22/2012	11:49:11 AM	Helium valve closed
8/22/2012	11:49:11 AM	BCl3 valve closed
8/22/2012	11:49:11 AM	PH3 valve closed
8/22/2012	11:49:11 AM	SiCl4 pre valve closed
8/22/2012	11:49:11 AM	SiCl4 post valve closed
8/22/2012	11:49:11 AM	Main Vac valve closed
8/22/2012	11:49:11 AM	Bypass valve closed
8/22/2012	11:49:11 AM	H2 valve opened
8/22/2012	11:49:11 AM	Bubbler valve opened
8/22/2012	11:49:11 AM	Helium MFC set to  0.000000
8/22/2012	11:49:11 AM	H2 MFC set to  500.000000
8/22/2012	11:49:11 AM	BCl3 MFC set to  0.000000
8/22/2012	11:49:11 AM	PH3 MFC set to  0.000000
8/22/2012	11:49:11 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:49:11 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:49:12 AM	Tube furnace set to 750
8/22/2012	11:59:12 AM	H2 valve closed
8/22/2012	11:59:12 AM	BCl3 valve closed
8/22/2012	11:59:12 AM	PH3 valve closed
8/22/2012	11:59:12 AM	SiCl4 pre valve closed
8/22/2012	11:59:12 AM	SiCl4 post valve closed
8/22/2012	11:59:12 AM	Main Vac valve closed
8/22/2012	11:59:12 AM	Bypass valve closed
8/22/2012	11:59:12 AM	Helium valve opened
8/22/2012	11:59:12 AM	Bubbler valve opened
8/22/2012	11:59:12 AM	Helium MFC set to  400.000000
8/22/2012	11:59:12 AM	H2 MFC set to  0.000000
8/22/2012	11:59:12 AM	BCl3 MFC set to  0.000000
8/22/2012	11:59:12 AM	PH3 MFC set to  0.000000
8/22/2012	11:59:12 AM	SiCl4 MFC set to  0.000000
8/22/2012	11:59:12 AM	Bypass solenoid MFC set to  0.000000
8/22/2012	11:59:12 AM	Tube furnace set to 0
8/22/2012	12:08:38 PM	Run aborted at 12:08 PM
8/22/2012	12:08:38 PM	Helium valve closed
8/22/2012	12:08:38 PM	H2 valve closed
8/22/2012	12:08:38 PM	BCl3 valve closed
8/22/2012	12:08:38 PM	PH3 valve closed
8/22/2012	12:08:38 PM	SiCl4 pre valve closed
8/22/2012	12:08:38 PM	SiCl4 post valve closed
8/22/2012	12:08:38 PM	Bypass valve closed
8/22/2012	12:08:38 PM	Main Vac valve closed
8/22/2012	12:08:38 PM	Bubbler valve closed
8/22/2012	12:08:38 PM	Helium MFC set to  0.000000
8/22/2012	12:08:38 PM	H2 MFC set to  0.000000
8/22/2012	12:08:38 PM	BCl3 MFC set to  0.000000
8/22/2012	12:08:38 PM	PH3 MFC set to  0.000000
8/22/2012	12:08:38 PM	SiCl4 MFC set to  0.000000
8/22/2012	12:08:39 PM	Tube furnace set to 0
8/22/2012	12:08:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	12:08:41 PM	Recipe started at 12:08 PM
8/22/2012	12:08:41 PM	Helium valve closed
8/22/2012	12:08:41 PM	H2 valve closed
8/22/2012	12:08:41 PM	BCl3 valve closed
8/22/2012	12:08:41 PM	PH3 valve closed
8/22/2012	12:08:41 PM	SiCl4 pre valve closed
8/22/2012	12:08:41 PM	SiCl4 post valve closed
8/22/2012	12:08:41 PM	Main Vac valve closed
8/22/2012	12:08:41 PM	Bypass valve closed
8/22/2012	12:08:41 PM	Bubbler valve closed
8/22/2012	12:08:41 PM	Helium MFC set to  0.000000
8/22/2012	12:08:41 PM	H2 MFC set to  0.000000
8/22/2012	12:08:41 PM	BCl3 MFC set to  0.000000
8/22/2012	12:08:41 PM	PH3 MFC set to  0.000000
8/22/2012	12:08:41 PM	SiCl4 MFC set to  0.000000
8/22/2012	12:08:41 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:08:41 PM	Tube furnace set to 0
8/22/2012	12:08:44 PM	H2 valve closed
8/22/2012	12:08:44 PM	BCl3 valve closed
8/22/2012	12:08:44 PM	PH3 valve closed
8/22/2012	12:08:44 PM	SiCl4 pre valve closed
8/22/2012	12:08:44 PM	SiCl4 post valve closed
8/22/2012	12:08:44 PM	Main Vac valve closed
8/22/2012	12:08:44 PM	Bypass valve closed
8/22/2012	12:08:44 PM	Bubbler valve closed
8/22/2012	12:08:44 PM	Helium valve opened
8/22/2012	12:08:44 PM	Helium MFC set to  500.000000
8/22/2012	12:08:44 PM	H2 MFC set to  0.000000
8/22/2012	12:08:44 PM	BCl3 MFC set to  0.000000
8/22/2012	12:08:44 PM	PH3 MFC set to  0.000000
8/22/2012	12:08:44 PM	SiCl4 MFC set to  0.000000
8/22/2012	12:08:44 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:08:44 PM	Tube furnace set to 0
8/22/2012	12:08:45 PM	Helium valve closed
8/22/2012	12:08:45 PM	H2 valve closed
8/22/2012	12:08:45 PM	BCl3 valve closed
8/22/2012	12:08:45 PM	PH3 valve closed
8/22/2012	12:08:45 PM	SiCl4 pre valve closed
8/22/2012	12:08:45 PM	SiCl4 post valve closed
8/22/2012	12:08:45 PM	Main Vac valve closed
8/22/2012	12:08:45 PM	Bypass valve closed
8/22/2012	12:08:45 PM	Bubbler valve closed
8/22/2012	12:08:45 PM	Helium MFC set to  0.000000
8/22/2012	12:08:45 PM	H2 MFC set to  0.000000
8/22/2012	12:08:45 PM	BCl3 MFC set to  0.000000
8/22/2012	12:08:45 PM	PH3 MFC set to  0.000000
8/22/2012	12:08:45 PM	SiCl4 MFC set to  0.000000
8/22/2012	12:08:45 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:08:45 PM	Tube furnace set to 0
8/22/2012	12:08:46 PM	Run finished at 12:08 PM
8/22/2012	12:08:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	12:15:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	12:15:16 PM	Recipe started at 12:15 PM
8/22/2012	12:15:16 PM	Helium valve closed
8/22/2012	12:15:16 PM	H2 valve closed
8/22/2012	12:15:16 PM	BCl3 valve closed
8/22/2012	12:15:16 PM	PH3 valve closed
8/22/2012	12:15:16 PM	SiCl4 pre valve closed
8/22/2012	12:15:16 PM	SiCl4 post valve closed
8/22/2012	12:15:16 PM	Main Vac valve closed
8/22/2012	12:15:16 PM	Bubbler valve closed
8/22/2012	12:15:16 PM	Bypass valve opened
8/22/2012	12:15:16 PM	Helium MFC set to  0.000000
8/22/2012	12:15:16 PM	H2 MFC set to  0.000000
8/22/2012	12:15:16 PM	BCl3 MFC set to  0.000000
8/22/2012	12:15:16 PM	PH3 MFC set to  0.000000
8/22/2012	12:15:16 PM	SiCl4 MFC set to  0.000000
8/22/2012	12:15:16 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:15:16 PM	Tube furnace set to 0
8/22/2012	12:16:35 PM	Helium valve closed
8/22/2012	12:16:35 PM	H2 valve closed
8/22/2012	12:16:35 PM	BCl3 valve closed
8/22/2012	12:16:35 PM	PH3 valve closed
8/22/2012	12:16:35 PM	SiCl4 pre valve closed
8/22/2012	12:16:35 PM	SiCl4 post valve closed
8/22/2012	12:16:35 PM	Main Vac valve closed
8/22/2012	12:16:35 PM	Bubbler valve closed
8/22/2012	12:16:35 PM	Bypass valve opened
8/22/2012	12:16:35 PM	Helium MFC set to  0.000000
8/22/2012	12:16:35 PM	H2 MFC set to  0.000000
8/22/2012	12:16:35 PM	BCl3 MFC set to  0.000000
8/22/2012	12:16:35 PM	PH3 MFC set to  0.000000
8/22/2012	12:16:35 PM	SiCl4 MFC set to  0.000000
8/22/2012	12:16:35 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:16:35 PM	Tube furnace set to 0
8/22/2012	12:17:35 PM	Helium valve closed
8/22/2012	12:17:35 PM	H2 valve closed
8/22/2012	12:17:35 PM	BCl3 valve closed
8/22/2012	12:17:35 PM	PH3 valve closed
8/22/2012	12:17:35 PM	SiCl4 pre valve closed
8/22/2012	12:17:36 PM	SiCl4 post valve closed
8/22/2012	12:17:36 PM	Bypass valve closed
8/22/2012	12:17:36 PM	Bubbler valve closed
8/22/2012	12:17:36 PM	Main Vac valve opened
8/22/2012	12:17:36 PM	Helium MFC set to  0.000000
8/22/2012	12:17:36 PM	H2 MFC set to  0.000000
8/22/2012	12:17:36 PM	BCl3 MFC set to  0.000000
8/22/2012	12:17:36 PM	PH3 MFC set to  0.000000
8/22/2012	12:17:36 PM	SiCl4 MFC set to  0.000000
8/22/2012	12:17:36 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	12:17:36 PM	Tube furnace set to 0
8/22/2012	12:17:37 PM	Run finished at 12:17 PM
8/22/2012	12:17:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	1:20:28 PM	Recipe started at 1:20 PM
8/22/2012	1:20:28 PM	Helium valve closed
8/22/2012	1:20:28 PM	H2 valve closed
8/22/2012	1:20:28 PM	BCl3 valve closed
8/22/2012	1:20:28 PM	PH3 valve closed
8/22/2012	1:20:28 PM	SiCl4 pre valve closed
8/22/2012	1:20:28 PM	SiCl4 post valve closed
8/22/2012	1:20:28 PM	Main Vac valve closed
8/22/2012	1:20:28 PM	Bubbler valve closed
8/22/2012	1:20:28 PM	Bypass valve opened
8/22/2012	1:20:28 PM	Helium MFC set to  0.000000
8/22/2012	1:20:28 PM	H2 MFC set to  0.000000
8/22/2012	1:20:28 PM	BCl3 MFC set to  0.000000
8/22/2012	1:20:28 PM	PH3 MFC set to  0.000000
8/22/2012	1:20:28 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:20:28 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:20:29 PM	Tube furnace set to 150
8/22/2012	1:20:29 PM	Helium valve closed
8/22/2012	1:20:29 PM	H2 valve closed
8/22/2012	1:20:29 PM	BCl3 valve closed
8/22/2012	1:20:29 PM	PH3 valve closed
8/22/2012	1:20:29 PM	SiCl4 pre valve closed
8/22/2012	1:20:29 PM	SiCl4 post valve closed
8/22/2012	1:20:29 PM	Main Vac valve closed
8/22/2012	1:20:29 PM	Bubbler valve closed
8/22/2012	1:20:29 PM	Bypass valve opened
8/22/2012	1:20:29 PM	Helium MFC set to  0.000000
8/22/2012	1:20:29 PM	H2 MFC set to  0.000000
8/22/2012	1:20:29 PM	BCl3 MFC set to  0.000000
8/22/2012	1:20:29 PM	PH3 MFC set to  0.000000
8/22/2012	1:20:29 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:20:29 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:20:29 PM	Tube furnace set to 150
8/22/2012	1:20:29 PM	Helium valve closed
8/22/2012	1:20:29 PM	H2 valve closed
8/22/2012	1:20:29 PM	BCl3 valve closed
8/22/2012	1:20:29 PM	PH3 valve closed
8/22/2012	1:20:29 PM	SiCl4 pre valve closed
8/22/2012	1:20:29 PM	SiCl4 post valve closed
8/22/2012	1:20:29 PM	Bypass valve closed
8/22/2012	1:20:29 PM	Bubbler valve closed
8/22/2012	1:20:29 PM	Main Vac valve opened
8/22/2012	1:20:29 PM	Helium MFC set to  0.000000
8/22/2012	1:20:29 PM	H2 MFC set to  0.000000
8/22/2012	1:20:29 PM	BCl3 MFC set to  0.000000
8/22/2012	1:20:29 PM	PH3 MFC set to  0.000000
8/22/2012	1:20:29 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:20:29 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:20:30 PM	Tube furnace set to 150
8/22/2012	1:20:30 PM	H2 valve closed
8/22/2012	1:20:30 PM	BCl3 valve closed
8/22/2012	1:20:30 PM	PH3 valve closed
8/22/2012	1:20:30 PM	SiCl4 pre valve closed
8/22/2012	1:20:30 PM	SiCl4 post valve closed
8/22/2012	1:20:30 PM	Bypass valve closed
8/22/2012	1:20:30 PM	Bubbler valve closed
8/22/2012	1:20:30 PM	Helium valve opened
8/22/2012	1:20:30 PM	Main Vac valve opened
8/22/2012	1:20:30 PM	Helium MFC set to  20.000000
8/22/2012	1:20:30 PM	H2 MFC set to  0.000000
8/22/2012	1:20:30 PM	BCl3 MFC set to  0.000000
8/22/2012	1:20:30 PM	PH3 MFC set to  0.000000
8/22/2012	1:20:30 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:20:30 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:20:30 PM	Tube furnace set to 150
8/22/2012	1:21:00 PM	Helium valve closed
8/22/2012	1:21:00 PM	H2 valve closed
8/22/2012	1:21:00 PM	BCl3 valve closed
8/22/2012	1:21:00 PM	PH3 valve closed
8/22/2012	1:21:00 PM	SiCl4 pre valve closed
8/22/2012	1:21:00 PM	SiCl4 post valve closed
8/22/2012	1:21:00 PM	Bypass valve closed
8/22/2012	1:21:00 PM	Bubbler valve closed
8/22/2012	1:21:00 PM	Main Vac valve opened
8/22/2012	1:21:00 PM	Helium MFC set to  0.000000
8/22/2012	1:21:00 PM	H2 MFC set to  0.000000
8/22/2012	1:21:00 PM	BCl3 MFC set to  0.000000
8/22/2012	1:21:00 PM	PH3 MFC set to  0.000000
8/22/2012	1:21:00 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:21:00 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:21:00 PM	Tube furnace set to 150
8/22/2012	1:21:30 PM	H2 valve closed
8/22/2012	1:21:30 PM	BCl3 valve closed
8/22/2012	1:21:30 PM	PH3 valve closed
8/22/2012	1:21:30 PM	SiCl4 pre valve closed
8/22/2012	1:21:30 PM	SiCl4 post valve closed
8/22/2012	1:21:30 PM	Bypass valve closed
8/22/2012	1:21:30 PM	Bubbler valve closed
8/22/2012	1:21:30 PM	Helium valve opened
8/22/2012	1:21:30 PM	Main Vac valve opened
8/22/2012	1:21:30 PM	Helium MFC set to  20.000000
8/22/2012	1:21:30 PM	H2 MFC set to  0.000000
8/22/2012	1:21:30 PM	BCl3 MFC set to  0.000000
8/22/2012	1:21:30 PM	PH3 MFC set to  0.000000
8/22/2012	1:21:30 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:21:30 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:21:31 PM	Tube furnace set to 150
8/22/2012	1:22:01 PM	Helium valve closed
8/22/2012	1:22:01 PM	H2 valve closed
8/22/2012	1:22:01 PM	BCl3 valve closed
8/22/2012	1:22:01 PM	PH3 valve closed
8/22/2012	1:22:01 PM	SiCl4 pre valve closed
8/22/2012	1:22:01 PM	SiCl4 post valve closed
8/22/2012	1:22:01 PM	Bypass valve closed
8/22/2012	1:22:01 PM	Bubbler valve closed
8/22/2012	1:22:01 PM	Main Vac valve opened
8/22/2012	1:22:01 PM	Helium MFC set to  0.000000
8/22/2012	1:22:01 PM	H2 MFC set to  0.000000
8/22/2012	1:22:01 PM	BCl3 MFC set to  0.000000
8/22/2012	1:22:01 PM	PH3 MFC set to  0.000000
8/22/2012	1:22:01 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:22:01 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:22:01 PM	Tube furnace set to 150
8/22/2012	1:22:31 PM	H2 valve closed
8/22/2012	1:22:31 PM	BCl3 valve closed
8/22/2012	1:22:31 PM	PH3 valve closed
8/22/2012	1:22:31 PM	SiCl4 pre valve closed
8/22/2012	1:22:31 PM	SiCl4 post valve closed
8/22/2012	1:22:31 PM	Bypass valve closed
8/22/2012	1:22:31 PM	Bubbler valve closed
8/22/2012	1:22:31 PM	Helium valve opened
8/22/2012	1:22:31 PM	Main Vac valve opened
8/22/2012	1:22:31 PM	Helium MFC set to  20.000000
8/22/2012	1:22:31 PM	H2 MFC set to  0.000000
8/22/2012	1:22:31 PM	BCl3 MFC set to  0.000000
8/22/2012	1:22:31 PM	PH3 MFC set to  0.000000
8/22/2012	1:22:31 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:22:31 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:22:31 PM	Tube furnace set to 150
8/22/2012	1:23:01 PM	Helium valve closed
8/22/2012	1:23:01 PM	H2 valve closed
8/22/2012	1:23:01 PM	BCl3 valve closed
8/22/2012	1:23:01 PM	PH3 valve closed
8/22/2012	1:23:01 PM	SiCl4 pre valve closed
8/22/2012	1:23:01 PM	SiCl4 post valve closed
8/22/2012	1:23:01 PM	Bypass valve closed
8/22/2012	1:23:01 PM	Bubbler valve closed
8/22/2012	1:23:01 PM	Main Vac valve opened
8/22/2012	1:23:01 PM	Helium MFC set to  0.000000
8/22/2012	1:23:01 PM	H2 MFC set to  0.000000
8/22/2012	1:23:01 PM	BCl3 MFC set to  0.000000
8/22/2012	1:23:01 PM	PH3 MFC set to  0.000000
8/22/2012	1:23:01 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:23:01 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:23:01 PM	Tube furnace set to 150
8/22/2012	1:23:31 PM	H2 valve closed
8/22/2012	1:23:31 PM	BCl3 valve closed
8/22/2012	1:23:31 PM	PH3 valve closed
8/22/2012	1:23:31 PM	SiCl4 pre valve closed
8/22/2012	1:23:31 PM	SiCl4 post valve closed
8/22/2012	1:23:31 PM	Bypass valve closed
8/22/2012	1:23:31 PM	Bubbler valve closed
8/22/2012	1:23:31 PM	Helium valve opened
8/22/2012	1:23:31 PM	Main Vac valve opened
8/22/2012	1:23:31 PM	Helium MFC set to  20.000000
8/22/2012	1:23:31 PM	H2 MFC set to  0.000000
8/22/2012	1:23:31 PM	BCl3 MFC set to  0.000000
8/22/2012	1:23:31 PM	PH3 MFC set to  0.000000
8/22/2012	1:23:31 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:23:31 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:23:32 PM	Tube furnace set to 150
8/22/2012	1:24:02 PM	Helium valve closed
8/22/2012	1:24:02 PM	H2 valve closed
8/22/2012	1:24:02 PM	BCl3 valve closed
8/22/2012	1:24:02 PM	PH3 valve closed
8/22/2012	1:24:02 PM	SiCl4 pre valve closed
8/22/2012	1:24:02 PM	SiCl4 post valve closed
8/22/2012	1:24:02 PM	Bypass valve closed
8/22/2012	1:24:02 PM	Bubbler valve closed
8/22/2012	1:24:02 PM	Main Vac valve opened
8/22/2012	1:24:02 PM	Helium MFC set to  0.000000
8/22/2012	1:24:02 PM	H2 MFC set to  0.000000
8/22/2012	1:24:02 PM	BCl3 MFC set to  0.000000
8/22/2012	1:24:02 PM	PH3 MFC set to  0.000000
8/22/2012	1:24:02 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:24:02 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:24:02 PM	Tube furnace set to 150
8/22/2012	1:24:32 PM	H2 valve closed
8/22/2012	1:24:32 PM	BCl3 valve closed
8/22/2012	1:24:32 PM	PH3 valve closed
8/22/2012	1:24:32 PM	SiCl4 pre valve closed
8/22/2012	1:24:32 PM	SiCl4 post valve closed
8/22/2012	1:24:32 PM	Bypass valve closed
8/22/2012	1:24:32 PM	Bubbler valve closed
8/22/2012	1:24:32 PM	Helium valve opened
8/22/2012	1:24:32 PM	Main Vac valve opened
8/22/2012	1:24:32 PM	Helium MFC set to  20.000000
8/22/2012	1:24:32 PM	H2 MFC set to  0.000000
8/22/2012	1:24:32 PM	BCl3 MFC set to  0.000000
8/22/2012	1:24:32 PM	PH3 MFC set to  0.000000
8/22/2012	1:24:32 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:24:32 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:24:32 PM	Tube furnace set to 150
8/22/2012	1:25:02 PM	Helium valve closed
8/22/2012	1:25:02 PM	H2 valve closed
8/22/2012	1:25:02 PM	BCl3 valve closed
8/22/2012	1:25:02 PM	PH3 valve closed
8/22/2012	1:25:02 PM	SiCl4 pre valve closed
8/22/2012	1:25:02 PM	SiCl4 post valve closed
8/22/2012	1:25:02 PM	Bypass valve closed
8/22/2012	1:25:02 PM	Bubbler valve closed
8/22/2012	1:25:02 PM	Main Vac valve opened
8/22/2012	1:25:02 PM	Helium MFC set to  0.000000
8/22/2012	1:25:02 PM	H2 MFC set to  0.000000
8/22/2012	1:25:02 PM	BCl3 MFC set to  0.000000
8/22/2012	1:25:02 PM	PH3 MFC set to  0.000000
8/22/2012	1:25:02 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:25:02 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:25:02 PM	Tube furnace set to 150
8/22/2012	1:25:32 PM	H2 valve closed
8/22/2012	1:25:32 PM	BCl3 valve closed
8/22/2012	1:25:32 PM	PH3 valve closed
8/22/2012	1:25:32 PM	SiCl4 pre valve closed
8/22/2012	1:25:32 PM	SiCl4 post valve closed
8/22/2012	1:25:32 PM	Bypass valve closed
8/22/2012	1:25:32 PM	Bubbler valve closed
8/22/2012	1:25:32 PM	Helium valve opened
8/22/2012	1:25:32 PM	Main Vac valve opened
8/22/2012	1:25:32 PM	Helium MFC set to  20.000000
8/22/2012	1:25:32 PM	H2 MFC set to  0.000000
8/22/2012	1:25:32 PM	BCl3 MFC set to  0.000000
8/22/2012	1:25:32 PM	PH3 MFC set to  0.000000
8/22/2012	1:25:32 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:25:32 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:25:33 PM	Tube furnace set to 150
8/22/2012	1:26:03 PM	Helium valve closed
8/22/2012	1:26:03 PM	H2 valve closed
8/22/2012	1:26:03 PM	BCl3 valve closed
8/22/2012	1:26:03 PM	PH3 valve closed
8/22/2012	1:26:03 PM	SiCl4 pre valve closed
8/22/2012	1:26:03 PM	SiCl4 post valve closed
8/22/2012	1:26:03 PM	Bypass valve closed
8/22/2012	1:26:03 PM	Bubbler valve closed
8/22/2012	1:26:03 PM	Main Vac valve opened
8/22/2012	1:26:03 PM	Helium MFC set to  0.000000
8/22/2012	1:26:03 PM	H2 MFC set to  0.000000
8/22/2012	1:26:03 PM	BCl3 MFC set to  0.000000
8/22/2012	1:26:03 PM	PH3 MFC set to  0.000000
8/22/2012	1:26:03 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:26:03 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:26:03 PM	Tube furnace set to 150
8/22/2012	1:26:33 PM	H2 valve closed
8/22/2012	1:26:33 PM	BCl3 valve closed
8/22/2012	1:26:33 PM	PH3 valve closed
8/22/2012	1:26:33 PM	SiCl4 pre valve closed
8/22/2012	1:26:33 PM	SiCl4 post valve closed
8/22/2012	1:26:33 PM	Bypass valve closed
8/22/2012	1:26:33 PM	Bubbler valve closed
8/22/2012	1:26:33 PM	Helium valve opened
8/22/2012	1:26:33 PM	Main Vac valve opened
8/22/2012	1:26:33 PM	Helium MFC set to  20.000000
8/22/2012	1:26:33 PM	H2 MFC set to  0.000000
8/22/2012	1:26:33 PM	BCl3 MFC set to  0.000000
8/22/2012	1:26:33 PM	PH3 MFC set to  0.000000
8/22/2012	1:26:33 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:26:33 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:26:33 PM	Tube furnace set to 150
8/22/2012	1:27:03 PM	Helium valve closed
8/22/2012	1:27:03 PM	H2 valve closed
8/22/2012	1:27:03 PM	BCl3 valve closed
8/22/2012	1:27:03 PM	PH3 valve closed
8/22/2012	1:27:03 PM	SiCl4 pre valve closed
8/22/2012	1:27:03 PM	SiCl4 post valve closed
8/22/2012	1:27:03 PM	Bypass valve closed
8/22/2012	1:27:03 PM	Bubbler valve closed
8/22/2012	1:27:03 PM	Main Vac valve opened
8/22/2012	1:27:03 PM	Helium MFC set to  0.000000
8/22/2012	1:27:03 PM	H2 MFC set to  0.000000
8/22/2012	1:27:03 PM	BCl3 MFC set to  0.000000
8/22/2012	1:27:03 PM	PH3 MFC set to  0.000000
8/22/2012	1:27:03 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:27:03 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:27:03 PM	Tube furnace set to 150
8/22/2012	1:27:33 PM	H2 valve closed
8/22/2012	1:27:33 PM	BCl3 valve closed
8/22/2012	1:27:33 PM	PH3 valve closed
8/22/2012	1:27:33 PM	SiCl4 pre valve closed
8/22/2012	1:27:33 PM	SiCl4 post valve closed
8/22/2012	1:27:33 PM	Bypass valve closed
8/22/2012	1:27:33 PM	Bubbler valve closed
8/22/2012	1:27:33 PM	Helium valve opened
8/22/2012	1:27:33 PM	Main Vac valve opened
8/22/2012	1:27:33 PM	Helium MFC set to  20.000000
8/22/2012	1:27:33 PM	H2 MFC set to  0.000000
8/22/2012	1:27:33 PM	BCl3 MFC set to  0.000000
8/22/2012	1:27:33 PM	PH3 MFC set to  0.000000
8/22/2012	1:27:33 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:27:33 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:27:34 PM	Tube furnace set to 150
8/22/2012	1:28:04 PM	Helium valve closed
8/22/2012	1:28:04 PM	H2 valve closed
8/22/2012	1:28:04 PM	BCl3 valve closed
8/22/2012	1:28:04 PM	PH3 valve closed
8/22/2012	1:28:04 PM	SiCl4 pre valve closed
8/22/2012	1:28:04 PM	SiCl4 post valve closed
8/22/2012	1:28:04 PM	Bypass valve closed
8/22/2012	1:28:04 PM	Bubbler valve closed
8/22/2012	1:28:04 PM	Main Vac valve opened
8/22/2012	1:28:04 PM	Helium MFC set to  0.000000
8/22/2012	1:28:04 PM	H2 MFC set to  0.000000
8/22/2012	1:28:04 PM	BCl3 MFC set to  0.000000
8/22/2012	1:28:04 PM	PH3 MFC set to  0.000000
8/22/2012	1:28:04 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:28:04 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:28:04 PM	Tube furnace set to 150
8/22/2012	1:28:34 PM	H2 valve closed
8/22/2012	1:28:34 PM	BCl3 valve closed
8/22/2012	1:28:34 PM	PH3 valve closed
8/22/2012	1:28:34 PM	SiCl4 pre valve closed
8/22/2012	1:28:34 PM	SiCl4 post valve closed
8/22/2012	1:28:34 PM	Bypass valve closed
8/22/2012	1:28:34 PM	Bubbler valve closed
8/22/2012	1:28:34 PM	Helium valve opened
8/22/2012	1:28:34 PM	Main Vac valve opened
8/22/2012	1:28:34 PM	Helium MFC set to  20.000000
8/22/2012	1:28:34 PM	H2 MFC set to  0.000000
8/22/2012	1:28:34 PM	BCl3 MFC set to  0.000000
8/22/2012	1:28:34 PM	PH3 MFC set to  0.000000
8/22/2012	1:28:34 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:28:34 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:28:34 PM	Tube furnace set to 150
8/22/2012	1:29:04 PM	Helium valve closed
8/22/2012	1:29:04 PM	H2 valve closed
8/22/2012	1:29:04 PM	BCl3 valve closed
8/22/2012	1:29:04 PM	PH3 valve closed
8/22/2012	1:29:04 PM	SiCl4 pre valve closed
8/22/2012	1:29:04 PM	SiCl4 post valve closed
8/22/2012	1:29:04 PM	Bypass valve closed
8/22/2012	1:29:04 PM	Bubbler valve closed
8/22/2012	1:29:04 PM	Main Vac valve opened
8/22/2012	1:29:04 PM	Helium MFC set to  0.000000
8/22/2012	1:29:04 PM	H2 MFC set to  0.000000
8/22/2012	1:29:04 PM	BCl3 MFC set to  0.000000
8/22/2012	1:29:04 PM	PH3 MFC set to  0.000000
8/22/2012	1:29:04 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:29:04 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:29:04 PM	Tube furnace set to 150
8/22/2012	1:29:34 PM	H2 valve closed
8/22/2012	1:29:34 PM	BCl3 valve closed
8/22/2012	1:29:34 PM	PH3 valve closed
8/22/2012	1:29:34 PM	SiCl4 pre valve closed
8/22/2012	1:29:34 PM	SiCl4 post valve closed
8/22/2012	1:29:34 PM	Bypass valve closed
8/22/2012	1:29:34 PM	Bubbler valve closed
8/22/2012	1:29:34 PM	Helium valve opened
8/22/2012	1:29:34 PM	Main Vac valve opened
8/22/2012	1:29:34 PM	Helium MFC set to  20.000000
8/22/2012	1:29:34 PM	H2 MFC set to  0.000000
8/22/2012	1:29:34 PM	BCl3 MFC set to  0.000000
8/22/2012	1:29:34 PM	PH3 MFC set to  0.000000
8/22/2012	1:29:34 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:29:34 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:29:34 PM	Tube furnace set to 150
8/22/2012	1:30:05 PM	Helium valve closed
8/22/2012	1:30:05 PM	H2 valve closed
8/22/2012	1:30:05 PM	BCl3 valve closed
8/22/2012	1:30:05 PM	PH3 valve closed
8/22/2012	1:30:05 PM	SiCl4 pre valve closed
8/22/2012	1:30:05 PM	SiCl4 post valve closed
8/22/2012	1:30:05 PM	Bypass valve closed
8/22/2012	1:30:05 PM	Bubbler valve closed
8/22/2012	1:30:05 PM	Main Vac valve opened
8/22/2012	1:30:05 PM	Helium MFC set to  0.000000
8/22/2012	1:30:05 PM	H2 MFC set to  0.000000
8/22/2012	1:30:05 PM	BCl3 MFC set to  0.000000
8/22/2012	1:30:05 PM	PH3 MFC set to  0.000000
8/22/2012	1:30:05 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:30:05 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:30:05 PM	Tube furnace set to 150
8/22/2012	1:30:06 PM	Run finished at 1:30 PM
8/22/2012	1:37:38 PM	Main Vac valve closed
8/22/2012	1:37:51 PM	Main Vac valve opened
8/22/2012	1:38:56 PM	Recipe started at 1:38 PM
8/22/2012	1:38:56 PM	Helium valve closed
8/22/2012	1:38:56 PM	H2 valve closed
8/22/2012	1:38:56 PM	BCl3 valve closed
8/22/2012	1:38:56 PM	PH3 valve closed
8/22/2012	1:38:56 PM	SiCl4 pre valve closed
8/22/2012	1:38:56 PM	SiCl4 post valve closed
8/22/2012	1:38:56 PM	Main Vac valve closed
8/22/2012	1:38:56 PM	Bypass valve closed
8/22/2012	1:38:56 PM	Bubbler valve closed
8/22/2012	1:38:56 PM	Helium MFC set to  0.000000
8/22/2012	1:38:56 PM	H2 MFC set to  0.000000
8/22/2012	1:38:56 PM	BCl3 MFC set to  0.000000
8/22/2012	1:38:56 PM	PH3 MFC set to  0.000000
8/22/2012	1:38:56 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:38:56 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:38:56 PM	Tube furnace set to 0
8/22/2012	1:38:59 PM	Helium valve closed
8/22/2012	1:38:59 PM	BCl3 valve closed
8/22/2012	1:38:59 PM	PH3 valve closed
8/22/2012	1:38:59 PM	SiCl4 pre valve closed
8/22/2012	1:38:59 PM	SiCl4 post valve closed
8/22/2012	1:38:59 PM	Main Vac valve closed
8/22/2012	1:38:59 PM	Bypass valve closed
8/22/2012	1:38:59 PM	Bubbler valve closed
8/22/2012	1:38:59 PM	H2 valve opened
8/22/2012	1:38:59 PM	Helium MFC set to  0.000000
8/22/2012	1:38:59 PM	H2 MFC set to  500.000000
8/22/2012	1:38:59 PM	BCl3 MFC set to  0.000000
8/22/2012	1:38:59 PM	PH3 MFC set to  0.000000
8/22/2012	1:38:59 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:38:59 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:38:59 PM	Tube furnace set to 50
8/22/2012	1:40:12 PM	Helium valve closed
8/22/2012	1:40:12 PM	BCl3 valve closed
8/22/2012	1:40:12 PM	PH3 valve closed
8/22/2012	1:40:12 PM	SiCl4 pre valve closed
8/22/2012	1:40:12 PM	SiCl4 post valve closed
8/22/2012	1:40:12 PM	Main Vac valve closed
8/22/2012	1:40:12 PM	Bypass valve closed
8/22/2012	1:40:12 PM	H2 valve opened
8/22/2012	1:40:12 PM	Bubbler valve opened
8/22/2012	1:40:12 PM	Helium MFC set to  0.000000
8/22/2012	1:40:12 PM	H2 MFC set to  500.000000
8/22/2012	1:40:12 PM	BCl3 MFC set to  0.000000
8/22/2012	1:40:12 PM	PH3 MFC set to  0.000000
8/22/2012	1:40:12 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:40:12 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:40:12 PM	Tube furnace set to 50
8/22/2012	1:40:13 PM	Helium valve closed
8/22/2012	1:40:13 PM	BCl3 valve closed
8/22/2012	1:40:13 PM	PH3 valve closed
8/22/2012	1:40:13 PM	SiCl4 pre valve closed
8/22/2012	1:40:13 PM	SiCl4 post valve closed
8/22/2012	1:40:13 PM	Main Vac valve closed
8/22/2012	1:40:13 PM	Bypass valve closed
8/22/2012	1:40:13 PM	H2 valve opened
8/22/2012	1:40:13 PM	Bubbler valve opened
8/22/2012	1:40:13 PM	Helium MFC set to  0.000000
8/22/2012	1:40:13 PM	H2 MFC set to  450.000000
8/22/2012	1:40:13 PM	BCl3 MFC set to  0.000000
8/22/2012	1:40:13 PM	PH3 MFC set to  0.000000
8/22/2012	1:40:13 PM	SiCl4 MFC set to  0.000000
8/22/2012	1:40:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	1:40:13 PM	Tube furnace set to 1000
8/22/2012	2:00:13 PM	Helium valve closed
8/22/2012	2:00:13 PM	PH3 valve closed
8/22/2012	2:00:13 PM	Main Vac valve closed
8/22/2012	2:00:13 PM	Bypass valve closed
8/22/2012	2:00:13 PM	H2 valve opened
8/22/2012	2:00:13 PM	BCl3 valve opened
8/22/2012	2:00:13 PM	SiCl4 pre valve opened
8/22/2012	2:00:13 PM	SiCl4 post valve opened
8/22/2012	2:00:13 PM	Bubbler valve opened
8/22/2012	2:00:13 PM	Helium MFC set to  0.000000
8/22/2012	2:00:13 PM	H2 MFC set to  450.000000
8/22/2012	2:00:13 PM	BCl3 MFC set to  1.200000
8/22/2012	2:00:13 PM	PH3 MFC set to  0.000000
8/22/2012	2:00:13 PM	SiCl4 MFC set to  50.000000
8/22/2012	2:00:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:00:13 PM	Tube furnace set to 1000
8/22/2012	2:15:13 PM	Helium valve closed
8/22/2012	2:15:13 PM	BCl3 valve closed
8/22/2012	2:15:13 PM	PH3 valve closed
8/22/2012	2:15:13 PM	SiCl4 pre valve closed
8/22/2012	2:15:13 PM	SiCl4 post valve closed
8/22/2012	2:15:13 PM	Main Vac valve closed
8/22/2012	2:15:13 PM	Bypass valve closed
8/22/2012	2:15:13 PM	H2 valve opened
8/22/2012	2:15:13 PM	Bubbler valve opened
8/22/2012	2:15:13 PM	Helium MFC set to  0.000000
8/22/2012	2:15:13 PM	H2 MFC set to  500.000000
8/22/2012	2:15:13 PM	BCl3 MFC set to  0.000000
8/22/2012	2:15:13 PM	PH3 MFC set to  0.000000
8/22/2012	2:15:13 PM	SiCl4 MFC set to  0.000000
8/22/2012	2:15:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:15:14 PM	Tube furnace set to 750
8/22/2012	2:25:14 PM	H2 valve closed
8/22/2012	2:25:14 PM	BCl3 valve closed
8/22/2012	2:25:14 PM	PH3 valve closed
8/22/2012	2:25:14 PM	SiCl4 pre valve closed
8/22/2012	2:25:14 PM	SiCl4 post valve closed
8/22/2012	2:25:14 PM	Main Vac valve closed
8/22/2012	2:25:14 PM	Bypass valve closed
8/22/2012	2:25:14 PM	Helium valve opened
8/22/2012	2:25:14 PM	Bubbler valve opened
8/22/2012	2:25:14 PM	Helium MFC set to  400.000000
8/22/2012	2:25:14 PM	H2 MFC set to  0.000000
8/22/2012	2:25:14 PM	BCl3 MFC set to  0.000000
8/22/2012	2:25:14 PM	PH3 MFC set to  0.000000
8/22/2012	2:25:14 PM	SiCl4 MFC set to  0.000000
8/22/2012	2:25:14 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:25:14 PM	Tube furnace set to 0
8/22/2012	2:40:25 PM	Run aborted at 2:40 PM
8/22/2012	2:40:25 PM	Helium valve closed
8/22/2012	2:40:25 PM	H2 valve closed
8/22/2012	2:40:25 PM	BCl3 valve closed
8/22/2012	2:40:25 PM	PH3 valve closed
8/22/2012	2:40:25 PM	SiCl4 pre valve closed
8/22/2012	2:40:25 PM	SiCl4 post valve closed
8/22/2012	2:40:25 PM	Bypass valve closed
8/22/2012	2:40:25 PM	Main Vac valve closed
8/22/2012	2:40:25 PM	Bubbler valve closed
8/22/2012	2:40:25 PM	Helium MFC set to  0.000000
8/22/2012	2:40:25 PM	H2 MFC set to  0.000000
8/22/2012	2:40:25 PM	BCl3 MFC set to  0.000000
8/22/2012	2:40:25 PM	PH3 MFC set to  0.000000
8/22/2012	2:40:25 PM	SiCl4 MFC set to  0.000000
8/22/2012	2:40:25 PM	Tube furnace set to 0
8/22/2012	2:40:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	2:40:27 PM	Recipe started at 2:40 PM
8/22/2012	2:40:27 PM	Helium valve closed
8/22/2012	2:40:27 PM	H2 valve closed
8/22/2012	2:40:27 PM	BCl3 valve closed
8/22/2012	2:40:27 PM	PH3 valve closed
8/22/2012	2:40:27 PM	SiCl4 pre valve closed
8/22/2012	2:40:27 PM	SiCl4 post valve closed
8/22/2012	2:40:27 PM	Main Vac valve closed
8/22/2012	2:40:27 PM	Bypass valve closed
8/22/2012	2:40:27 PM	Bubbler valve closed
8/22/2012	2:40:27 PM	Helium MFC set to  0.000000
8/22/2012	2:40:27 PM	H2 MFC set to  0.000000
8/22/2012	2:40:27 PM	BCl3 MFC set to  0.000000
8/22/2012	2:40:27 PM	PH3 MFC set to  0.000000
8/22/2012	2:40:27 PM	SiCl4 MFC set to  0.000000
8/22/2012	2:40:27 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:40:28 PM	Tube furnace set to 0
8/22/2012	2:40:31 PM	H2 valve closed
8/22/2012	2:40:31 PM	BCl3 valve closed
8/22/2012	2:40:31 PM	PH3 valve closed
8/22/2012	2:40:31 PM	SiCl4 pre valve closed
8/22/2012	2:40:31 PM	SiCl4 post valve closed
8/22/2012	2:40:31 PM	Main Vac valve closed
8/22/2012	2:40:31 PM	Bypass valve closed
8/22/2012	2:40:31 PM	Bubbler valve closed
8/22/2012	2:40:31 PM	Helium valve opened
8/22/2012	2:40:31 PM	Helium MFC set to  500.000000
8/22/2012	2:40:31 PM	H2 MFC set to  0.000000
8/22/2012	2:40:31 PM	BCl3 MFC set to  0.000000
8/22/2012	2:40:31 PM	PH3 MFC set to  0.000000
8/22/2012	2:40:31 PM	SiCl4 MFC set to  0.000000
8/22/2012	2:40:31 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:40:31 PM	Tube furnace set to 0
8/22/2012	2:40:31 PM	Helium valve closed
8/22/2012	2:40:31 PM	H2 valve closed
8/22/2012	2:40:31 PM	BCl3 valve closed
8/22/2012	2:40:31 PM	PH3 valve closed
8/22/2012	2:40:31 PM	SiCl4 pre valve closed
8/22/2012	2:40:31 PM	SiCl4 post valve closed
8/22/2012	2:40:31 PM	Main Vac valve closed
8/22/2012	2:40:31 PM	Bypass valve closed
8/22/2012	2:40:31 PM	Bubbler valve closed
8/22/2012	2:40:31 PM	Helium MFC set to  0.000000
8/22/2012	2:40:31 PM	H2 MFC set to  0.000000
8/22/2012	2:40:31 PM	BCl3 MFC set to  0.000000
8/22/2012	2:40:31 PM	PH3 MFC set to  0.000000
8/22/2012	2:40:31 PM	SiCl4 MFC set to  0.000000
8/22/2012	2:40:31 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:40:31 PM	Tube furnace set to 0
8/22/2012	2:40:32 PM	Run finished at 2:40 PM
8/22/2012	2:40:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	2:47:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	2:47:17 PM	Recipe started at 2:47 PM
8/22/2012	2:47:17 PM	Helium valve closed
8/22/2012	2:47:17 PM	H2 valve closed
8/22/2012	2:47:17 PM	BCl3 valve closed
8/22/2012	2:47:17 PM	PH3 valve closed
8/22/2012	2:47:17 PM	SiCl4 pre valve closed
8/22/2012	2:47:17 PM	SiCl4 post valve closed
8/22/2012	2:47:17 PM	Main Vac valve closed
8/22/2012	2:47:17 PM	Bubbler valve closed
8/22/2012	2:47:17 PM	Bypass valve opened
8/22/2012	2:47:17 PM	Helium MFC set to  0.000000
8/22/2012	2:47:17 PM	H2 MFC set to  0.000000
8/22/2012	2:47:17 PM	BCl3 MFC set to  0.000000
8/22/2012	2:47:17 PM	PH3 MFC set to  0.000000
8/22/2012	2:47:17 PM	SiCl4 MFC set to  0.000000
8/22/2012	2:47:17 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:47:17 PM	Tube furnace set to 0
8/22/2012	2:48:39 PM	Helium valve closed
8/22/2012	2:48:39 PM	H2 valve closed
8/22/2012	2:48:39 PM	BCl3 valve closed
8/22/2012	2:48:39 PM	PH3 valve closed
8/22/2012	2:48:39 PM	SiCl4 pre valve closed
8/22/2012	2:48:39 PM	SiCl4 post valve closed
8/22/2012	2:48:39 PM	Main Vac valve closed
8/22/2012	2:48:39 PM	Bubbler valve closed
8/22/2012	2:48:39 PM	Bypass valve opened
8/22/2012	2:48:39 PM	Helium MFC set to  0.000000
8/22/2012	2:48:39 PM	H2 MFC set to  0.000000
8/22/2012	2:48:39 PM	BCl3 MFC set to  0.000000
8/22/2012	2:48:39 PM	PH3 MFC set to  0.000000
8/22/2012	2:48:39 PM	SiCl4 MFC set to  0.000000
8/22/2012	2:48:39 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:48:39 PM	Tube furnace set to 0
8/22/2012	2:49:39 PM	Helium valve closed
8/22/2012	2:49:39 PM	H2 valve closed
8/22/2012	2:49:39 PM	BCl3 valve closed
8/22/2012	2:49:39 PM	PH3 valve closed
8/22/2012	2:49:39 PM	SiCl4 pre valve closed
8/22/2012	2:49:39 PM	SiCl4 post valve closed
8/22/2012	2:49:39 PM	Bypass valve closed
8/22/2012	2:49:39 PM	Bubbler valve closed
8/22/2012	2:49:39 PM	Main Vac valve opened
8/22/2012	2:49:39 PM	Helium MFC set to  0.000000
8/22/2012	2:49:39 PM	H2 MFC set to  0.000000
8/22/2012	2:49:39 PM	BCl3 MFC set to  0.000000
8/22/2012	2:49:39 PM	PH3 MFC set to  0.000000
8/22/2012	2:49:39 PM	SiCl4 MFC set to  0.000000
8/22/2012	2:49:39 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	2:49:39 PM	Tube furnace set to 0
8/22/2012	2:49:40 PM	Run finished at 2:49 PM
8/22/2012	2:49:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	3:08:08 PM	Recipe started at 3:08 PM
8/22/2012	3:08:08 PM	Helium valve closed
8/22/2012	3:08:08 PM	H2 valve closed
8/22/2012	3:08:08 PM	BCl3 valve closed
8/22/2012	3:08:08 PM	PH3 valve closed
8/22/2012	3:08:08 PM	SiCl4 pre valve closed
8/22/2012	3:08:08 PM	SiCl4 post valve closed
8/22/2012	3:08:08 PM	Main Vac valve closed
8/22/2012	3:08:08 PM	Bubbler valve closed
8/22/2012	3:08:08 PM	Bypass valve opened
8/22/2012	3:08:08 PM	Helium MFC set to  0.000000
8/22/2012	3:08:08 PM	H2 MFC set to  0.000000
8/22/2012	3:08:08 PM	BCl3 MFC set to  0.000000
8/22/2012	3:08:08 PM	PH3 MFC set to  0.000000
8/22/2012	3:08:08 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:08:08 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:08:08 PM	Tube furnace set to 150
8/22/2012	3:08:09 PM	Helium valve closed
8/22/2012	3:08:09 PM	H2 valve closed
8/22/2012	3:08:09 PM	BCl3 valve closed
8/22/2012	3:08:09 PM	PH3 valve closed
8/22/2012	3:08:09 PM	SiCl4 pre valve closed
8/22/2012	3:08:09 PM	SiCl4 post valve closed
8/22/2012	3:08:09 PM	Main Vac valve closed
8/22/2012	3:08:09 PM	Bubbler valve closed
8/22/2012	3:08:09 PM	Bypass valve opened
8/22/2012	3:08:09 PM	Helium MFC set to  0.000000
8/22/2012	3:08:09 PM	H2 MFC set to  0.000000
8/22/2012	3:08:09 PM	BCl3 MFC set to  0.000000
8/22/2012	3:08:09 PM	PH3 MFC set to  0.000000
8/22/2012	3:08:09 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:08:09 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:08:09 PM	Tube furnace set to 150
8/22/2012	3:08:09 PM	Helium valve closed
8/22/2012	3:08:09 PM	H2 valve closed
8/22/2012	3:08:09 PM	BCl3 valve closed
8/22/2012	3:08:09 PM	PH3 valve closed
8/22/2012	3:08:09 PM	SiCl4 pre valve closed
8/22/2012	3:08:09 PM	SiCl4 post valve closed
8/22/2012	3:08:09 PM	Bypass valve closed
8/22/2012	3:08:09 PM	Bubbler valve closed
8/22/2012	3:08:09 PM	Main Vac valve opened
8/22/2012	3:08:09 PM	Helium MFC set to  0.000000
8/22/2012	3:08:09 PM	H2 MFC set to  0.000000
8/22/2012	3:08:09 PM	BCl3 MFC set to  0.000000
8/22/2012	3:08:09 PM	PH3 MFC set to  0.000000
8/22/2012	3:08:09 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:08:09 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:08:09 PM	Tube furnace set to 150
8/22/2012	3:08:10 PM	H2 valve closed
8/22/2012	3:08:10 PM	BCl3 valve closed
8/22/2012	3:08:10 PM	PH3 valve closed
8/22/2012	3:08:10 PM	SiCl4 pre valve closed
8/22/2012	3:08:10 PM	SiCl4 post valve closed
8/22/2012	3:08:10 PM	Bypass valve closed
8/22/2012	3:08:10 PM	Bubbler valve closed
8/22/2012	3:08:10 PM	Helium valve opened
8/22/2012	3:08:10 PM	Main Vac valve opened
8/22/2012	3:08:10 PM	Helium MFC set to  20.000000
8/22/2012	3:08:10 PM	H2 MFC set to  0.000000
8/22/2012	3:08:10 PM	BCl3 MFC set to  0.000000
8/22/2012	3:08:10 PM	PH3 MFC set to  0.000000
8/22/2012	3:08:10 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:08:10 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:08:10 PM	Tube furnace set to 150
8/22/2012	3:08:40 PM	Helium valve closed
8/22/2012	3:08:40 PM	H2 valve closed
8/22/2012	3:08:40 PM	BCl3 valve closed
8/22/2012	3:08:40 PM	PH3 valve closed
8/22/2012	3:08:40 PM	SiCl4 pre valve closed
8/22/2012	3:08:40 PM	SiCl4 post valve closed
8/22/2012	3:08:40 PM	Bypass valve closed
8/22/2012	3:08:40 PM	Bubbler valve closed
8/22/2012	3:08:40 PM	Main Vac valve opened
8/22/2012	3:08:40 PM	Helium MFC set to  0.000000
8/22/2012	3:08:40 PM	H2 MFC set to  0.000000
8/22/2012	3:08:40 PM	BCl3 MFC set to  0.000000
8/22/2012	3:08:40 PM	PH3 MFC set to  0.000000
8/22/2012	3:08:40 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:08:40 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:08:40 PM	Tube furnace set to 150
8/22/2012	3:09:10 PM	H2 valve closed
8/22/2012	3:09:10 PM	BCl3 valve closed
8/22/2012	3:09:10 PM	PH3 valve closed
8/22/2012	3:09:10 PM	SiCl4 pre valve closed
8/22/2012	3:09:10 PM	SiCl4 post valve closed
8/22/2012	3:09:10 PM	Bypass valve closed
8/22/2012	3:09:10 PM	Bubbler valve closed
8/22/2012	3:09:10 PM	Helium valve opened
8/22/2012	3:09:10 PM	Main Vac valve opened
8/22/2012	3:09:10 PM	Helium MFC set to  20.000000
8/22/2012	3:09:10 PM	H2 MFC set to  0.000000
8/22/2012	3:09:10 PM	BCl3 MFC set to  0.000000
8/22/2012	3:09:10 PM	PH3 MFC set to  0.000000
8/22/2012	3:09:10 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:09:10 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:09:10 PM	Tube furnace set to 150
8/22/2012	3:09:40 PM	Helium valve closed
8/22/2012	3:09:40 PM	H2 valve closed
8/22/2012	3:09:40 PM	BCl3 valve closed
8/22/2012	3:09:40 PM	PH3 valve closed
8/22/2012	3:09:40 PM	SiCl4 pre valve closed
8/22/2012	3:09:40 PM	SiCl4 post valve closed
8/22/2012	3:09:40 PM	Bypass valve closed
8/22/2012	3:09:40 PM	Bubbler valve closed
8/22/2012	3:09:40 PM	Main Vac valve opened
8/22/2012	3:09:40 PM	Helium MFC set to  0.000000
8/22/2012	3:09:40 PM	H2 MFC set to  0.000000
8/22/2012	3:09:40 PM	BCl3 MFC set to  0.000000
8/22/2012	3:09:40 PM	PH3 MFC set to  0.000000
8/22/2012	3:09:40 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:09:40 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:09:41 PM	Tube furnace set to 150
8/22/2012	3:10:11 PM	H2 valve closed
8/22/2012	3:10:11 PM	BCl3 valve closed
8/22/2012	3:10:11 PM	PH3 valve closed
8/22/2012	3:10:11 PM	SiCl4 pre valve closed
8/22/2012	3:10:11 PM	SiCl4 post valve closed
8/22/2012	3:10:11 PM	Bypass valve closed
8/22/2012	3:10:11 PM	Bubbler valve closed
8/22/2012	3:10:11 PM	Helium valve opened
8/22/2012	3:10:11 PM	Main Vac valve opened
8/22/2012	3:10:11 PM	Helium MFC set to  20.000000
8/22/2012	3:10:11 PM	H2 MFC set to  0.000000
8/22/2012	3:10:11 PM	BCl3 MFC set to  0.000000
8/22/2012	3:10:11 PM	PH3 MFC set to  0.000000
8/22/2012	3:10:11 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:10:11 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:10:11 PM	Tube furnace set to 150
8/22/2012	3:10:41 PM	Helium valve closed
8/22/2012	3:10:41 PM	H2 valve closed
8/22/2012	3:10:41 PM	BCl3 valve closed
8/22/2012	3:10:41 PM	PH3 valve closed
8/22/2012	3:10:41 PM	SiCl4 pre valve closed
8/22/2012	3:10:41 PM	SiCl4 post valve closed
8/22/2012	3:10:41 PM	Bypass valve closed
8/22/2012	3:10:41 PM	Bubbler valve closed
8/22/2012	3:10:41 PM	Main Vac valve opened
8/22/2012	3:10:41 PM	Helium MFC set to  0.000000
8/22/2012	3:10:41 PM	H2 MFC set to  0.000000
8/22/2012	3:10:41 PM	BCl3 MFC set to  0.000000
8/22/2012	3:10:41 PM	PH3 MFC set to  0.000000
8/22/2012	3:10:41 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:10:41 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:10:41 PM	Tube furnace set to 150
8/22/2012	3:11:11 PM	H2 valve closed
8/22/2012	3:11:11 PM	BCl3 valve closed
8/22/2012	3:11:11 PM	PH3 valve closed
8/22/2012	3:11:11 PM	SiCl4 pre valve closed
8/22/2012	3:11:11 PM	SiCl4 post valve closed
8/22/2012	3:11:11 PM	Bypass valve closed
8/22/2012	3:11:11 PM	Bubbler valve closed
8/22/2012	3:11:11 PM	Helium valve opened
8/22/2012	3:11:11 PM	Main Vac valve opened
8/22/2012	3:11:11 PM	Helium MFC set to  20.000000
8/22/2012	3:11:11 PM	H2 MFC set to  0.000000
8/22/2012	3:11:11 PM	BCl3 MFC set to  0.000000
8/22/2012	3:11:11 PM	PH3 MFC set to  0.000000
8/22/2012	3:11:11 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:11:11 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:11:11 PM	Tube furnace set to 150
8/22/2012	3:11:41 PM	Helium valve closed
8/22/2012	3:11:41 PM	H2 valve closed
8/22/2012	3:11:41 PM	BCl3 valve closed
8/22/2012	3:11:41 PM	PH3 valve closed
8/22/2012	3:11:41 PM	SiCl4 pre valve closed
8/22/2012	3:11:41 PM	SiCl4 post valve closed
8/22/2012	3:11:41 PM	Bypass valve closed
8/22/2012	3:11:41 PM	Bubbler valve closed
8/22/2012	3:11:41 PM	Main Vac valve opened
8/22/2012	3:11:41 PM	Helium MFC set to  0.000000
8/22/2012	3:11:41 PM	H2 MFC set to  0.000000
8/22/2012	3:11:41 PM	BCl3 MFC set to  0.000000
8/22/2012	3:11:41 PM	PH3 MFC set to  0.000000
8/22/2012	3:11:41 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:11:41 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:11:42 PM	Tube furnace set to 150
8/22/2012	3:12:12 PM	H2 valve closed
8/22/2012	3:12:12 PM	BCl3 valve closed
8/22/2012	3:12:12 PM	PH3 valve closed
8/22/2012	3:12:12 PM	SiCl4 pre valve closed
8/22/2012	3:12:12 PM	SiCl4 post valve closed
8/22/2012	3:12:12 PM	Bypass valve closed
8/22/2012	3:12:12 PM	Bubbler valve closed
8/22/2012	3:12:12 PM	Helium valve opened
8/22/2012	3:12:12 PM	Main Vac valve opened
8/22/2012	3:12:12 PM	Helium MFC set to  20.000000
8/22/2012	3:12:12 PM	H2 MFC set to  0.000000
8/22/2012	3:12:12 PM	BCl3 MFC set to  0.000000
8/22/2012	3:12:12 PM	PH3 MFC set to  0.000000
8/22/2012	3:12:12 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:12:12 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:12:12 PM	Tube furnace set to 150
8/22/2012	3:12:42 PM	Helium valve closed
8/22/2012	3:12:42 PM	H2 valve closed
8/22/2012	3:12:42 PM	BCl3 valve closed
8/22/2012	3:12:42 PM	PH3 valve closed
8/22/2012	3:12:42 PM	SiCl4 pre valve closed
8/22/2012	3:12:42 PM	SiCl4 post valve closed
8/22/2012	3:12:42 PM	Bypass valve closed
8/22/2012	3:12:42 PM	Bubbler valve closed
8/22/2012	3:12:42 PM	Main Vac valve opened
8/22/2012	3:12:42 PM	Helium MFC set to  0.000000
8/22/2012	3:12:42 PM	H2 MFC set to  0.000000
8/22/2012	3:12:42 PM	BCl3 MFC set to  0.000000
8/22/2012	3:12:42 PM	PH3 MFC set to  0.000000
8/22/2012	3:12:42 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:12:42 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:12:42 PM	Tube furnace set to 150
8/22/2012	3:13:12 PM	H2 valve closed
8/22/2012	3:13:12 PM	BCl3 valve closed
8/22/2012	3:13:12 PM	PH3 valve closed
8/22/2012	3:13:12 PM	SiCl4 pre valve closed
8/22/2012	3:13:12 PM	SiCl4 post valve closed
8/22/2012	3:13:12 PM	Bypass valve closed
8/22/2012	3:13:12 PM	Bubbler valve closed
8/22/2012	3:13:12 PM	Helium valve opened
8/22/2012	3:13:12 PM	Main Vac valve opened
8/22/2012	3:13:12 PM	Helium MFC set to  20.000000
8/22/2012	3:13:12 PM	H2 MFC set to  0.000000
8/22/2012	3:13:12 PM	BCl3 MFC set to  0.000000
8/22/2012	3:13:12 PM	PH3 MFC set to  0.000000
8/22/2012	3:13:12 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:13:12 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:13:12 PM	Tube furnace set to 150
8/22/2012	3:13:42 PM	Helium valve closed
8/22/2012	3:13:42 PM	H2 valve closed
8/22/2012	3:13:42 PM	BCl3 valve closed
8/22/2012	3:13:42 PM	PH3 valve closed
8/22/2012	3:13:42 PM	SiCl4 pre valve closed
8/22/2012	3:13:42 PM	SiCl4 post valve closed
8/22/2012	3:13:42 PM	Bypass valve closed
8/22/2012	3:13:42 PM	Bubbler valve closed
8/22/2012	3:13:42 PM	Main Vac valve opened
8/22/2012	3:13:42 PM	Helium MFC set to  0.000000
8/22/2012	3:13:42 PM	H2 MFC set to  0.000000
8/22/2012	3:13:42 PM	BCl3 MFC set to  0.000000
8/22/2012	3:13:42 PM	PH3 MFC set to  0.000000
8/22/2012	3:13:42 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:13:42 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:13:43 PM	Tube furnace set to 150
8/22/2012	3:14:13 PM	H2 valve closed
8/22/2012	3:14:13 PM	BCl3 valve closed
8/22/2012	3:14:13 PM	PH3 valve closed
8/22/2012	3:14:13 PM	SiCl4 pre valve closed
8/22/2012	3:14:13 PM	SiCl4 post valve closed
8/22/2012	3:14:13 PM	Bypass valve closed
8/22/2012	3:14:13 PM	Bubbler valve closed
8/22/2012	3:14:13 PM	Helium valve opened
8/22/2012	3:14:13 PM	Main Vac valve opened
8/22/2012	3:14:13 PM	Helium MFC set to  20.000000
8/22/2012	3:14:13 PM	H2 MFC set to  0.000000
8/22/2012	3:14:13 PM	BCl3 MFC set to  0.000000
8/22/2012	3:14:13 PM	PH3 MFC set to  0.000000
8/22/2012	3:14:13 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:14:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:14:13 PM	Tube furnace set to 150
8/22/2012	3:14:43 PM	Helium valve closed
8/22/2012	3:14:43 PM	H2 valve closed
8/22/2012	3:14:43 PM	BCl3 valve closed
8/22/2012	3:14:43 PM	PH3 valve closed
8/22/2012	3:14:43 PM	SiCl4 pre valve closed
8/22/2012	3:14:43 PM	SiCl4 post valve closed
8/22/2012	3:14:43 PM	Bypass valve closed
8/22/2012	3:14:43 PM	Bubbler valve closed
8/22/2012	3:14:43 PM	Main Vac valve opened
8/22/2012	3:14:43 PM	Helium MFC set to  0.000000
8/22/2012	3:14:43 PM	H2 MFC set to  0.000000
8/22/2012	3:14:43 PM	BCl3 MFC set to  0.000000
8/22/2012	3:14:43 PM	PH3 MFC set to  0.000000
8/22/2012	3:14:43 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:14:43 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:14:43 PM	Tube furnace set to 150
8/22/2012	3:15:13 PM	H2 valve closed
8/22/2012	3:15:13 PM	BCl3 valve closed
8/22/2012	3:15:13 PM	PH3 valve closed
8/22/2012	3:15:13 PM	SiCl4 pre valve closed
8/22/2012	3:15:13 PM	SiCl4 post valve closed
8/22/2012	3:15:13 PM	Bypass valve closed
8/22/2012	3:15:13 PM	Bubbler valve closed
8/22/2012	3:15:13 PM	Helium valve opened
8/22/2012	3:15:13 PM	Main Vac valve opened
8/22/2012	3:15:13 PM	Helium MFC set to  20.000000
8/22/2012	3:15:13 PM	H2 MFC set to  0.000000
8/22/2012	3:15:13 PM	BCl3 MFC set to  0.000000
8/22/2012	3:15:13 PM	PH3 MFC set to  0.000000
8/22/2012	3:15:13 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:15:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:15:13 PM	Tube furnace set to 150
8/22/2012	3:15:43 PM	Helium valve closed
8/22/2012	3:15:43 PM	H2 valve closed
8/22/2012	3:15:43 PM	BCl3 valve closed
8/22/2012	3:15:43 PM	PH3 valve closed
8/22/2012	3:15:43 PM	SiCl4 pre valve closed
8/22/2012	3:15:43 PM	SiCl4 post valve closed
8/22/2012	3:15:43 PM	Bypass valve closed
8/22/2012	3:15:43 PM	Bubbler valve closed
8/22/2012	3:15:43 PM	Main Vac valve opened
8/22/2012	3:15:43 PM	Helium MFC set to  0.000000
8/22/2012	3:15:43 PM	H2 MFC set to  0.000000
8/22/2012	3:15:43 PM	BCl3 MFC set to  0.000000
8/22/2012	3:15:43 PM	PH3 MFC set to  0.000000
8/22/2012	3:15:43 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:15:43 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:15:44 PM	Tube furnace set to 150
8/22/2012	3:16:14 PM	H2 valve closed
8/22/2012	3:16:14 PM	BCl3 valve closed
8/22/2012	3:16:14 PM	PH3 valve closed
8/22/2012	3:16:14 PM	SiCl4 pre valve closed
8/22/2012	3:16:14 PM	SiCl4 post valve closed
8/22/2012	3:16:14 PM	Bypass valve closed
8/22/2012	3:16:14 PM	Bubbler valve closed
8/22/2012	3:16:14 PM	Helium valve opened
8/22/2012	3:16:14 PM	Main Vac valve opened
8/22/2012	3:16:14 PM	Helium MFC set to  20.000000
8/22/2012	3:16:14 PM	H2 MFC set to  0.000000
8/22/2012	3:16:14 PM	BCl3 MFC set to  0.000000
8/22/2012	3:16:14 PM	PH3 MFC set to  0.000000
8/22/2012	3:16:14 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:16:14 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:16:14 PM	Tube furnace set to 150
8/22/2012	3:16:44 PM	Helium valve closed
8/22/2012	3:16:44 PM	H2 valve closed
8/22/2012	3:16:44 PM	BCl3 valve closed
8/22/2012	3:16:44 PM	PH3 valve closed
8/22/2012	3:16:44 PM	SiCl4 pre valve closed
8/22/2012	3:16:44 PM	SiCl4 post valve closed
8/22/2012	3:16:44 PM	Bypass valve closed
8/22/2012	3:16:44 PM	Bubbler valve closed
8/22/2012	3:16:44 PM	Main Vac valve opened
8/22/2012	3:16:44 PM	Helium MFC set to  0.000000
8/22/2012	3:16:44 PM	H2 MFC set to  0.000000
8/22/2012	3:16:44 PM	BCl3 MFC set to  0.000000
8/22/2012	3:16:44 PM	PH3 MFC set to  0.000000
8/22/2012	3:16:44 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:16:44 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:16:44 PM	Tube furnace set to 150
8/22/2012	3:17:14 PM	H2 valve closed
8/22/2012	3:17:14 PM	BCl3 valve closed
8/22/2012	3:17:14 PM	PH3 valve closed
8/22/2012	3:17:14 PM	SiCl4 pre valve closed
8/22/2012	3:17:14 PM	SiCl4 post valve closed
8/22/2012	3:17:14 PM	Bypass valve closed
8/22/2012	3:17:14 PM	Bubbler valve closed
8/22/2012	3:17:14 PM	Helium valve opened
8/22/2012	3:17:14 PM	Main Vac valve opened
8/22/2012	3:17:14 PM	Helium MFC set to  20.000000
8/22/2012	3:17:14 PM	H2 MFC set to  0.000000
8/22/2012	3:17:14 PM	BCl3 MFC set to  0.000000
8/22/2012	3:17:14 PM	PH3 MFC set to  0.000000
8/22/2012	3:17:14 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:17:14 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:17:14 PM	Tube furnace set to 150
8/22/2012	3:17:44 PM	Helium valve closed
8/22/2012	3:17:44 PM	H2 valve closed
8/22/2012	3:17:44 PM	BCl3 valve closed
8/22/2012	3:17:44 PM	PH3 valve closed
8/22/2012	3:17:44 PM	SiCl4 pre valve closed
8/22/2012	3:17:44 PM	SiCl4 post valve closed
8/22/2012	3:17:44 PM	Bypass valve closed
8/22/2012	3:17:44 PM	Bubbler valve closed
8/22/2012	3:17:44 PM	Main Vac valve opened
8/22/2012	3:17:44 PM	Helium MFC set to  0.000000
8/22/2012	3:17:44 PM	H2 MFC set to  0.000000
8/22/2012	3:17:44 PM	BCl3 MFC set to  0.000000
8/22/2012	3:17:44 PM	PH3 MFC set to  0.000000
8/22/2012	3:17:44 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:17:44 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:17:45 PM	Tube furnace set to 150
8/22/2012	3:17:46 PM	Run finished at 3:17 PM
8/22/2012	3:20:58 PM	Recipe started at 3:20 PM
8/22/2012	3:20:58 PM	Helium valve closed
8/22/2012	3:20:58 PM	H2 valve closed
8/22/2012	3:20:58 PM	BCl3 valve closed
8/22/2012	3:20:58 PM	PH3 valve closed
8/22/2012	3:20:58 PM	SiCl4 pre valve closed
8/22/2012	3:20:58 PM	SiCl4 post valve closed
8/22/2012	3:20:58 PM	Main Vac valve closed
8/22/2012	3:20:58 PM	Bubbler valve closed
8/22/2012	3:20:58 PM	Bypass valve opened
8/22/2012	3:20:58 PM	Helium MFC set to  0.000000
8/22/2012	3:20:58 PM	H2 MFC set to  0.000000
8/22/2012	3:20:58 PM	BCl3 MFC set to  0.000000
8/22/2012	3:20:58 PM	PH3 MFC set to  0.000000
8/22/2012	3:20:58 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:20:58 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:20:58 PM	Tube furnace set to 150
8/22/2012	3:20:58 PM	Helium valve closed
8/22/2012	3:20:58 PM	H2 valve closed
8/22/2012	3:20:58 PM	BCl3 valve closed
8/22/2012	3:20:58 PM	PH3 valve closed
8/22/2012	3:20:58 PM	SiCl4 pre valve closed
8/22/2012	3:20:58 PM	SiCl4 post valve closed
8/22/2012	3:20:58 PM	Main Vac valve closed
8/22/2012	3:20:58 PM	Bubbler valve closed
8/22/2012	3:20:58 PM	Bypass valve opened
8/22/2012	3:20:58 PM	Helium MFC set to  0.000000
8/22/2012	3:20:58 PM	H2 MFC set to  0.000000
8/22/2012	3:20:58 PM	BCl3 MFC set to  0.000000
8/22/2012	3:20:58 PM	PH3 MFC set to  0.000000
8/22/2012	3:20:58 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:20:58 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:20:58 PM	Tube furnace set to 150
8/22/2012	3:21:02 PM	Helium valve closed
8/22/2012	3:21:02 PM	H2 valve closed
8/22/2012	3:21:02 PM	BCl3 valve closed
8/22/2012	3:21:02 PM	PH3 valve closed
8/22/2012	3:21:02 PM	SiCl4 pre valve closed
8/22/2012	3:21:02 PM	SiCl4 post valve closed
8/22/2012	3:21:02 PM	Bypass valve closed
8/22/2012	3:21:02 PM	Bubbler valve closed
8/22/2012	3:21:02 PM	Main Vac valve opened
8/22/2012	3:21:02 PM	Helium MFC set to  0.000000
8/22/2012	3:21:02 PM	H2 MFC set to  0.000000
8/22/2012	3:21:02 PM	BCl3 MFC set to  0.000000
8/22/2012	3:21:02 PM	PH3 MFC set to  0.000000
8/22/2012	3:21:02 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:21:02 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:21:03 PM	Tube furnace set to 150
8/22/2012	3:21:04 PM	H2 valve closed
8/22/2012	3:21:04 PM	BCl3 valve closed
8/22/2012	3:21:04 PM	PH3 valve closed
8/22/2012	3:21:04 PM	SiCl4 pre valve closed
8/22/2012	3:21:04 PM	SiCl4 post valve closed
8/22/2012	3:21:04 PM	Bypass valve closed
8/22/2012	3:21:04 PM	Bubbler valve closed
8/22/2012	3:21:04 PM	Helium valve opened
8/22/2012	3:21:04 PM	Main Vac valve opened
8/22/2012	3:21:04 PM	Helium MFC set to  20.000000
8/22/2012	3:21:04 PM	H2 MFC set to  0.000000
8/22/2012	3:21:04 PM	BCl3 MFC set to  0.000000
8/22/2012	3:21:04 PM	PH3 MFC set to  0.000000
8/22/2012	3:21:04 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:21:04 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:21:05 PM	Tube furnace set to 150
8/22/2012	3:21:35 PM	Helium valve closed
8/22/2012	3:21:35 PM	H2 valve closed
8/22/2012	3:21:35 PM	BCl3 valve closed
8/22/2012	3:21:35 PM	PH3 valve closed
8/22/2012	3:21:35 PM	SiCl4 pre valve closed
8/22/2012	3:21:35 PM	SiCl4 post valve closed
8/22/2012	3:21:35 PM	Bypass valve closed
8/22/2012	3:21:35 PM	Bubbler valve closed
8/22/2012	3:21:35 PM	Main Vac valve opened
8/22/2012	3:21:35 PM	Helium MFC set to  0.000000
8/22/2012	3:21:35 PM	H2 MFC set to  0.000000
8/22/2012	3:21:35 PM	BCl3 MFC set to  0.000000
8/22/2012	3:21:35 PM	PH3 MFC set to  0.000000
8/22/2012	3:21:35 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:21:35 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:21:35 PM	Tube furnace set to 150
8/22/2012	3:22:05 PM	H2 valve closed
8/22/2012	3:22:05 PM	BCl3 valve closed
8/22/2012	3:22:05 PM	PH3 valve closed
8/22/2012	3:22:05 PM	SiCl4 pre valve closed
8/22/2012	3:22:05 PM	SiCl4 post valve closed
8/22/2012	3:22:05 PM	Bypass valve closed
8/22/2012	3:22:05 PM	Bubbler valve closed
8/22/2012	3:22:05 PM	Helium valve opened
8/22/2012	3:22:05 PM	Main Vac valve opened
8/22/2012	3:22:05 PM	Helium MFC set to  20.000000
8/22/2012	3:22:05 PM	H2 MFC set to  0.000000
8/22/2012	3:22:05 PM	BCl3 MFC set to  0.000000
8/22/2012	3:22:05 PM	PH3 MFC set to  0.000000
8/22/2012	3:22:05 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:22:05 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:22:05 PM	Tube furnace set to 150
8/22/2012	3:22:35 PM	Helium valve closed
8/22/2012	3:22:35 PM	H2 valve closed
8/22/2012	3:22:35 PM	BCl3 valve closed
8/22/2012	3:22:35 PM	PH3 valve closed
8/22/2012	3:22:35 PM	SiCl4 pre valve closed
8/22/2012	3:22:35 PM	SiCl4 post valve closed
8/22/2012	3:22:35 PM	Bypass valve closed
8/22/2012	3:22:35 PM	Bubbler valve closed
8/22/2012	3:22:35 PM	Main Vac valve opened
8/22/2012	3:22:35 PM	Helium MFC set to  0.000000
8/22/2012	3:22:35 PM	H2 MFC set to  0.000000
8/22/2012	3:22:35 PM	BCl3 MFC set to  0.000000
8/22/2012	3:22:35 PM	PH3 MFC set to  0.000000
8/22/2012	3:22:35 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:22:35 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:22:35 PM	Tube furnace set to 150
8/22/2012	3:23:05 PM	H2 valve closed
8/22/2012	3:23:05 PM	BCl3 valve closed
8/22/2012	3:23:05 PM	PH3 valve closed
8/22/2012	3:23:05 PM	SiCl4 pre valve closed
8/22/2012	3:23:05 PM	SiCl4 post valve closed
8/22/2012	3:23:05 PM	Bypass valve closed
8/22/2012	3:23:05 PM	Bubbler valve closed
8/22/2012	3:23:05 PM	Helium valve opened
8/22/2012	3:23:05 PM	Main Vac valve opened
8/22/2012	3:23:05 PM	Helium MFC set to  20.000000
8/22/2012	3:23:05 PM	H2 MFC set to  0.000000
8/22/2012	3:23:05 PM	BCl3 MFC set to  0.000000
8/22/2012	3:23:05 PM	PH3 MFC set to  0.000000
8/22/2012	3:23:05 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:23:05 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:23:06 PM	Tube furnace set to 150
8/22/2012	3:23:36 PM	Helium valve closed
8/22/2012	3:23:36 PM	H2 valve closed
8/22/2012	3:23:36 PM	BCl3 valve closed
8/22/2012	3:23:36 PM	PH3 valve closed
8/22/2012	3:23:36 PM	SiCl4 pre valve closed
8/22/2012	3:23:36 PM	SiCl4 post valve closed
8/22/2012	3:23:36 PM	Bypass valve closed
8/22/2012	3:23:36 PM	Bubbler valve closed
8/22/2012	3:23:36 PM	Main Vac valve opened
8/22/2012	3:23:36 PM	Helium MFC set to  0.000000
8/22/2012	3:23:36 PM	H2 MFC set to  0.000000
8/22/2012	3:23:36 PM	BCl3 MFC set to  0.000000
8/22/2012	3:23:36 PM	PH3 MFC set to  0.000000
8/22/2012	3:23:36 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:23:36 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:23:36 PM	Tube furnace set to 150
8/22/2012	3:24:06 PM	H2 valve closed
8/22/2012	3:24:06 PM	BCl3 valve closed
8/22/2012	3:24:06 PM	PH3 valve closed
8/22/2012	3:24:06 PM	SiCl4 pre valve closed
8/22/2012	3:24:06 PM	SiCl4 post valve closed
8/22/2012	3:24:06 PM	Bypass valve closed
8/22/2012	3:24:06 PM	Bubbler valve closed
8/22/2012	3:24:06 PM	Helium valve opened
8/22/2012	3:24:06 PM	Main Vac valve opened
8/22/2012	3:24:06 PM	Helium MFC set to  20.000000
8/22/2012	3:24:06 PM	H2 MFC set to  0.000000
8/22/2012	3:24:06 PM	BCl3 MFC set to  0.000000
8/22/2012	3:24:06 PM	PH3 MFC set to  0.000000
8/22/2012	3:24:06 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:24:06 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:24:06 PM	Tube furnace set to 150
8/22/2012	3:24:36 PM	Helium valve closed
8/22/2012	3:24:36 PM	H2 valve closed
8/22/2012	3:24:36 PM	BCl3 valve closed
8/22/2012	3:24:36 PM	PH3 valve closed
8/22/2012	3:24:36 PM	SiCl4 pre valve closed
8/22/2012	3:24:36 PM	SiCl4 post valve closed
8/22/2012	3:24:36 PM	Bypass valve closed
8/22/2012	3:24:36 PM	Bubbler valve closed
8/22/2012	3:24:36 PM	Main Vac valve opened
8/22/2012	3:24:36 PM	Helium MFC set to  0.000000
8/22/2012	3:24:36 PM	H2 MFC set to  0.000000
8/22/2012	3:24:36 PM	BCl3 MFC set to  0.000000
8/22/2012	3:24:36 PM	PH3 MFC set to  0.000000
8/22/2012	3:24:36 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:24:36 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:24:36 PM	Tube furnace set to 150
8/22/2012	3:25:06 PM	H2 valve closed
8/22/2012	3:25:06 PM	BCl3 valve closed
8/22/2012	3:25:06 PM	PH3 valve closed
8/22/2012	3:25:06 PM	SiCl4 pre valve closed
8/22/2012	3:25:06 PM	SiCl4 post valve closed
8/22/2012	3:25:06 PM	Bypass valve closed
8/22/2012	3:25:06 PM	Bubbler valve closed
8/22/2012	3:25:06 PM	Helium valve opened
8/22/2012	3:25:06 PM	Main Vac valve opened
8/22/2012	3:25:06 PM	Helium MFC set to  20.000000
8/22/2012	3:25:06 PM	H2 MFC set to  0.000000
8/22/2012	3:25:06 PM	BCl3 MFC set to  0.000000
8/22/2012	3:25:06 PM	PH3 MFC set to  0.000000
8/22/2012	3:25:06 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:25:06 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:25:07 PM	Tube furnace set to 150
8/22/2012	3:25:37 PM	Helium valve closed
8/22/2012	3:25:37 PM	H2 valve closed
8/22/2012	3:25:37 PM	BCl3 valve closed
8/22/2012	3:25:37 PM	PH3 valve closed
8/22/2012	3:25:37 PM	SiCl4 pre valve closed
8/22/2012	3:25:37 PM	SiCl4 post valve closed
8/22/2012	3:25:37 PM	Bypass valve closed
8/22/2012	3:25:37 PM	Bubbler valve closed
8/22/2012	3:25:37 PM	Main Vac valve opened
8/22/2012	3:25:37 PM	Helium MFC set to  0.000000
8/22/2012	3:25:37 PM	H2 MFC set to  0.000000
8/22/2012	3:25:37 PM	BCl3 MFC set to  0.000000
8/22/2012	3:25:37 PM	PH3 MFC set to  0.000000
8/22/2012	3:25:37 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:25:37 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:25:37 PM	Tube furnace set to 150
8/22/2012	3:26:07 PM	H2 valve closed
8/22/2012	3:26:07 PM	BCl3 valve closed
8/22/2012	3:26:07 PM	PH3 valve closed
8/22/2012	3:26:07 PM	SiCl4 pre valve closed
8/22/2012	3:26:07 PM	SiCl4 post valve closed
8/22/2012	3:26:07 PM	Bypass valve closed
8/22/2012	3:26:07 PM	Bubbler valve closed
8/22/2012	3:26:07 PM	Helium valve opened
8/22/2012	3:26:07 PM	Main Vac valve opened
8/22/2012	3:26:07 PM	Helium MFC set to  20.000000
8/22/2012	3:26:07 PM	H2 MFC set to  0.000000
8/22/2012	3:26:07 PM	BCl3 MFC set to  0.000000
8/22/2012	3:26:07 PM	PH3 MFC set to  0.000000
8/22/2012	3:26:07 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:26:07 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:26:07 PM	Tube furnace set to 150
8/22/2012	3:26:37 PM	Helium valve closed
8/22/2012	3:26:37 PM	H2 valve closed
8/22/2012	3:26:37 PM	BCl3 valve closed
8/22/2012	3:26:37 PM	PH3 valve closed
8/22/2012	3:26:37 PM	SiCl4 pre valve closed
8/22/2012	3:26:37 PM	SiCl4 post valve closed
8/22/2012	3:26:37 PM	Bypass valve closed
8/22/2012	3:26:37 PM	Bubbler valve closed
8/22/2012	3:26:37 PM	Main Vac valve opened
8/22/2012	3:26:37 PM	Helium MFC set to  0.000000
8/22/2012	3:26:37 PM	H2 MFC set to  0.000000
8/22/2012	3:26:37 PM	BCl3 MFC set to  0.000000
8/22/2012	3:26:37 PM	PH3 MFC set to  0.000000
8/22/2012	3:26:37 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:26:37 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:26:37 PM	Tube furnace set to 150
8/22/2012	3:27:07 PM	H2 valve closed
8/22/2012	3:27:07 PM	BCl3 valve closed
8/22/2012	3:27:07 PM	PH3 valve closed
8/22/2012	3:27:07 PM	SiCl4 pre valve closed
8/22/2012	3:27:07 PM	SiCl4 post valve closed
8/22/2012	3:27:07 PM	Bypass valve closed
8/22/2012	3:27:07 PM	Bubbler valve closed
8/22/2012	3:27:07 PM	Helium valve opened
8/22/2012	3:27:07 PM	Main Vac valve opened
8/22/2012	3:27:07 PM	Helium MFC set to  20.000000
8/22/2012	3:27:07 PM	H2 MFC set to  0.000000
8/22/2012	3:27:07 PM	BCl3 MFC set to  0.000000
8/22/2012	3:27:07 PM	PH3 MFC set to  0.000000
8/22/2012	3:27:07 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:27:07 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:27:08 PM	Tube furnace set to 150
8/22/2012	3:27:38 PM	Helium valve closed
8/22/2012	3:27:38 PM	H2 valve closed
8/22/2012	3:27:38 PM	BCl3 valve closed
8/22/2012	3:27:38 PM	PH3 valve closed
8/22/2012	3:27:38 PM	SiCl4 pre valve closed
8/22/2012	3:27:38 PM	SiCl4 post valve closed
8/22/2012	3:27:38 PM	Bypass valve closed
8/22/2012	3:27:38 PM	Bubbler valve closed
8/22/2012	3:27:38 PM	Main Vac valve opened
8/22/2012	3:27:38 PM	Helium MFC set to  0.000000
8/22/2012	3:27:38 PM	H2 MFC set to  0.000000
8/22/2012	3:27:38 PM	BCl3 MFC set to  0.000000
8/22/2012	3:27:38 PM	PH3 MFC set to  0.000000
8/22/2012	3:27:38 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:27:38 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:27:38 PM	Tube furnace set to 150
8/22/2012	3:28:08 PM	H2 valve closed
8/22/2012	3:28:08 PM	BCl3 valve closed
8/22/2012	3:28:08 PM	PH3 valve closed
8/22/2012	3:28:08 PM	SiCl4 pre valve closed
8/22/2012	3:28:08 PM	SiCl4 post valve closed
8/22/2012	3:28:08 PM	Bypass valve closed
8/22/2012	3:28:08 PM	Bubbler valve closed
8/22/2012	3:28:08 PM	Helium valve opened
8/22/2012	3:28:08 PM	Main Vac valve opened
8/22/2012	3:28:08 PM	Helium MFC set to  20.000000
8/22/2012	3:28:08 PM	H2 MFC set to  0.000000
8/22/2012	3:28:08 PM	BCl3 MFC set to  0.000000
8/22/2012	3:28:08 PM	PH3 MFC set to  0.000000
8/22/2012	3:28:08 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:28:08 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:28:08 PM	Tube furnace set to 150
8/22/2012	3:28:38 PM	Helium valve closed
8/22/2012	3:28:38 PM	H2 valve closed
8/22/2012	3:28:38 PM	BCl3 valve closed
8/22/2012	3:28:38 PM	PH3 valve closed
8/22/2012	3:28:38 PM	SiCl4 pre valve closed
8/22/2012	3:28:38 PM	SiCl4 post valve closed
8/22/2012	3:28:38 PM	Bypass valve closed
8/22/2012	3:28:38 PM	Bubbler valve closed
8/22/2012	3:28:38 PM	Main Vac valve opened
8/22/2012	3:28:38 PM	Helium MFC set to  0.000000
8/22/2012	3:28:38 PM	H2 MFC set to  0.000000
8/22/2012	3:28:38 PM	BCl3 MFC set to  0.000000
8/22/2012	3:28:38 PM	PH3 MFC set to  0.000000
8/22/2012	3:28:38 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:28:38 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:28:38 PM	Tube furnace set to 150
8/22/2012	3:29:08 PM	H2 valve closed
8/22/2012	3:29:08 PM	BCl3 valve closed
8/22/2012	3:29:08 PM	PH3 valve closed
8/22/2012	3:29:08 PM	SiCl4 pre valve closed
8/22/2012	3:29:08 PM	SiCl4 post valve closed
8/22/2012	3:29:08 PM	Bypass valve closed
8/22/2012	3:29:08 PM	Bubbler valve closed
8/22/2012	3:29:08 PM	Helium valve opened
8/22/2012	3:29:08 PM	Main Vac valve opened
8/22/2012	3:29:08 PM	Helium MFC set to  20.000000
8/22/2012	3:29:08 PM	H2 MFC set to  0.000000
8/22/2012	3:29:08 PM	BCl3 MFC set to  0.000000
8/22/2012	3:29:08 PM	PH3 MFC set to  0.000000
8/22/2012	3:29:08 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:29:08 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:29:09 PM	Tube furnace set to 150
8/22/2012	3:29:39 PM	Helium valve closed
8/22/2012	3:29:39 PM	H2 valve closed
8/22/2012	3:29:39 PM	BCl3 valve closed
8/22/2012	3:29:39 PM	PH3 valve closed
8/22/2012	3:29:39 PM	SiCl4 pre valve closed
8/22/2012	3:29:39 PM	SiCl4 post valve closed
8/22/2012	3:29:39 PM	Bypass valve closed
8/22/2012	3:29:39 PM	Bubbler valve closed
8/22/2012	3:29:39 PM	Main Vac valve opened
8/22/2012	3:29:39 PM	Helium MFC set to  0.000000
8/22/2012	3:29:39 PM	H2 MFC set to  0.000000
8/22/2012	3:29:39 PM	BCl3 MFC set to  0.000000
8/22/2012	3:29:39 PM	PH3 MFC set to  0.000000
8/22/2012	3:29:39 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:29:39 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:29:39 PM	Tube furnace set to 150
8/22/2012	3:30:09 PM	H2 valve closed
8/22/2012	3:30:09 PM	BCl3 valve closed
8/22/2012	3:30:09 PM	PH3 valve closed
8/22/2012	3:30:09 PM	SiCl4 pre valve closed
8/22/2012	3:30:09 PM	SiCl4 post valve closed
8/22/2012	3:30:09 PM	Bypass valve closed
8/22/2012	3:30:09 PM	Bubbler valve closed
8/22/2012	3:30:09 PM	Helium valve opened
8/22/2012	3:30:09 PM	Main Vac valve opened
8/22/2012	3:30:09 PM	Helium MFC set to  20.000000
8/22/2012	3:30:09 PM	H2 MFC set to  0.000000
8/22/2012	3:30:09 PM	BCl3 MFC set to  0.000000
8/22/2012	3:30:09 PM	PH3 MFC set to  0.000000
8/22/2012	3:30:09 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:30:09 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:30:09 PM	Tube furnace set to 150
8/22/2012	3:30:39 PM	Helium valve closed
8/22/2012	3:30:39 PM	H2 valve closed
8/22/2012	3:30:39 PM	BCl3 valve closed
8/22/2012	3:30:39 PM	PH3 valve closed
8/22/2012	3:30:39 PM	SiCl4 pre valve closed
8/22/2012	3:30:39 PM	SiCl4 post valve closed
8/22/2012	3:30:39 PM	Bypass valve closed
8/22/2012	3:30:39 PM	Bubbler valve closed
8/22/2012	3:30:39 PM	Main Vac valve opened
8/22/2012	3:30:39 PM	Helium MFC set to  0.000000
8/22/2012	3:30:39 PM	H2 MFC set to  0.000000
8/22/2012	3:30:39 PM	BCl3 MFC set to  0.000000
8/22/2012	3:30:39 PM	PH3 MFC set to  0.000000
8/22/2012	3:30:39 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:30:39 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:30:39 PM	Tube furnace set to 150
8/22/2012	3:30:40 PM	Run finished at 3:30 PM
8/22/2012	3:31:03 PM	Main Vac valve closed
8/22/2012	3:31:16 PM	Main Vac valve opened
8/22/2012	3:32:31 PM	Recipe started at 3:32 PM
8/22/2012	3:32:31 PM	Helium valve closed
8/22/2012	3:32:31 PM	H2 valve closed
8/22/2012	3:32:31 PM	BCl3 valve closed
8/22/2012	3:32:31 PM	PH3 valve closed
8/22/2012	3:32:31 PM	SiCl4 pre valve closed
8/22/2012	3:32:31 PM	SiCl4 post valve closed
8/22/2012	3:32:31 PM	Main Vac valve closed
8/22/2012	3:32:31 PM	Bypass valve closed
8/22/2012	3:32:31 PM	Bubbler valve closed
8/22/2012	3:32:31 PM	Helium MFC set to  0.000000
8/22/2012	3:32:31 PM	H2 MFC set to  0.000000
8/22/2012	3:32:31 PM	BCl3 MFC set to  0.000000
8/22/2012	3:32:31 PM	PH3 MFC set to  0.000000
8/22/2012	3:32:31 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:32:31 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:32:31 PM	Tube furnace set to 0
8/22/2012	3:32:34 PM	Helium valve closed
8/22/2012	3:32:34 PM	BCl3 valve closed
8/22/2012	3:32:34 PM	PH3 valve closed
8/22/2012	3:32:34 PM	SiCl4 pre valve closed
8/22/2012	3:32:34 PM	SiCl4 post valve closed
8/22/2012	3:32:34 PM	Main Vac valve closed
8/22/2012	3:32:34 PM	Bypass valve closed
8/22/2012	3:32:34 PM	Bubbler valve closed
8/22/2012	3:32:34 PM	H2 valve opened
8/22/2012	3:32:34 PM	Helium MFC set to  0.000000
8/22/2012	3:32:34 PM	H2 MFC set to  500.000000
8/22/2012	3:32:34 PM	BCl3 MFC set to  0.000000
8/22/2012	3:32:34 PM	PH3 MFC set to  0.000000
8/22/2012	3:32:34 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:32:34 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:32:34 PM	Tube furnace set to 50
8/22/2012	3:33:46 PM	Helium valve closed
8/22/2012	3:33:46 PM	BCl3 valve closed
8/22/2012	3:33:46 PM	PH3 valve closed
8/22/2012	3:33:46 PM	SiCl4 pre valve closed
8/22/2012	3:33:46 PM	SiCl4 post valve closed
8/22/2012	3:33:46 PM	Main Vac valve closed
8/22/2012	3:33:46 PM	Bypass valve closed
8/22/2012	3:33:46 PM	H2 valve opened
8/22/2012	3:33:46 PM	Bubbler valve opened
8/22/2012	3:33:46 PM	Helium MFC set to  0.000000
8/22/2012	3:33:46 PM	H2 MFC set to  500.000000
8/22/2012	3:33:46 PM	BCl3 MFC set to  0.000000
8/22/2012	3:33:46 PM	PH3 MFC set to  0.000000
8/22/2012	3:33:46 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:33:46 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:33:46 PM	Tube furnace set to 50
8/22/2012	3:33:47 PM	Helium valve closed
8/22/2012	3:33:47 PM	BCl3 valve closed
8/22/2012	3:33:47 PM	PH3 valve closed
8/22/2012	3:33:47 PM	SiCl4 pre valve closed
8/22/2012	3:33:47 PM	SiCl4 post valve closed
8/22/2012	3:33:47 PM	Main Vac valve closed
8/22/2012	3:33:47 PM	Bypass valve closed
8/22/2012	3:33:47 PM	H2 valve opened
8/22/2012	3:33:47 PM	Bubbler valve opened
8/22/2012	3:33:47 PM	Helium MFC set to  0.000000
8/22/2012	3:33:47 PM	H2 MFC set to  450.000000
8/22/2012	3:33:47 PM	BCl3 MFC set to  0.000000
8/22/2012	3:33:47 PM	PH3 MFC set to  0.000000
8/22/2012	3:33:47 PM	SiCl4 MFC set to  0.000000
8/22/2012	3:33:47 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:33:47 PM	Tube furnace set to 1000
8/22/2012	3:53:47 PM	Helium valve closed
8/22/2012	3:53:47 PM	PH3 valve closed
8/22/2012	3:53:47 PM	Main Vac valve closed
8/22/2012	3:53:47 PM	Bypass valve closed
8/22/2012	3:53:47 PM	H2 valve opened
8/22/2012	3:53:47 PM	BCl3 valve opened
8/22/2012	3:53:47 PM	SiCl4 pre valve opened
8/22/2012	3:53:47 PM	SiCl4 post valve opened
8/22/2012	3:53:47 PM	Bubbler valve opened
8/22/2012	3:53:47 PM	Helium MFC set to  0.000000
8/22/2012	3:53:47 PM	H2 MFC set to  450.000000
8/22/2012	3:53:47 PM	BCl3 MFC set to  1.200000
8/22/2012	3:53:47 PM	PH3 MFC set to  0.000000
8/22/2012	3:53:47 PM	SiCl4 MFC set to  50.000000
8/22/2012	3:53:47 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	3:53:47 PM	Tube furnace set to 1000
8/22/2012	4:08:47 PM	Helium valve closed
8/22/2012	4:08:47 PM	BCl3 valve closed
8/22/2012	4:08:47 PM	PH3 valve closed
8/22/2012	4:08:47 PM	SiCl4 pre valve closed
8/22/2012	4:08:47 PM	SiCl4 post valve closed
8/22/2012	4:08:47 PM	Main Vac valve closed
8/22/2012	4:08:47 PM	Bypass valve closed
8/22/2012	4:08:47 PM	H2 valve opened
8/22/2012	4:08:47 PM	Bubbler valve opened
8/22/2012	4:08:47 PM	Helium MFC set to  0.000000
8/22/2012	4:08:47 PM	H2 MFC set to  500.000000
8/22/2012	4:08:47 PM	BCl3 MFC set to  0.000000
8/22/2012	4:08:47 PM	PH3 MFC set to  0.000000
8/22/2012	4:08:47 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:08:47 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:08:48 PM	Tube furnace set to 750
8/22/2012	4:18:47 PM	H2 valve closed
8/22/2012	4:18:48 PM	BCl3 valve closed
8/22/2012	4:18:48 PM	PH3 valve closed
8/22/2012	4:18:48 PM	SiCl4 pre valve closed
8/22/2012	4:18:48 PM	SiCl4 post valve closed
8/22/2012	4:18:48 PM	Main Vac valve closed
8/22/2012	4:18:48 PM	Bypass valve closed
8/22/2012	4:18:48 PM	Helium valve opened
8/22/2012	4:18:48 PM	Bubbler valve opened
8/22/2012	4:18:48 PM	Helium MFC set to  400.000000
8/22/2012	4:18:48 PM	H2 MFC set to  0.000000
8/22/2012	4:18:48 PM	BCl3 MFC set to  0.000000
8/22/2012	4:18:48 PM	PH3 MFC set to  0.000000
8/22/2012	4:18:48 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:18:48 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:18:48 PM	Tube furnace set to 0
8/22/2012	4:34:16 PM	Run aborted at 4:34 PM
8/22/2012	4:34:16 PM	Helium valve closed
8/22/2012	4:34:16 PM	H2 valve closed
8/22/2012	4:34:16 PM	BCl3 valve closed
8/22/2012	4:34:16 PM	PH3 valve closed
8/22/2012	4:34:16 PM	SiCl4 pre valve closed
8/22/2012	4:34:16 PM	SiCl4 post valve closed
8/22/2012	4:34:17 PM	Bypass valve closed
8/22/2012	4:34:17 PM	Main Vac valve closed
8/22/2012	4:34:17 PM	Bubbler valve closed
8/22/2012	4:34:17 PM	Helium MFC set to  0.000000
8/22/2012	4:34:17 PM	H2 MFC set to  0.000000
8/22/2012	4:34:17 PM	BCl3 MFC set to  0.000000
8/22/2012	4:34:17 PM	PH3 MFC set to  0.000000
8/22/2012	4:34:17 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:34:17 PM	Tube furnace set to 0
8/22/2012	4:34:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	4:34:22 PM	Recipe started at 4:34 PM
8/22/2012	4:34:23 PM	Helium valve closed
8/22/2012	4:34:23 PM	H2 valve closed
8/22/2012	4:34:23 PM	BCl3 valve closed
8/22/2012	4:34:23 PM	PH3 valve closed
8/22/2012	4:34:23 PM	SiCl4 pre valve closed
8/22/2012	4:34:23 PM	SiCl4 post valve closed
8/22/2012	4:34:23 PM	Main Vac valve closed
8/22/2012	4:34:23 PM	Bypass valve closed
8/22/2012	4:34:23 PM	Bubbler valve closed
8/22/2012	4:34:23 PM	Helium MFC set to  0.000000
8/22/2012	4:34:23 PM	H2 MFC set to  0.000000
8/22/2012	4:34:23 PM	BCl3 MFC set to  0.000000
8/22/2012	4:34:23 PM	PH3 MFC set to  0.000000
8/22/2012	4:34:23 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:34:23 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:34:23 PM	Tube furnace set to 0
8/22/2012	4:34:26 PM	H2 valve closed
8/22/2012	4:34:26 PM	BCl3 valve closed
8/22/2012	4:34:26 PM	PH3 valve closed
8/22/2012	4:34:26 PM	SiCl4 pre valve closed
8/22/2012	4:34:26 PM	SiCl4 post valve closed
8/22/2012	4:34:26 PM	Main Vac valve closed
8/22/2012	4:34:26 PM	Bypass valve closed
8/22/2012	4:34:26 PM	Bubbler valve closed
8/22/2012	4:34:26 PM	Helium valve opened
8/22/2012	4:34:26 PM	Helium MFC set to  500.000000
8/22/2012	4:34:26 PM	H2 MFC set to  0.000000
8/22/2012	4:34:26 PM	BCl3 MFC set to  0.000000
8/22/2012	4:34:26 PM	PH3 MFC set to  0.000000
8/22/2012	4:34:26 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:34:26 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:34:26 PM	Tube furnace set to 0
8/22/2012	4:34:26 PM	Helium valve closed
8/22/2012	4:34:26 PM	H2 valve closed
8/22/2012	4:34:26 PM	BCl3 valve closed
8/22/2012	4:34:26 PM	PH3 valve closed
8/22/2012	4:34:26 PM	SiCl4 pre valve closed
8/22/2012	4:34:26 PM	SiCl4 post valve closed
8/22/2012	4:34:26 PM	Main Vac valve closed
8/22/2012	4:34:26 PM	Bypass valve closed
8/22/2012	4:34:26 PM	Bubbler valve closed
8/22/2012	4:34:26 PM	Helium MFC set to  0.000000
8/22/2012	4:34:26 PM	H2 MFC set to  0.000000
8/22/2012	4:34:26 PM	BCl3 MFC set to  0.000000
8/22/2012	4:34:26 PM	PH3 MFC set to  0.000000
8/22/2012	4:34:26 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:34:26 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:34:27 PM	Tube furnace set to 0
8/22/2012	4:34:28 PM	Run finished at 4:34 PM
8/22/2012	4:34:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	4:39:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	4:39:43 PM	Recipe started at 4:39 PM
8/22/2012	4:39:43 PM	Helium valve closed
8/22/2012	4:39:43 PM	H2 valve closed
8/22/2012	4:39:43 PM	BCl3 valve closed
8/22/2012	4:39:44 PM	PH3 valve closed
8/22/2012	4:39:44 PM	SiCl4 pre valve closed
8/22/2012	4:39:44 PM	SiCl4 post valve closed
8/22/2012	4:39:44 PM	Main Vac valve closed
8/22/2012	4:39:44 PM	Bubbler valve closed
8/22/2012	4:39:44 PM	Bypass valve opened
8/22/2012	4:39:44 PM	Helium MFC set to  0.000000
8/22/2012	4:39:44 PM	H2 MFC set to  0.000000
8/22/2012	4:39:44 PM	BCl3 MFC set to  0.000000
8/22/2012	4:39:44 PM	PH3 MFC set to  0.000000
8/22/2012	4:39:44 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:39:44 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:39:44 PM	Tube furnace set to 0
8/22/2012	4:41:06 PM	Helium valve closed
8/22/2012	4:41:06 PM	H2 valve closed
8/22/2012	4:41:06 PM	BCl3 valve closed
8/22/2012	4:41:06 PM	PH3 valve closed
8/22/2012	4:41:06 PM	SiCl4 pre valve closed
8/22/2012	4:41:06 PM	SiCl4 post valve closed
8/22/2012	4:41:06 PM	Main Vac valve closed
8/22/2012	4:41:06 PM	Bubbler valve closed
8/22/2012	4:41:06 PM	Bypass valve opened
8/22/2012	4:41:06 PM	Helium MFC set to  0.000000
8/22/2012	4:41:06 PM	H2 MFC set to  0.000000
8/22/2012	4:41:06 PM	BCl3 MFC set to  0.000000
8/22/2012	4:41:06 PM	PH3 MFC set to  0.000000
8/22/2012	4:41:06 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:41:06 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:41:06 PM	Tube furnace set to 0
8/22/2012	4:42:06 PM	Helium valve closed
8/22/2012	4:42:06 PM	H2 valve closed
8/22/2012	4:42:06 PM	BCl3 valve closed
8/22/2012	4:42:06 PM	PH3 valve closed
8/22/2012	4:42:06 PM	SiCl4 pre valve closed
8/22/2012	4:42:06 PM	SiCl4 post valve closed
8/22/2012	4:42:06 PM	Bypass valve closed
8/22/2012	4:42:06 PM	Bubbler valve closed
8/22/2012	4:42:06 PM	Main Vac valve opened
8/22/2012	4:42:06 PM	Helium MFC set to  0.000000
8/22/2012	4:42:06 PM	H2 MFC set to  0.000000
8/22/2012	4:42:06 PM	BCl3 MFC set to  0.000000
8/22/2012	4:42:06 PM	PH3 MFC set to  0.000000
8/22/2012	4:42:06 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:42:06 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:42:06 PM	Tube furnace set to 0
8/22/2012	4:42:07 PM	Run finished at 4:42 PM
8/22/2012	4:42:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	4:53:50 PM	Recipe started at 4:53 PM
8/22/2012	4:53:50 PM	Helium valve closed
8/22/2012	4:53:50 PM	H2 valve closed
8/22/2012	4:53:50 PM	BCl3 valve closed
8/22/2012	4:53:50 PM	PH3 valve closed
8/22/2012	4:53:50 PM	SiCl4 pre valve closed
8/22/2012	4:53:50 PM	SiCl4 post valve closed
8/22/2012	4:53:50 PM	Main Vac valve closed
8/22/2012	4:53:50 PM	Bubbler valve closed
8/22/2012	4:53:50 PM	Bypass valve opened
8/22/2012	4:53:50 PM	Helium MFC set to  0.000000
8/22/2012	4:53:50 PM	H2 MFC set to  0.000000
8/22/2012	4:53:50 PM	BCl3 MFC set to  0.000000
8/22/2012	4:53:50 PM	PH3 MFC set to  0.000000
8/22/2012	4:53:50 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:53:50 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:53:50 PM	Tube furnace set to 150
8/22/2012	4:53:50 PM	Helium valve closed
8/22/2012	4:53:50 PM	H2 valve closed
8/22/2012	4:53:50 PM	BCl3 valve closed
8/22/2012	4:53:50 PM	PH3 valve closed
8/22/2012	4:53:50 PM	SiCl4 pre valve closed
8/22/2012	4:53:50 PM	SiCl4 post valve closed
8/22/2012	4:53:50 PM	Main Vac valve closed
8/22/2012	4:53:50 PM	Bubbler valve closed
8/22/2012	4:53:50 PM	Bypass valve opened
8/22/2012	4:53:50 PM	Helium MFC set to  0.000000
8/22/2012	4:53:50 PM	H2 MFC set to  0.000000
8/22/2012	4:53:50 PM	BCl3 MFC set to  0.000000
8/22/2012	4:53:50 PM	PH3 MFC set to  0.000000
8/22/2012	4:53:50 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:53:50 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:53:50 PM	Tube furnace set to 150
8/22/2012	4:53:51 PM	Helium valve closed
8/22/2012	4:53:51 PM	H2 valve closed
8/22/2012	4:53:51 PM	BCl3 valve closed
8/22/2012	4:53:51 PM	PH3 valve closed
8/22/2012	4:53:51 PM	SiCl4 pre valve closed
8/22/2012	4:53:51 PM	SiCl4 post valve closed
8/22/2012	4:53:51 PM	Bypass valve closed
8/22/2012	4:53:51 PM	Bubbler valve closed
8/22/2012	4:53:51 PM	Main Vac valve opened
8/22/2012	4:53:51 PM	Helium MFC set to  0.000000
8/22/2012	4:53:51 PM	H2 MFC set to  0.000000
8/22/2012	4:53:51 PM	BCl3 MFC set to  0.000000
8/22/2012	4:53:51 PM	PH3 MFC set to  0.000000
8/22/2012	4:53:51 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:53:51 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:53:51 PM	Tube furnace set to 150
8/22/2012	4:53:52 PM	H2 valve closed
8/22/2012	4:53:52 PM	BCl3 valve closed
8/22/2012	4:53:52 PM	PH3 valve closed
8/22/2012	4:53:52 PM	SiCl4 pre valve closed
8/22/2012	4:53:52 PM	SiCl4 post valve closed
8/22/2012	4:53:52 PM	Bypass valve closed
8/22/2012	4:53:52 PM	Bubbler valve closed
8/22/2012	4:53:52 PM	Helium valve opened
8/22/2012	4:53:52 PM	Main Vac valve opened
8/22/2012	4:53:52 PM	Helium MFC set to  20.000000
8/22/2012	4:53:52 PM	H2 MFC set to  0.000000
8/22/2012	4:53:52 PM	BCl3 MFC set to  0.000000
8/22/2012	4:53:52 PM	PH3 MFC set to  0.000000
8/22/2012	4:53:52 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:53:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:53:52 PM	Tube furnace set to 150
8/22/2012	4:54:22 PM	Helium valve closed
8/22/2012	4:54:22 PM	H2 valve closed
8/22/2012	4:54:22 PM	BCl3 valve closed
8/22/2012	4:54:22 PM	PH3 valve closed
8/22/2012	4:54:22 PM	SiCl4 pre valve closed
8/22/2012	4:54:22 PM	SiCl4 post valve closed
8/22/2012	4:54:22 PM	Bypass valve closed
8/22/2012	4:54:22 PM	Bubbler valve closed
8/22/2012	4:54:22 PM	Main Vac valve opened
8/22/2012	4:54:22 PM	Helium MFC set to  0.000000
8/22/2012	4:54:22 PM	H2 MFC set to  0.000000
8/22/2012	4:54:22 PM	BCl3 MFC set to  0.000000
8/22/2012	4:54:22 PM	PH3 MFC set to  0.000000
8/22/2012	4:54:22 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:54:22 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:54:23 PM	Tube furnace set to 150
8/22/2012	4:54:53 PM	H2 valve closed
8/22/2012	4:54:53 PM	BCl3 valve closed
8/22/2012	4:54:53 PM	PH3 valve closed
8/22/2012	4:54:53 PM	SiCl4 pre valve closed
8/22/2012	4:54:53 PM	SiCl4 post valve closed
8/22/2012	4:54:53 PM	Bypass valve closed
8/22/2012	4:54:53 PM	Bubbler valve closed
8/22/2012	4:54:53 PM	Helium valve opened
8/22/2012	4:54:53 PM	Main Vac valve opened
8/22/2012	4:54:53 PM	Helium MFC set to  20.000000
8/22/2012	4:54:53 PM	H2 MFC set to  0.000000
8/22/2012	4:54:53 PM	BCl3 MFC set to  0.000000
8/22/2012	4:54:53 PM	PH3 MFC set to  0.000000
8/22/2012	4:54:53 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:54:53 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:54:53 PM	Tube furnace set to 150
8/22/2012	4:55:23 PM	Helium valve closed
8/22/2012	4:55:23 PM	H2 valve closed
8/22/2012	4:55:23 PM	BCl3 valve closed
8/22/2012	4:55:23 PM	PH3 valve closed
8/22/2012	4:55:23 PM	SiCl4 pre valve closed
8/22/2012	4:55:23 PM	SiCl4 post valve closed
8/22/2012	4:55:23 PM	Bypass valve closed
8/22/2012	4:55:23 PM	Bubbler valve closed
8/22/2012	4:55:23 PM	Main Vac valve opened
8/22/2012	4:55:23 PM	Helium MFC set to  0.000000
8/22/2012	4:55:23 PM	H2 MFC set to  0.000000
8/22/2012	4:55:23 PM	BCl3 MFC set to  0.000000
8/22/2012	4:55:23 PM	PH3 MFC set to  0.000000
8/22/2012	4:55:23 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:55:23 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:55:23 PM	Tube furnace set to 150
8/22/2012	4:55:53 PM	H2 valve closed
8/22/2012	4:55:53 PM	BCl3 valve closed
8/22/2012	4:55:53 PM	PH3 valve closed
8/22/2012	4:55:53 PM	SiCl4 pre valve closed
8/22/2012	4:55:53 PM	SiCl4 post valve closed
8/22/2012	4:55:53 PM	Bypass valve closed
8/22/2012	4:55:53 PM	Bubbler valve closed
8/22/2012	4:55:53 PM	Helium valve opened
8/22/2012	4:55:53 PM	Main Vac valve opened
8/22/2012	4:55:53 PM	Helium MFC set to  20.000000
8/22/2012	4:55:53 PM	H2 MFC set to  0.000000
8/22/2012	4:55:53 PM	BCl3 MFC set to  0.000000
8/22/2012	4:55:53 PM	PH3 MFC set to  0.000000
8/22/2012	4:55:53 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:55:53 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:55:53 PM	Tube furnace set to 150
8/22/2012	4:56:23 PM	Helium valve closed
8/22/2012	4:56:23 PM	H2 valve closed
8/22/2012	4:56:23 PM	BCl3 valve closed
8/22/2012	4:56:23 PM	PH3 valve closed
8/22/2012	4:56:23 PM	SiCl4 pre valve closed
8/22/2012	4:56:23 PM	SiCl4 post valve closed
8/22/2012	4:56:23 PM	Bypass valve closed
8/22/2012	4:56:23 PM	Bubbler valve closed
8/22/2012	4:56:23 PM	Main Vac valve opened
8/22/2012	4:56:23 PM	Helium MFC set to  0.000000
8/22/2012	4:56:23 PM	H2 MFC set to  0.000000
8/22/2012	4:56:23 PM	BCl3 MFC set to  0.000000
8/22/2012	4:56:23 PM	PH3 MFC set to  0.000000
8/22/2012	4:56:23 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:56:23 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:56:24 PM	Tube furnace set to 150
8/22/2012	4:56:54 PM	H2 valve closed
8/22/2012	4:56:54 PM	BCl3 valve closed
8/22/2012	4:56:54 PM	PH3 valve closed
8/22/2012	4:56:54 PM	SiCl4 pre valve closed
8/22/2012	4:56:54 PM	SiCl4 post valve closed
8/22/2012	4:56:54 PM	Bypass valve closed
8/22/2012	4:56:54 PM	Bubbler valve closed
8/22/2012	4:56:54 PM	Helium valve opened
8/22/2012	4:56:54 PM	Main Vac valve opened
8/22/2012	4:56:54 PM	Helium MFC set to  20.000000
8/22/2012	4:56:54 PM	H2 MFC set to  0.000000
8/22/2012	4:56:54 PM	BCl3 MFC set to  0.000000
8/22/2012	4:56:54 PM	PH3 MFC set to  0.000000
8/22/2012	4:56:54 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:56:54 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:56:54 PM	Tube furnace set to 150
8/22/2012	4:57:24 PM	Helium valve closed
8/22/2012	4:57:24 PM	H2 valve closed
8/22/2012	4:57:24 PM	BCl3 valve closed
8/22/2012	4:57:24 PM	PH3 valve closed
8/22/2012	4:57:24 PM	SiCl4 pre valve closed
8/22/2012	4:57:24 PM	SiCl4 post valve closed
8/22/2012	4:57:24 PM	Bypass valve closed
8/22/2012	4:57:24 PM	Bubbler valve closed
8/22/2012	4:57:24 PM	Main Vac valve opened
8/22/2012	4:57:24 PM	Helium MFC set to  0.000000
8/22/2012	4:57:24 PM	H2 MFC set to  0.000000
8/22/2012	4:57:24 PM	BCl3 MFC set to  0.000000
8/22/2012	4:57:24 PM	PH3 MFC set to  0.000000
8/22/2012	4:57:24 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:57:24 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:57:24 PM	Tube furnace set to 150
8/22/2012	4:57:54 PM	H2 valve closed
8/22/2012	4:57:54 PM	BCl3 valve closed
8/22/2012	4:57:54 PM	PH3 valve closed
8/22/2012	4:57:54 PM	SiCl4 pre valve closed
8/22/2012	4:57:54 PM	SiCl4 post valve closed
8/22/2012	4:57:54 PM	Bypass valve closed
8/22/2012	4:57:54 PM	Bubbler valve closed
8/22/2012	4:57:54 PM	Helium valve opened
8/22/2012	4:57:54 PM	Main Vac valve opened
8/22/2012	4:57:54 PM	Helium MFC set to  20.000000
8/22/2012	4:57:54 PM	H2 MFC set to  0.000000
8/22/2012	4:57:54 PM	BCl3 MFC set to  0.000000
8/22/2012	4:57:54 PM	PH3 MFC set to  0.000000
8/22/2012	4:57:54 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:57:54 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:57:54 PM	Tube furnace set to 150
8/22/2012	4:58:24 PM	Helium valve closed
8/22/2012	4:58:24 PM	H2 valve closed
8/22/2012	4:58:24 PM	BCl3 valve closed
8/22/2012	4:58:24 PM	PH3 valve closed
8/22/2012	4:58:24 PM	SiCl4 pre valve closed
8/22/2012	4:58:24 PM	SiCl4 post valve closed
8/22/2012	4:58:24 PM	Bypass valve closed
8/22/2012	4:58:24 PM	Bubbler valve closed
8/22/2012	4:58:24 PM	Main Vac valve opened
8/22/2012	4:58:24 PM	Helium MFC set to  0.000000
8/22/2012	4:58:24 PM	H2 MFC set to  0.000000
8/22/2012	4:58:24 PM	BCl3 MFC set to  0.000000
8/22/2012	4:58:24 PM	PH3 MFC set to  0.000000
8/22/2012	4:58:24 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:58:24 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:58:25 PM	Tube furnace set to 150
8/22/2012	4:58:55 PM	H2 valve closed
8/22/2012	4:58:55 PM	BCl3 valve closed
8/22/2012	4:58:55 PM	PH3 valve closed
8/22/2012	4:58:55 PM	SiCl4 pre valve closed
8/22/2012	4:58:55 PM	SiCl4 post valve closed
8/22/2012	4:58:55 PM	Bypass valve closed
8/22/2012	4:58:55 PM	Bubbler valve closed
8/22/2012	4:58:55 PM	Helium valve opened
8/22/2012	4:58:55 PM	Main Vac valve opened
8/22/2012	4:58:55 PM	Helium MFC set to  20.000000
8/22/2012	4:58:55 PM	H2 MFC set to  0.000000
8/22/2012	4:58:55 PM	BCl3 MFC set to  0.000000
8/22/2012	4:58:55 PM	PH3 MFC set to  0.000000
8/22/2012	4:58:55 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:58:55 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:58:55 PM	Tube furnace set to 150
8/22/2012	4:59:25 PM	Helium valve closed
8/22/2012	4:59:25 PM	H2 valve closed
8/22/2012	4:59:25 PM	BCl3 valve closed
8/22/2012	4:59:25 PM	PH3 valve closed
8/22/2012	4:59:25 PM	SiCl4 pre valve closed
8/22/2012	4:59:25 PM	SiCl4 post valve closed
8/22/2012	4:59:25 PM	Bypass valve closed
8/22/2012	4:59:25 PM	Bubbler valve closed
8/22/2012	4:59:25 PM	Main Vac valve opened
8/22/2012	4:59:25 PM	Helium MFC set to  0.000000
8/22/2012	4:59:25 PM	H2 MFC set to  0.000000
8/22/2012	4:59:25 PM	BCl3 MFC set to  0.000000
8/22/2012	4:59:25 PM	PH3 MFC set to  0.000000
8/22/2012	4:59:25 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:59:25 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:59:25 PM	Tube furnace set to 150
8/22/2012	4:59:55 PM	H2 valve closed
8/22/2012	4:59:55 PM	BCl3 valve closed
8/22/2012	4:59:55 PM	PH3 valve closed
8/22/2012	4:59:55 PM	SiCl4 pre valve closed
8/22/2012	4:59:55 PM	SiCl4 post valve closed
8/22/2012	4:59:55 PM	Bypass valve closed
8/22/2012	4:59:55 PM	Bubbler valve closed
8/22/2012	4:59:55 PM	Helium valve opened
8/22/2012	4:59:55 PM	Main Vac valve opened
8/22/2012	4:59:55 PM	Helium MFC set to  20.000000
8/22/2012	4:59:55 PM	H2 MFC set to  0.000000
8/22/2012	4:59:55 PM	BCl3 MFC set to  0.000000
8/22/2012	4:59:55 PM	PH3 MFC set to  0.000000
8/22/2012	4:59:55 PM	SiCl4 MFC set to  0.000000
8/22/2012	4:59:55 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	4:59:55 PM	Tube furnace set to 150
8/22/2012	5:00:25 PM	Helium valve closed
8/22/2012	5:00:25 PM	H2 valve closed
8/22/2012	5:00:25 PM	BCl3 valve closed
8/22/2012	5:00:25 PM	PH3 valve closed
8/22/2012	5:00:25 PM	SiCl4 pre valve closed
8/22/2012	5:00:25 PM	SiCl4 post valve closed
8/22/2012	5:00:25 PM	Bypass valve closed
8/22/2012	5:00:25 PM	Bubbler valve closed
8/22/2012	5:00:25 PM	Main Vac valve opened
8/22/2012	5:00:26 PM	Helium MFC set to  0.000000
8/22/2012	5:00:26 PM	H2 MFC set to  0.000000
8/22/2012	5:00:26 PM	BCl3 MFC set to  0.000000
8/22/2012	5:00:26 PM	PH3 MFC set to  0.000000
8/22/2012	5:00:26 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:00:26 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:00:26 PM	Tube furnace set to 150
8/22/2012	5:00:56 PM	H2 valve closed
8/22/2012	5:00:56 PM	BCl3 valve closed
8/22/2012	5:00:56 PM	PH3 valve closed
8/22/2012	5:00:56 PM	SiCl4 pre valve closed
8/22/2012	5:00:56 PM	SiCl4 post valve closed
8/22/2012	5:00:56 PM	Bypass valve closed
8/22/2012	5:00:56 PM	Bubbler valve closed
8/22/2012	5:00:56 PM	Helium valve opened
8/22/2012	5:00:56 PM	Main Vac valve opened
8/22/2012	5:00:56 PM	Helium MFC set to  20.000000
8/22/2012	5:00:56 PM	H2 MFC set to  0.000000
8/22/2012	5:00:56 PM	BCl3 MFC set to  0.000000
8/22/2012	5:00:56 PM	PH3 MFC set to  0.000000
8/22/2012	5:00:56 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:00:56 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:00:56 PM	Tube furnace set to 150
8/22/2012	5:01:26 PM	Helium valve closed
8/22/2012	5:01:26 PM	H2 valve closed
8/22/2012	5:01:26 PM	BCl3 valve closed
8/22/2012	5:01:26 PM	PH3 valve closed
8/22/2012	5:01:26 PM	SiCl4 pre valve closed
8/22/2012	5:01:26 PM	SiCl4 post valve closed
8/22/2012	5:01:26 PM	Bypass valve closed
8/22/2012	5:01:26 PM	Bubbler valve closed
8/22/2012	5:01:26 PM	Main Vac valve opened
8/22/2012	5:01:26 PM	Helium MFC set to  0.000000
8/22/2012	5:01:26 PM	H2 MFC set to  0.000000
8/22/2012	5:01:26 PM	BCl3 MFC set to  0.000000
8/22/2012	5:01:26 PM	PH3 MFC set to  0.000000
8/22/2012	5:01:26 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:01:26 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:01:26 PM	Tube furnace set to 150
8/22/2012	5:01:56 PM	H2 valve closed
8/22/2012	5:01:56 PM	BCl3 valve closed
8/22/2012	5:01:56 PM	PH3 valve closed
8/22/2012	5:01:56 PM	SiCl4 pre valve closed
8/22/2012	5:01:56 PM	SiCl4 post valve closed
8/22/2012	5:01:56 PM	Bypass valve closed
8/22/2012	5:01:56 PM	Bubbler valve closed
8/22/2012	5:01:56 PM	Helium valve opened
8/22/2012	5:01:56 PM	Main Vac valve opened
8/22/2012	5:01:56 PM	Helium MFC set to  20.000000
8/22/2012	5:01:56 PM	H2 MFC set to  0.000000
8/22/2012	5:01:56 PM	BCl3 MFC set to  0.000000
8/22/2012	5:01:56 PM	PH3 MFC set to  0.000000
8/22/2012	5:01:56 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:01:56 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:01:56 PM	Tube furnace set to 150
8/22/2012	5:02:27 PM	Helium valve closed
8/22/2012	5:02:27 PM	H2 valve closed
8/22/2012	5:02:27 PM	BCl3 valve closed
8/22/2012	5:02:27 PM	PH3 valve closed
8/22/2012	5:02:27 PM	SiCl4 pre valve closed
8/22/2012	5:02:27 PM	SiCl4 post valve closed
8/22/2012	5:02:27 PM	Bypass valve closed
8/22/2012	5:02:27 PM	Bubbler valve closed
8/22/2012	5:02:27 PM	Main Vac valve opened
8/22/2012	5:02:27 PM	Helium MFC set to  0.000000
8/22/2012	5:02:27 PM	H2 MFC set to  0.000000
8/22/2012	5:02:27 PM	BCl3 MFC set to  0.000000
8/22/2012	5:02:27 PM	PH3 MFC set to  0.000000
8/22/2012	5:02:27 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:02:27 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:02:27 PM	Tube furnace set to 150
8/22/2012	5:02:57 PM	H2 valve closed
8/22/2012	5:02:57 PM	BCl3 valve closed
8/22/2012	5:02:57 PM	PH3 valve closed
8/22/2012	5:02:57 PM	SiCl4 pre valve closed
8/22/2012	5:02:57 PM	SiCl4 post valve closed
8/22/2012	5:02:57 PM	Bypass valve closed
8/22/2012	5:02:57 PM	Bubbler valve closed
8/22/2012	5:02:57 PM	Helium valve opened
8/22/2012	5:02:57 PM	Main Vac valve opened
8/22/2012	5:02:57 PM	Helium MFC set to  20.000000
8/22/2012	5:02:57 PM	H2 MFC set to  0.000000
8/22/2012	5:02:57 PM	BCl3 MFC set to  0.000000
8/22/2012	5:02:57 PM	PH3 MFC set to  0.000000
8/22/2012	5:02:57 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:02:57 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:02:57 PM	Tube furnace set to 150
8/22/2012	5:03:27 PM	Helium valve closed
8/22/2012	5:03:27 PM	H2 valve closed
8/22/2012	5:03:27 PM	BCl3 valve closed
8/22/2012	5:03:27 PM	PH3 valve closed
8/22/2012	5:03:27 PM	SiCl4 pre valve closed
8/22/2012	5:03:27 PM	SiCl4 post valve closed
8/22/2012	5:03:27 PM	Bypass valve closed
8/22/2012	5:03:27 PM	Bubbler valve closed
8/22/2012	5:03:27 PM	Main Vac valve opened
8/22/2012	5:03:27 PM	Helium MFC set to  0.000000
8/22/2012	5:03:27 PM	H2 MFC set to  0.000000
8/22/2012	5:03:27 PM	BCl3 MFC set to  0.000000
8/22/2012	5:03:27 PM	PH3 MFC set to  0.000000
8/22/2012	5:03:27 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:03:27 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:03:27 PM	Tube furnace set to 150
8/22/2012	5:03:28 PM	Run finished at 5:03 PM
8/22/2012	5:11:30 PM	Recipe started at 5:11 PM
8/22/2012	5:11:30 PM	Helium valve closed
8/22/2012	5:11:30 PM	H2 valve closed
8/22/2012	5:11:30 PM	BCl3 valve closed
8/22/2012	5:11:30 PM	PH3 valve closed
8/22/2012	5:11:30 PM	SiCl4 pre valve closed
8/22/2012	5:11:30 PM	SiCl4 post valve closed
8/22/2012	5:11:30 PM	Main Vac valve closed
8/22/2012	5:11:30 PM	Bubbler valve closed
8/22/2012	5:11:30 PM	Bypass valve opened
8/22/2012	5:11:30 PM	Helium MFC set to  0.000000
8/22/2012	5:11:30 PM	H2 MFC set to  0.000000
8/22/2012	5:11:30 PM	BCl3 MFC set to  0.000000
8/22/2012	5:11:30 PM	PH3 MFC set to  0.000000
8/22/2012	5:11:30 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:11:30 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:11:31 PM	Tube furnace set to 150
8/22/2012	5:11:31 PM	Helium valve closed
8/22/2012	5:11:31 PM	H2 valve closed
8/22/2012	5:11:31 PM	BCl3 valve closed
8/22/2012	5:11:31 PM	PH3 valve closed
8/22/2012	5:11:31 PM	SiCl4 pre valve closed
8/22/2012	5:11:31 PM	SiCl4 post valve closed
8/22/2012	5:11:31 PM	Main Vac valve closed
8/22/2012	5:11:31 PM	Bubbler valve closed
8/22/2012	5:11:31 PM	Bypass valve opened
8/22/2012	5:11:31 PM	Helium MFC set to  0.000000
8/22/2012	5:11:31 PM	H2 MFC set to  0.000000
8/22/2012	5:11:31 PM	BCl3 MFC set to  0.000000
8/22/2012	5:11:31 PM	PH3 MFC set to  0.000000
8/22/2012	5:11:31 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:11:31 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:11:31 PM	Tube furnace set to 150
8/22/2012	5:11:33 PM	Helium valve closed
8/22/2012	5:11:33 PM	H2 valve closed
8/22/2012	5:11:33 PM	BCl3 valve closed
8/22/2012	5:11:33 PM	PH3 valve closed
8/22/2012	5:11:33 PM	SiCl4 pre valve closed
8/22/2012	5:11:33 PM	SiCl4 post valve closed
8/22/2012	5:11:33 PM	Bypass valve closed
8/22/2012	5:11:33 PM	Bubbler valve closed
8/22/2012	5:11:33 PM	Main Vac valve opened
8/22/2012	5:11:33 PM	Helium MFC set to  0.000000
8/22/2012	5:11:33 PM	H2 MFC set to  0.000000
8/22/2012	5:11:33 PM	BCl3 MFC set to  0.000000
8/22/2012	5:11:33 PM	PH3 MFC set to  0.000000
8/22/2012	5:11:33 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:11:33 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:11:33 PM	Tube furnace set to 150
8/22/2012	5:11:36 PM	H2 valve closed
8/22/2012	5:11:36 PM	BCl3 valve closed
8/22/2012	5:11:36 PM	PH3 valve closed
8/22/2012	5:11:36 PM	SiCl4 pre valve closed
8/22/2012	5:11:36 PM	SiCl4 post valve closed
8/22/2012	5:11:36 PM	Bypass valve closed
8/22/2012	5:11:36 PM	Bubbler valve closed
8/22/2012	5:11:36 PM	Helium valve opened
8/22/2012	5:11:36 PM	Main Vac valve opened
8/22/2012	5:11:36 PM	Helium MFC set to  20.000000
8/22/2012	5:11:36 PM	H2 MFC set to  0.000000
8/22/2012	5:11:36 PM	BCl3 MFC set to  0.000000
8/22/2012	5:11:36 PM	PH3 MFC set to  0.000000
8/22/2012	5:11:36 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:11:36 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:11:36 PM	Tube furnace set to 150
8/22/2012	5:12:06 PM	Helium valve closed
8/22/2012	5:12:06 PM	H2 valve closed
8/22/2012	5:12:06 PM	BCl3 valve closed
8/22/2012	5:12:06 PM	PH3 valve closed
8/22/2012	5:12:06 PM	SiCl4 pre valve closed
8/22/2012	5:12:06 PM	SiCl4 post valve closed
8/22/2012	5:12:06 PM	Bypass valve closed
8/22/2012	5:12:06 PM	Bubbler valve closed
8/22/2012	5:12:06 PM	Main Vac valve opened
8/22/2012	5:12:06 PM	Helium MFC set to  0.000000
8/22/2012	5:12:06 PM	H2 MFC set to  0.000000
8/22/2012	5:12:06 PM	BCl3 MFC set to  0.000000
8/22/2012	5:12:06 PM	PH3 MFC set to  0.000000
8/22/2012	5:12:06 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:12:06 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:12:06 PM	Tube furnace set to 150
8/22/2012	5:12:36 PM	H2 valve closed
8/22/2012	5:12:36 PM	BCl3 valve closed
8/22/2012	5:12:36 PM	PH3 valve closed
8/22/2012	5:12:36 PM	SiCl4 pre valve closed
8/22/2012	5:12:36 PM	SiCl4 post valve closed
8/22/2012	5:12:36 PM	Bypass valve closed
8/22/2012	5:12:36 PM	Bubbler valve closed
8/22/2012	5:12:36 PM	Helium valve opened
8/22/2012	5:12:36 PM	Main Vac valve opened
8/22/2012	5:12:36 PM	Helium MFC set to  20.000000
8/22/2012	5:12:36 PM	H2 MFC set to  0.000000
8/22/2012	5:12:36 PM	BCl3 MFC set to  0.000000
8/22/2012	5:12:36 PM	PH3 MFC set to  0.000000
8/22/2012	5:12:36 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:12:36 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:12:36 PM	Tube furnace set to 150
8/22/2012	5:13:06 PM	Helium valve closed
8/22/2012	5:13:06 PM	H2 valve closed
8/22/2012	5:13:06 PM	BCl3 valve closed
8/22/2012	5:13:06 PM	PH3 valve closed
8/22/2012	5:13:06 PM	SiCl4 pre valve closed
8/22/2012	5:13:06 PM	SiCl4 post valve closed
8/22/2012	5:13:06 PM	Bypass valve closed
8/22/2012	5:13:06 PM	Bubbler valve closed
8/22/2012	5:13:06 PM	Main Vac valve opened
8/22/2012	5:13:06 PM	Helium MFC set to  0.000000
8/22/2012	5:13:06 PM	H2 MFC set to  0.000000
8/22/2012	5:13:06 PM	BCl3 MFC set to  0.000000
8/22/2012	5:13:06 PM	PH3 MFC set to  0.000000
8/22/2012	5:13:06 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:13:06 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:13:07 PM	Tube furnace set to 150
8/22/2012	5:13:37 PM	H2 valve closed
8/22/2012	5:13:37 PM	BCl3 valve closed
8/22/2012	5:13:37 PM	PH3 valve closed
8/22/2012	5:13:37 PM	SiCl4 pre valve closed
8/22/2012	5:13:37 PM	SiCl4 post valve closed
8/22/2012	5:13:37 PM	Bypass valve closed
8/22/2012	5:13:37 PM	Bubbler valve closed
8/22/2012	5:13:37 PM	Helium valve opened
8/22/2012	5:13:37 PM	Main Vac valve opened
8/22/2012	5:13:37 PM	Helium MFC set to  20.000000
8/22/2012	5:13:37 PM	H2 MFC set to  0.000000
8/22/2012	5:13:37 PM	BCl3 MFC set to  0.000000
8/22/2012	5:13:37 PM	PH3 MFC set to  0.000000
8/22/2012	5:13:37 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:13:37 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:13:37 PM	Tube furnace set to 150
8/22/2012	5:14:07 PM	Helium valve closed
8/22/2012	5:14:07 PM	H2 valve closed
8/22/2012	5:14:07 PM	BCl3 valve closed
8/22/2012	5:14:07 PM	PH3 valve closed
8/22/2012	5:14:07 PM	SiCl4 pre valve closed
8/22/2012	5:14:07 PM	SiCl4 post valve closed
8/22/2012	5:14:07 PM	Bypass valve closed
8/22/2012	5:14:07 PM	Bubbler valve closed
8/22/2012	5:14:07 PM	Main Vac valve opened
8/22/2012	5:14:07 PM	Helium MFC set to  0.000000
8/22/2012	5:14:07 PM	H2 MFC set to  0.000000
8/22/2012	5:14:07 PM	BCl3 MFC set to  0.000000
8/22/2012	5:14:07 PM	PH3 MFC set to  0.000000
8/22/2012	5:14:07 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:14:07 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:14:07 PM	Tube furnace set to 150
8/22/2012	5:14:37 PM	H2 valve closed
8/22/2012	5:14:37 PM	BCl3 valve closed
8/22/2012	5:14:37 PM	PH3 valve closed
8/22/2012	5:14:37 PM	SiCl4 pre valve closed
8/22/2012	5:14:37 PM	SiCl4 post valve closed
8/22/2012	5:14:37 PM	Bypass valve closed
8/22/2012	5:14:37 PM	Bubbler valve closed
8/22/2012	5:14:37 PM	Helium valve opened
8/22/2012	5:14:37 PM	Main Vac valve opened
8/22/2012	5:14:37 PM	Helium MFC set to  20.000000
8/22/2012	5:14:37 PM	H2 MFC set to  0.000000
8/22/2012	5:14:37 PM	BCl3 MFC set to  0.000000
8/22/2012	5:14:37 PM	PH3 MFC set to  0.000000
8/22/2012	5:14:37 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:14:37 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:14:37 PM	Tube furnace set to 150
8/22/2012	5:15:07 PM	Helium valve closed
8/22/2012	5:15:07 PM	H2 valve closed
8/22/2012	5:15:07 PM	BCl3 valve closed
8/22/2012	5:15:07 PM	PH3 valve closed
8/22/2012	5:15:07 PM	SiCl4 pre valve closed
8/22/2012	5:15:07 PM	SiCl4 post valve closed
8/22/2012	5:15:07 PM	Bypass valve closed
8/22/2012	5:15:07 PM	Bubbler valve closed
8/22/2012	5:15:07 PM	Main Vac valve opened
8/22/2012	5:15:07 PM	Helium MFC set to  0.000000
8/22/2012	5:15:07 PM	H2 MFC set to  0.000000
8/22/2012	5:15:07 PM	BCl3 MFC set to  0.000000
8/22/2012	5:15:07 PM	PH3 MFC set to  0.000000
8/22/2012	5:15:07 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:15:08 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:15:08 PM	Tube furnace set to 150
8/22/2012	5:15:38 PM	H2 valve closed
8/22/2012	5:15:38 PM	BCl3 valve closed
8/22/2012	5:15:38 PM	PH3 valve closed
8/22/2012	5:15:38 PM	SiCl4 pre valve closed
8/22/2012	5:15:38 PM	SiCl4 post valve closed
8/22/2012	5:15:38 PM	Bypass valve closed
8/22/2012	5:15:38 PM	Bubbler valve closed
8/22/2012	5:15:38 PM	Helium valve opened
8/22/2012	5:15:38 PM	Main Vac valve opened
8/22/2012	5:15:38 PM	Helium MFC set to  20.000000
8/22/2012	5:15:38 PM	H2 MFC set to  0.000000
8/22/2012	5:15:38 PM	BCl3 MFC set to  0.000000
8/22/2012	5:15:38 PM	PH3 MFC set to  0.000000
8/22/2012	5:15:38 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:15:38 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:15:38 PM	Tube furnace set to 150
8/22/2012	5:16:08 PM	Helium valve closed
8/22/2012	5:16:08 PM	H2 valve closed
8/22/2012	5:16:08 PM	BCl3 valve closed
8/22/2012	5:16:08 PM	PH3 valve closed
8/22/2012	5:16:08 PM	SiCl4 pre valve closed
8/22/2012	5:16:08 PM	SiCl4 post valve closed
8/22/2012	5:16:08 PM	Bypass valve closed
8/22/2012	5:16:08 PM	Bubbler valve closed
8/22/2012	5:16:08 PM	Main Vac valve opened
8/22/2012	5:16:08 PM	Helium MFC set to  0.000000
8/22/2012	5:16:08 PM	H2 MFC set to  0.000000
8/22/2012	5:16:08 PM	BCl3 MFC set to  0.000000
8/22/2012	5:16:08 PM	PH3 MFC set to  0.000000
8/22/2012	5:16:08 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:16:08 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:16:08 PM	Tube furnace set to 150
8/22/2012	5:16:38 PM	H2 valve closed
8/22/2012	5:16:38 PM	BCl3 valve closed
8/22/2012	5:16:38 PM	PH3 valve closed
8/22/2012	5:16:38 PM	SiCl4 pre valve closed
8/22/2012	5:16:38 PM	SiCl4 post valve closed
8/22/2012	5:16:38 PM	Bypass valve closed
8/22/2012	5:16:38 PM	Bubbler valve closed
8/22/2012	5:16:38 PM	Helium valve opened
8/22/2012	5:16:38 PM	Main Vac valve opened
8/22/2012	5:16:38 PM	Helium MFC set to  20.000000
8/22/2012	5:16:38 PM	H2 MFC set to  0.000000
8/22/2012	5:16:38 PM	BCl3 MFC set to  0.000000
8/22/2012	5:16:38 PM	PH3 MFC set to  0.000000
8/22/2012	5:16:38 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:16:38 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:16:38 PM	Tube furnace set to 150
8/22/2012	5:17:08 PM	Helium valve closed
8/22/2012	5:17:08 PM	H2 valve closed
8/22/2012	5:17:08 PM	BCl3 valve closed
8/22/2012	5:17:08 PM	PH3 valve closed
8/22/2012	5:17:08 PM	SiCl4 pre valve closed
8/22/2012	5:17:09 PM	SiCl4 post valve closed
8/22/2012	5:17:09 PM	Bypass valve closed
8/22/2012	5:17:09 PM	Bubbler valve closed
8/22/2012	5:17:09 PM	Main Vac valve opened
8/22/2012	5:17:09 PM	Helium MFC set to  0.000000
8/22/2012	5:17:09 PM	H2 MFC set to  0.000000
8/22/2012	5:17:09 PM	BCl3 MFC set to  0.000000
8/22/2012	5:17:09 PM	PH3 MFC set to  0.000000
8/22/2012	5:17:09 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:17:09 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:17:09 PM	Tube furnace set to 150
8/22/2012	5:17:39 PM	H2 valve closed
8/22/2012	5:17:39 PM	BCl3 valve closed
8/22/2012	5:17:39 PM	PH3 valve closed
8/22/2012	5:17:39 PM	SiCl4 pre valve closed
8/22/2012	5:17:39 PM	SiCl4 post valve closed
8/22/2012	5:17:39 PM	Bypass valve closed
8/22/2012	5:17:39 PM	Bubbler valve closed
8/22/2012	5:17:39 PM	Helium valve opened
8/22/2012	5:17:39 PM	Main Vac valve opened
8/22/2012	5:17:39 PM	Helium MFC set to  20.000000
8/22/2012	5:17:39 PM	H2 MFC set to  0.000000
8/22/2012	5:17:39 PM	BCl3 MFC set to  0.000000
8/22/2012	5:17:39 PM	PH3 MFC set to  0.000000
8/22/2012	5:17:39 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:17:39 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:17:39 PM	Tube furnace set to 150
8/22/2012	5:18:09 PM	Helium valve closed
8/22/2012	5:18:09 PM	H2 valve closed
8/22/2012	5:18:09 PM	BCl3 valve closed
8/22/2012	5:18:09 PM	PH3 valve closed
8/22/2012	5:18:09 PM	SiCl4 pre valve closed
8/22/2012	5:18:09 PM	SiCl4 post valve closed
8/22/2012	5:18:09 PM	Bypass valve closed
8/22/2012	5:18:09 PM	Bubbler valve closed
8/22/2012	5:18:09 PM	Main Vac valve opened
8/22/2012	5:18:09 PM	Helium MFC set to  0.000000
8/22/2012	5:18:09 PM	H2 MFC set to  0.000000
8/22/2012	5:18:09 PM	BCl3 MFC set to  0.000000
8/22/2012	5:18:09 PM	PH3 MFC set to  0.000000
8/22/2012	5:18:09 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:18:09 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:18:09 PM	Tube furnace set to 150
8/22/2012	5:18:39 PM	H2 valve closed
8/22/2012	5:18:39 PM	BCl3 valve closed
8/22/2012	5:18:39 PM	PH3 valve closed
8/22/2012	5:18:39 PM	SiCl4 pre valve closed
8/22/2012	5:18:39 PM	SiCl4 post valve closed
8/22/2012	5:18:39 PM	Bypass valve closed
8/22/2012	5:18:39 PM	Bubbler valve closed
8/22/2012	5:18:39 PM	Helium valve opened
8/22/2012	5:18:39 PM	Main Vac valve opened
8/22/2012	5:18:39 PM	Helium MFC set to  20.000000
8/22/2012	5:18:39 PM	H2 MFC set to  0.000000
8/22/2012	5:18:39 PM	BCl3 MFC set to  0.000000
8/22/2012	5:18:39 PM	PH3 MFC set to  0.000000
8/22/2012	5:18:39 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:18:39 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:18:40 PM	Tube furnace set to 150
8/22/2012	5:19:10 PM	Helium valve closed
8/22/2012	5:19:10 PM	H2 valve closed
8/22/2012	5:19:10 PM	BCl3 valve closed
8/22/2012	5:19:10 PM	PH3 valve closed
8/22/2012	5:19:10 PM	SiCl4 pre valve closed
8/22/2012	5:19:10 PM	SiCl4 post valve closed
8/22/2012	5:19:10 PM	Bypass valve closed
8/22/2012	5:19:10 PM	Bubbler valve closed
8/22/2012	5:19:10 PM	Main Vac valve opened
8/22/2012	5:19:10 PM	Helium MFC set to  0.000000
8/22/2012	5:19:10 PM	H2 MFC set to  0.000000
8/22/2012	5:19:10 PM	BCl3 MFC set to  0.000000
8/22/2012	5:19:10 PM	PH3 MFC set to  0.000000
8/22/2012	5:19:10 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:19:10 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:19:10 PM	Tube furnace set to 150
8/22/2012	5:19:34 PM	Run aborted at 5:19 PM
8/22/2012	5:19:34 PM	Helium valve closed
8/22/2012	5:19:34 PM	H2 valve closed
8/22/2012	5:19:34 PM	BCl3 valve closed
8/22/2012	5:19:34 PM	PH3 valve closed
8/22/2012	5:19:34 PM	SiCl4 pre valve closed
8/22/2012	5:19:34 PM	SiCl4 post valve closed
8/22/2012	5:19:34 PM	Bypass valve closed
8/22/2012	5:19:34 PM	Main Vac valve closed
8/22/2012	5:19:34 PM	Bubbler valve closed
8/22/2012	5:19:34 PM	Helium MFC set to  0.000000
8/22/2012	5:19:34 PM	H2 MFC set to  0.000000
8/22/2012	5:19:34 PM	BCl3 MFC set to  0.000000
8/22/2012	5:19:34 PM	PH3 MFC set to  0.000000
8/22/2012	5:19:34 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:19:34 PM	Tube furnace set to 0
8/22/2012	5:19:37 PM	Main Vac valve opened
8/22/2012	5:19:53 PM	Main Vac valve closed
8/22/2012	5:20:05 PM	Main Vac valve opened
8/22/2012	5:21:39 PM	Recipe started at 5:21 PM
8/22/2012	5:21:39 PM	Helium valve closed
8/22/2012	5:21:39 PM	H2 valve closed
8/22/2012	5:21:39 PM	BCl3 valve closed
8/22/2012	5:21:39 PM	PH3 valve closed
8/22/2012	5:21:39 PM	SiCl4 pre valve closed
8/22/2012	5:21:39 PM	SiCl4 post valve closed
8/22/2012	5:21:39 PM	Main Vac valve closed
8/22/2012	5:21:39 PM	Bypass valve closed
8/22/2012	5:21:39 PM	Bubbler valve closed
8/22/2012	5:21:39 PM	Helium MFC set to  0.000000
8/22/2012	5:21:39 PM	H2 MFC set to  0.000000
8/22/2012	5:21:39 PM	BCl3 MFC set to  0.000000
8/22/2012	5:21:39 PM	PH3 MFC set to  0.000000
8/22/2012	5:21:39 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:21:39 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:21:40 PM	Tube furnace set to 0
8/22/2012	5:21:43 PM	Helium valve closed
8/22/2012	5:21:43 PM	BCl3 valve closed
8/22/2012	5:21:43 PM	PH3 valve closed
8/22/2012	5:21:43 PM	SiCl4 pre valve closed
8/22/2012	5:21:43 PM	SiCl4 post valve closed
8/22/2012	5:21:43 PM	Main Vac valve closed
8/22/2012	5:21:43 PM	Bypass valve closed
8/22/2012	5:21:43 PM	Bubbler valve closed
8/22/2012	5:21:43 PM	H2 valve opened
8/22/2012	5:21:43 PM	Helium MFC set to  0.000000
8/22/2012	5:21:43 PM	H2 MFC set to  500.000000
8/22/2012	5:21:43 PM	BCl3 MFC set to  0.000000
8/22/2012	5:21:43 PM	PH3 MFC set to  0.000000
8/22/2012	5:21:43 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:21:43 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:21:43 PM	Tube furnace set to 50
8/22/2012	5:22:54 PM	Helium valve closed
8/22/2012	5:22:54 PM	BCl3 valve closed
8/22/2012	5:22:54 PM	PH3 valve closed
8/22/2012	5:22:54 PM	SiCl4 pre valve closed
8/22/2012	5:22:54 PM	SiCl4 post valve closed
8/22/2012	5:22:54 PM	Main Vac valve closed
8/22/2012	5:22:54 PM	Bypass valve closed
8/22/2012	5:22:54 PM	H2 valve opened
8/22/2012	5:22:54 PM	Bubbler valve opened
8/22/2012	5:22:54 PM	Helium MFC set to  0.000000
8/22/2012	5:22:54 PM	H2 MFC set to  500.000000
8/22/2012	5:22:54 PM	BCl3 MFC set to  0.000000
8/22/2012	5:22:54 PM	PH3 MFC set to  0.000000
8/22/2012	5:22:54 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:22:54 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:22:54 PM	Tube furnace set to 50
8/22/2012	5:22:55 PM	Helium valve closed
8/22/2012	5:22:55 PM	BCl3 valve closed
8/22/2012	5:22:55 PM	PH3 valve closed
8/22/2012	5:22:55 PM	SiCl4 pre valve closed
8/22/2012	5:22:55 PM	SiCl4 post valve closed
8/22/2012	5:22:55 PM	Main Vac valve closed
8/22/2012	5:22:55 PM	Bypass valve closed
8/22/2012	5:22:55 PM	H2 valve opened
8/22/2012	5:22:55 PM	Bubbler valve opened
8/22/2012	5:22:55 PM	Helium MFC set to  0.000000
8/22/2012	5:22:56 PM	H2 MFC set to  450.000000
8/22/2012	5:22:56 PM	BCl3 MFC set to  0.000000
8/22/2012	5:22:56 PM	PH3 MFC set to  0.000000
8/22/2012	5:22:56 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:22:56 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:22:56 PM	Tube furnace set to 1000
8/22/2012	5:42:56 PM	Helium valve closed
8/22/2012	5:42:56 PM	PH3 valve closed
8/22/2012	5:42:56 PM	Main Vac valve closed
8/22/2012	5:42:56 PM	Bypass valve closed
8/22/2012	5:42:56 PM	H2 valve opened
8/22/2012	5:42:56 PM	BCl3 valve opened
8/22/2012	5:42:56 PM	SiCl4 pre valve opened
8/22/2012	5:42:56 PM	SiCl4 post valve opened
8/22/2012	5:42:56 PM	Bubbler valve opened
8/22/2012	5:42:56 PM	Helium MFC set to  0.000000
8/22/2012	5:42:56 PM	H2 MFC set to  450.000000
8/22/2012	5:42:56 PM	BCl3 MFC set to  1.200000
8/22/2012	5:42:56 PM	PH3 MFC set to  0.000000
8/22/2012	5:42:56 PM	SiCl4 MFC set to  50.000000
8/22/2012	5:42:56 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:42:56 PM	Tube furnace set to 1000
8/22/2012	5:57:56 PM	Helium valve closed
8/22/2012	5:57:56 PM	BCl3 valve closed
8/22/2012	5:57:56 PM	PH3 valve closed
8/22/2012	5:57:56 PM	SiCl4 pre valve closed
8/22/2012	5:57:56 PM	SiCl4 post valve closed
8/22/2012	5:57:56 PM	Main Vac valve closed
8/22/2012	5:57:56 PM	Bypass valve closed
8/22/2012	5:57:56 PM	H2 valve opened
8/22/2012	5:57:56 PM	Bubbler valve opened
8/22/2012	5:57:56 PM	Helium MFC set to  0.000000
8/22/2012	5:57:56 PM	H2 MFC set to  500.000000
8/22/2012	5:57:56 PM	BCl3 MFC set to  0.000000
8/22/2012	5:57:56 PM	PH3 MFC set to  0.000000
8/22/2012	5:57:56 PM	SiCl4 MFC set to  0.000000
8/22/2012	5:57:56 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	5:57:56 PM	Tube furnace set to 750
8/22/2012	6:07:56 PM	H2 valve closed
8/22/2012	6:07:56 PM	BCl3 valve closed
8/22/2012	6:07:56 PM	PH3 valve closed
8/22/2012	6:07:56 PM	SiCl4 pre valve closed
8/22/2012	6:07:56 PM	SiCl4 post valve closed
8/22/2012	6:07:56 PM	Main Vac valve closed
8/22/2012	6:07:56 PM	Bypass valve closed
8/22/2012	6:07:56 PM	Helium valve opened
8/22/2012	6:07:56 PM	Bubbler valve opened
8/22/2012	6:07:56 PM	Helium MFC set to  400.000000
8/22/2012	6:07:56 PM	H2 MFC set to  0.000000
8/22/2012	6:07:56 PM	BCl3 MFC set to  0.000000
8/22/2012	6:07:56 PM	PH3 MFC set to  0.000000
8/22/2012	6:07:56 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:07:56 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:07:56 PM	Tube furnace set to 0
8/22/2012	6:16:03 PM	Run aborted at 6:16 PM
8/22/2012	6:16:03 PM	Helium valve closed
8/22/2012	6:16:03 PM	H2 valve closed
8/22/2012	6:16:03 PM	BCl3 valve closed
8/22/2012	6:16:03 PM	PH3 valve closed
8/22/2012	6:16:03 PM	SiCl4 pre valve closed
8/22/2012	6:16:03 PM	SiCl4 post valve closed
8/22/2012	6:16:03 PM	Bypass valve closed
8/22/2012	6:16:03 PM	Main Vac valve closed
8/22/2012	6:16:03 PM	Bubbler valve closed
8/22/2012	6:16:03 PM	Helium MFC set to  0.000000
8/22/2012	6:16:03 PM	H2 MFC set to  0.000000
8/22/2012	6:16:03 PM	BCl3 MFC set to  0.000000
8/22/2012	6:16:03 PM	PH3 MFC set to  0.000000
8/22/2012	6:16:03 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:16:03 PM	Tube furnace set to 0
8/22/2012	6:16:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	6:16:09 PM	Recipe started at 6:16 PM
8/22/2012	6:16:09 PM	Helium valve closed
8/22/2012	6:16:09 PM	H2 valve closed
8/22/2012	6:16:09 PM	BCl3 valve closed
8/22/2012	6:16:09 PM	PH3 valve closed
8/22/2012	6:16:09 PM	SiCl4 pre valve closed
8/22/2012	6:16:09 PM	SiCl4 post valve closed
8/22/2012	6:16:09 PM	Main Vac valve closed
8/22/2012	6:16:09 PM	Bypass valve closed
8/22/2012	6:16:09 PM	Bubbler valve closed
8/22/2012	6:16:09 PM	Helium MFC set to  0.000000
8/22/2012	6:16:09 PM	H2 MFC set to  0.000000
8/22/2012	6:16:09 PM	BCl3 MFC set to  0.000000
8/22/2012	6:16:09 PM	PH3 MFC set to  0.000000
8/22/2012	6:16:09 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:16:09 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:16:09 PM	Tube furnace set to 0
8/22/2012	6:16:12 PM	H2 valve closed
8/22/2012	6:16:12 PM	BCl3 valve closed
8/22/2012	6:16:12 PM	PH3 valve closed
8/22/2012	6:16:12 PM	SiCl4 pre valve closed
8/22/2012	6:16:12 PM	SiCl4 post valve closed
8/22/2012	6:16:12 PM	Main Vac valve closed
8/22/2012	6:16:12 PM	Bypass valve closed
8/22/2012	6:16:12 PM	Bubbler valve closed
8/22/2012	6:16:12 PM	Helium valve opened
8/22/2012	6:16:12 PM	Helium MFC set to  500.000000
8/22/2012	6:16:12 PM	H2 MFC set to  0.000000
8/22/2012	6:16:12 PM	BCl3 MFC set to  0.000000
8/22/2012	6:16:12 PM	PH3 MFC set to  0.000000
8/22/2012	6:16:12 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:16:12 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:16:12 PM	Tube furnace set to 0
8/22/2012	6:16:12 PM	Helium valve closed
8/22/2012	6:16:12 PM	H2 valve closed
8/22/2012	6:16:12 PM	BCl3 valve closed
8/22/2012	6:16:12 PM	PH3 valve closed
8/22/2012	6:16:12 PM	SiCl4 pre valve closed
8/22/2012	6:16:12 PM	SiCl4 post valve closed
8/22/2012	6:16:12 PM	Main Vac valve closed
8/22/2012	6:16:12 PM	Bypass valve closed
8/22/2012	6:16:12 PM	Bubbler valve closed
8/22/2012	6:16:12 PM	Helium MFC set to  0.000000
8/22/2012	6:16:12 PM	H2 MFC set to  0.000000
8/22/2012	6:16:12 PM	BCl3 MFC set to  0.000000
8/22/2012	6:16:12 PM	PH3 MFC set to  0.000000
8/22/2012	6:16:12 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:16:12 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:16:13 PM	Tube furnace set to 0
8/22/2012	6:16:14 PM	Run finished at 6:16 PM
8/22/2012	6:16:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	6:21:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	6:21:35 PM	Recipe started at 6:21 PM
8/22/2012	6:21:35 PM	Helium valve closed
8/22/2012	6:21:35 PM	H2 valve closed
8/22/2012	6:21:35 PM	BCl3 valve closed
8/22/2012	6:21:35 PM	PH3 valve closed
8/22/2012	6:21:35 PM	SiCl4 pre valve closed
8/22/2012	6:21:35 PM	SiCl4 post valve closed
8/22/2012	6:21:35 PM	Main Vac valve closed
8/22/2012	6:21:35 PM	Bubbler valve closed
8/22/2012	6:21:35 PM	Bypass valve opened
8/22/2012	6:21:35 PM	Helium MFC set to  0.000000
8/22/2012	6:21:35 PM	H2 MFC set to  0.000000
8/22/2012	6:21:35 PM	BCl3 MFC set to  0.000000
8/22/2012	6:21:35 PM	PH3 MFC set to  0.000000
8/22/2012	6:21:35 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:21:35 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:21:35 PM	Tube furnace set to 0
8/22/2012	6:22:51 PM	Helium valve closed
8/22/2012	6:22:51 PM	H2 valve closed
8/22/2012	6:22:51 PM	BCl3 valve closed
8/22/2012	6:22:51 PM	PH3 valve closed
8/22/2012	6:22:51 PM	SiCl4 pre valve closed
8/22/2012	6:22:51 PM	SiCl4 post valve closed
8/22/2012	6:22:51 PM	Main Vac valve closed
8/22/2012	6:22:51 PM	Bubbler valve closed
8/22/2012	6:22:51 PM	Bypass valve opened
8/22/2012	6:22:51 PM	Helium MFC set to  0.000000
8/22/2012	6:22:51 PM	H2 MFC set to  0.000000
8/22/2012	6:22:51 PM	BCl3 MFC set to  0.000000
8/22/2012	6:22:51 PM	PH3 MFC set to  0.000000
8/22/2012	6:22:51 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:22:51 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:22:51 PM	Tube furnace set to 0
8/22/2012	6:23:51 PM	Helium valve closed
8/22/2012	6:23:51 PM	H2 valve closed
8/22/2012	6:23:51 PM	BCl3 valve closed
8/22/2012	6:23:51 PM	PH3 valve closed
8/22/2012	6:23:51 PM	SiCl4 pre valve closed
8/22/2012	6:23:51 PM	SiCl4 post valve closed
8/22/2012	6:23:51 PM	Bypass valve closed
8/22/2012	6:23:51 PM	Bubbler valve closed
8/22/2012	6:23:51 PM	Main Vac valve opened
8/22/2012	6:23:51 PM	Helium MFC set to  0.000000
8/22/2012	6:23:51 PM	H2 MFC set to  0.000000
8/22/2012	6:23:51 PM	BCl3 MFC set to  0.000000
8/22/2012	6:23:51 PM	PH3 MFC set to  0.000000
8/22/2012	6:23:51 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:23:51 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:23:51 PM	Tube furnace set to 0
8/22/2012	6:23:52 PM	Run finished at 6:23 PM
8/22/2012	6:23:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	6:53:22 PM	Recipe started at 6:53 PM
8/22/2012	6:53:22 PM	Helium valve closed
8/22/2012	6:53:22 PM	H2 valve closed
8/22/2012	6:53:22 PM	BCl3 valve closed
8/22/2012	6:53:22 PM	PH3 valve closed
8/22/2012	6:53:22 PM	SiCl4 pre valve closed
8/22/2012	6:53:22 PM	SiCl4 post valve closed
8/22/2012	6:53:22 PM	Main Vac valve closed
8/22/2012	6:53:22 PM	Bubbler valve closed
8/22/2012	6:53:22 PM	Bypass valve opened
8/22/2012	6:53:22 PM	Helium MFC set to  0.000000
8/22/2012	6:53:22 PM	H2 MFC set to  0.000000
8/22/2012	6:53:22 PM	BCl3 MFC set to  0.000000
8/22/2012	6:53:22 PM	PH3 MFC set to  0.000000
8/22/2012	6:53:22 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:53:22 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:53:22 PM	Tube furnace set to 150
8/22/2012	6:53:23 PM	Helium valve closed
8/22/2012	6:53:23 PM	H2 valve closed
8/22/2012	6:53:23 PM	BCl3 valve closed
8/22/2012	6:53:23 PM	PH3 valve closed
8/22/2012	6:53:23 PM	SiCl4 pre valve closed
8/22/2012	6:53:23 PM	SiCl4 post valve closed
8/22/2012	6:53:23 PM	Main Vac valve closed
8/22/2012	6:53:23 PM	Bubbler valve closed
8/22/2012	6:53:23 PM	Bypass valve opened
8/22/2012	6:53:23 PM	Helium MFC set to  0.000000
8/22/2012	6:53:23 PM	H2 MFC set to  0.000000
8/22/2012	6:53:23 PM	BCl3 MFC set to  0.000000
8/22/2012	6:53:23 PM	PH3 MFC set to  0.000000
8/22/2012	6:53:23 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:53:23 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:53:23 PM	Tube furnace set to 150
8/22/2012	6:53:23 PM	Helium valve closed
8/22/2012	6:53:23 PM	H2 valve closed
8/22/2012	6:53:23 PM	BCl3 valve closed
8/22/2012	6:53:23 PM	PH3 valve closed
8/22/2012	6:53:23 PM	SiCl4 pre valve closed
8/22/2012	6:53:23 PM	SiCl4 post valve closed
8/22/2012	6:53:23 PM	Bypass valve closed
8/22/2012	6:53:23 PM	Bubbler valve closed
8/22/2012	6:53:23 PM	Main Vac valve opened
8/22/2012	6:53:23 PM	Helium MFC set to  0.000000
8/22/2012	6:53:23 PM	H2 MFC set to  0.000000
8/22/2012	6:53:23 PM	BCl3 MFC set to  0.000000
8/22/2012	6:53:23 PM	PH3 MFC set to  0.000000
8/22/2012	6:53:23 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:53:23 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:53:24 PM	Tube furnace set to 150
8/22/2012	6:53:24 PM	H2 valve closed
8/22/2012	6:53:24 PM	BCl3 valve closed
8/22/2012	6:53:24 PM	PH3 valve closed
8/22/2012	6:53:24 PM	SiCl4 pre valve closed
8/22/2012	6:53:24 PM	SiCl4 post valve closed
8/22/2012	6:53:24 PM	Bypass valve closed
8/22/2012	6:53:24 PM	Bubbler valve closed
8/22/2012	6:53:24 PM	Helium valve opened
8/22/2012	6:53:24 PM	Main Vac valve opened
8/22/2012	6:53:24 PM	Helium MFC set to  20.000000
8/22/2012	6:53:24 PM	H2 MFC set to  0.000000
8/22/2012	6:53:24 PM	BCl3 MFC set to  0.000000
8/22/2012	6:53:25 PM	PH3 MFC set to  0.000000
8/22/2012	6:53:25 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:53:25 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:53:25 PM	Tube furnace set to 150
8/22/2012	6:53:55 PM	Helium valve closed
8/22/2012	6:53:55 PM	H2 valve closed
8/22/2012	6:53:55 PM	BCl3 valve closed
8/22/2012	6:53:55 PM	PH3 valve closed
8/22/2012	6:53:55 PM	SiCl4 pre valve closed
8/22/2012	6:53:55 PM	SiCl4 post valve closed
8/22/2012	6:53:55 PM	Bypass valve closed
8/22/2012	6:53:55 PM	Bubbler valve closed
8/22/2012	6:53:55 PM	Main Vac valve opened
8/22/2012	6:53:55 PM	Helium MFC set to  0.000000
8/22/2012	6:53:55 PM	H2 MFC set to  0.000000
8/22/2012	6:53:55 PM	BCl3 MFC set to  0.000000
8/22/2012	6:53:55 PM	PH3 MFC set to  0.000000
8/22/2012	6:53:55 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:53:55 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:53:55 PM	Tube furnace set to 150
8/22/2012	6:54:25 PM	H2 valve closed
8/22/2012	6:54:25 PM	BCl3 valve closed
8/22/2012	6:54:25 PM	PH3 valve closed
8/22/2012	6:54:25 PM	SiCl4 pre valve closed
8/22/2012	6:54:25 PM	SiCl4 post valve closed
8/22/2012	6:54:25 PM	Bypass valve closed
8/22/2012	6:54:25 PM	Bubbler valve closed
8/22/2012	6:54:25 PM	Helium valve opened
8/22/2012	6:54:25 PM	Main Vac valve opened
8/22/2012	6:54:25 PM	Helium MFC set to  20.000000
8/22/2012	6:54:25 PM	H2 MFC set to  0.000000
8/22/2012	6:54:25 PM	BCl3 MFC set to  0.000000
8/22/2012	6:54:25 PM	PH3 MFC set to  0.000000
8/22/2012	6:54:25 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:54:25 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:54:25 PM	Tube furnace set to 150
8/22/2012	6:54:55 PM	Helium valve closed
8/22/2012	6:54:55 PM	H2 valve closed
8/22/2012	6:54:55 PM	BCl3 valve closed
8/22/2012	6:54:55 PM	PH3 valve closed
8/22/2012	6:54:55 PM	SiCl4 pre valve closed
8/22/2012	6:54:55 PM	SiCl4 post valve closed
8/22/2012	6:54:55 PM	Bypass valve closed
8/22/2012	6:54:55 PM	Bubbler valve closed
8/22/2012	6:54:55 PM	Main Vac valve opened
8/22/2012	6:54:55 PM	Helium MFC set to  0.000000
8/22/2012	6:54:55 PM	H2 MFC set to  0.000000
8/22/2012	6:54:55 PM	BCl3 MFC set to  0.000000
8/22/2012	6:54:55 PM	PH3 MFC set to  0.000000
8/22/2012	6:54:55 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:54:55 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:54:55 PM	Tube furnace set to 150
8/22/2012	6:55:25 PM	H2 valve closed
8/22/2012	6:55:25 PM	BCl3 valve closed
8/22/2012	6:55:25 PM	PH3 valve closed
8/22/2012	6:55:26 PM	SiCl4 pre valve closed
8/22/2012	6:55:26 PM	SiCl4 post valve closed
8/22/2012	6:55:26 PM	Bypass valve closed
8/22/2012	6:55:26 PM	Bubbler valve closed
8/22/2012	6:55:26 PM	Helium valve opened
8/22/2012	6:55:26 PM	Main Vac valve opened
8/22/2012	6:55:26 PM	Helium MFC set to  20.000000
8/22/2012	6:55:26 PM	H2 MFC set to  0.000000
8/22/2012	6:55:26 PM	BCl3 MFC set to  0.000000
8/22/2012	6:55:26 PM	PH3 MFC set to  0.000000
8/22/2012	6:55:26 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:55:26 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:55:26 PM	Tube furnace set to 150
8/22/2012	6:55:56 PM	Helium valve closed
8/22/2012	6:55:56 PM	H2 valve closed
8/22/2012	6:55:56 PM	BCl3 valve closed
8/22/2012	6:55:56 PM	PH3 valve closed
8/22/2012	6:55:56 PM	SiCl4 pre valve closed
8/22/2012	6:55:56 PM	SiCl4 post valve closed
8/22/2012	6:55:56 PM	Bypass valve closed
8/22/2012	6:55:56 PM	Bubbler valve closed
8/22/2012	6:55:56 PM	Main Vac valve opened
8/22/2012	6:55:56 PM	Helium MFC set to  0.000000
8/22/2012	6:55:56 PM	H2 MFC set to  0.000000
8/22/2012	6:55:56 PM	BCl3 MFC set to  0.000000
8/22/2012	6:55:56 PM	PH3 MFC set to  0.000000
8/22/2012	6:55:56 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:55:56 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:55:56 PM	Tube furnace set to 150
8/22/2012	6:56:26 PM	H2 valve closed
8/22/2012	6:56:26 PM	BCl3 valve closed
8/22/2012	6:56:26 PM	PH3 valve closed
8/22/2012	6:56:26 PM	SiCl4 pre valve closed
8/22/2012	6:56:26 PM	SiCl4 post valve closed
8/22/2012	6:56:26 PM	Bypass valve closed
8/22/2012	6:56:26 PM	Bubbler valve closed
8/22/2012	6:56:26 PM	Helium valve opened
8/22/2012	6:56:26 PM	Main Vac valve opened
8/22/2012	6:56:26 PM	Helium MFC set to  20.000000
8/22/2012	6:56:26 PM	H2 MFC set to  0.000000
8/22/2012	6:56:26 PM	BCl3 MFC set to  0.000000
8/22/2012	6:56:26 PM	PH3 MFC set to  0.000000
8/22/2012	6:56:26 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:56:26 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:56:26 PM	Tube furnace set to 150
8/22/2012	6:56:56 PM	Helium valve closed
8/22/2012	6:56:56 PM	H2 valve closed
8/22/2012	6:56:56 PM	BCl3 valve closed
8/22/2012	6:56:56 PM	PH3 valve closed
8/22/2012	6:56:56 PM	SiCl4 pre valve closed
8/22/2012	6:56:56 PM	SiCl4 post valve closed
8/22/2012	6:56:56 PM	Bypass valve closed
8/22/2012	6:56:56 PM	Bubbler valve closed
8/22/2012	6:56:56 PM	Main Vac valve opened
8/22/2012	6:56:56 PM	Helium MFC set to  0.000000
8/22/2012	6:56:56 PM	H2 MFC set to  0.000000
8/22/2012	6:56:56 PM	BCl3 MFC set to  0.000000
8/22/2012	6:56:56 PM	PH3 MFC set to  0.000000
8/22/2012	6:56:56 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:56:56 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:56:57 PM	Tube furnace set to 150
8/22/2012	6:57:27 PM	H2 valve closed
8/22/2012	6:57:27 PM	BCl3 valve closed
8/22/2012	6:57:27 PM	PH3 valve closed
8/22/2012	6:57:27 PM	SiCl4 pre valve closed
8/22/2012	6:57:27 PM	SiCl4 post valve closed
8/22/2012	6:57:27 PM	Bypass valve closed
8/22/2012	6:57:27 PM	Bubbler valve closed
8/22/2012	6:57:27 PM	Helium valve opened
8/22/2012	6:57:27 PM	Main Vac valve opened
8/22/2012	6:57:27 PM	Helium MFC set to  20.000000
8/22/2012	6:57:27 PM	H2 MFC set to  0.000000
8/22/2012	6:57:27 PM	BCl3 MFC set to  0.000000
8/22/2012	6:57:27 PM	PH3 MFC set to  0.000000
8/22/2012	6:57:27 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:57:27 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:57:27 PM	Tube furnace set to 150
8/22/2012	6:57:57 PM	Helium valve closed
8/22/2012	6:57:57 PM	H2 valve closed
8/22/2012	6:57:57 PM	BCl3 valve closed
8/22/2012	6:57:57 PM	PH3 valve closed
8/22/2012	6:57:57 PM	SiCl4 pre valve closed
8/22/2012	6:57:57 PM	SiCl4 post valve closed
8/22/2012	6:57:57 PM	Bypass valve closed
8/22/2012	6:57:57 PM	Bubbler valve closed
8/22/2012	6:57:57 PM	Main Vac valve opened
8/22/2012	6:57:57 PM	Helium MFC set to  0.000000
8/22/2012	6:57:57 PM	H2 MFC set to  0.000000
8/22/2012	6:57:57 PM	BCl3 MFC set to  0.000000
8/22/2012	6:57:57 PM	PH3 MFC set to  0.000000
8/22/2012	6:57:57 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:57:57 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:57:57 PM	Tube furnace set to 150
8/22/2012	6:58:27 PM	H2 valve closed
8/22/2012	6:58:27 PM	BCl3 valve closed
8/22/2012	6:58:27 PM	PH3 valve closed
8/22/2012	6:58:27 PM	SiCl4 pre valve closed
8/22/2012	6:58:27 PM	SiCl4 post valve closed
8/22/2012	6:58:27 PM	Bypass valve closed
8/22/2012	6:58:27 PM	Bubbler valve closed
8/22/2012	6:58:27 PM	Helium valve opened
8/22/2012	6:58:27 PM	Main Vac valve opened
8/22/2012	6:58:27 PM	Helium MFC set to  20.000000
8/22/2012	6:58:27 PM	H2 MFC set to  0.000000
8/22/2012	6:58:27 PM	BCl3 MFC set to  0.000000
8/22/2012	6:58:27 PM	PH3 MFC set to  0.000000
8/22/2012	6:58:27 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:58:27 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:58:27 PM	Tube furnace set to 150
8/22/2012	6:58:57 PM	Helium valve closed
8/22/2012	6:58:57 PM	H2 valve closed
8/22/2012	6:58:57 PM	BCl3 valve closed
8/22/2012	6:58:57 PM	PH3 valve closed
8/22/2012	6:58:57 PM	SiCl4 pre valve closed
8/22/2012	6:58:57 PM	SiCl4 post valve closed
8/22/2012	6:58:57 PM	Bypass valve closed
8/22/2012	6:58:57 PM	Bubbler valve closed
8/22/2012	6:58:57 PM	Main Vac valve opened
8/22/2012	6:58:57 PM	Helium MFC set to  0.000000
8/22/2012	6:58:57 PM	H2 MFC set to  0.000000
8/22/2012	6:58:57 PM	BCl3 MFC set to  0.000000
8/22/2012	6:58:57 PM	PH3 MFC set to  0.000000
8/22/2012	6:58:57 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:58:57 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:58:58 PM	Tube furnace set to 150
8/22/2012	6:59:28 PM	H2 valve closed
8/22/2012	6:59:28 PM	BCl3 valve closed
8/22/2012	6:59:28 PM	PH3 valve closed
8/22/2012	6:59:28 PM	SiCl4 pre valve closed
8/22/2012	6:59:28 PM	SiCl4 post valve closed
8/22/2012	6:59:28 PM	Bypass valve closed
8/22/2012	6:59:28 PM	Bubbler valve closed
8/22/2012	6:59:28 PM	Helium valve opened
8/22/2012	6:59:28 PM	Main Vac valve opened
8/22/2012	6:59:28 PM	Helium MFC set to  20.000000
8/22/2012	6:59:28 PM	H2 MFC set to  0.000000
8/22/2012	6:59:28 PM	BCl3 MFC set to  0.000000
8/22/2012	6:59:28 PM	PH3 MFC set to  0.000000
8/22/2012	6:59:28 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:59:28 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:59:28 PM	Tube furnace set to 150
8/22/2012	6:59:58 PM	Helium valve closed
8/22/2012	6:59:58 PM	H2 valve closed
8/22/2012	6:59:58 PM	BCl3 valve closed
8/22/2012	6:59:58 PM	PH3 valve closed
8/22/2012	6:59:58 PM	SiCl4 pre valve closed
8/22/2012	6:59:58 PM	SiCl4 post valve closed
8/22/2012	6:59:58 PM	Bypass valve closed
8/22/2012	6:59:58 PM	Bubbler valve closed
8/22/2012	6:59:58 PM	Main Vac valve opened
8/22/2012	6:59:58 PM	Helium MFC set to  0.000000
8/22/2012	6:59:58 PM	H2 MFC set to  0.000000
8/22/2012	6:59:58 PM	BCl3 MFC set to  0.000000
8/22/2012	6:59:58 PM	PH3 MFC set to  0.000000
8/22/2012	6:59:58 PM	SiCl4 MFC set to  0.000000
8/22/2012	6:59:58 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	6:59:58 PM	Tube furnace set to 150
8/22/2012	7:00:28 PM	H2 valve closed
8/22/2012	7:00:28 PM	BCl3 valve closed
8/22/2012	7:00:28 PM	PH3 valve closed
8/22/2012	7:00:28 PM	SiCl4 pre valve closed
8/22/2012	7:00:28 PM	SiCl4 post valve closed
8/22/2012	7:00:28 PM	Bypass valve closed
8/22/2012	7:00:28 PM	Bubbler valve closed
8/22/2012	7:00:28 PM	Helium valve opened
8/22/2012	7:00:28 PM	Main Vac valve opened
8/22/2012	7:00:28 PM	Helium MFC set to  20.000000
8/22/2012	7:00:28 PM	H2 MFC set to  0.000000
8/22/2012	7:00:28 PM	BCl3 MFC set to  0.000000
8/22/2012	7:00:28 PM	PH3 MFC set to  0.000000
8/22/2012	7:00:28 PM	SiCl4 MFC set to  0.000000
8/22/2012	7:00:28 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	7:00:28 PM	Tube furnace set to 150
8/22/2012	7:00:58 PM	Helium valve closed
8/22/2012	7:00:58 PM	H2 valve closed
8/22/2012	7:00:58 PM	BCl3 valve closed
8/22/2012	7:00:58 PM	PH3 valve closed
8/22/2012	7:00:58 PM	SiCl4 pre valve closed
8/22/2012	7:00:58 PM	SiCl4 post valve closed
8/22/2012	7:00:58 PM	Bypass valve closed
8/22/2012	7:00:58 PM	Bubbler valve closed
8/22/2012	7:00:58 PM	Main Vac valve opened
8/22/2012	7:00:58 PM	Helium MFC set to  0.000000
8/22/2012	7:00:58 PM	H2 MFC set to  0.000000
8/22/2012	7:00:58 PM	BCl3 MFC set to  0.000000
8/22/2012	7:00:58 PM	PH3 MFC set to  0.000000
8/22/2012	7:00:58 PM	SiCl4 MFC set to  0.000000
8/22/2012	7:00:58 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	7:00:59 PM	Tube furnace set to 150
8/22/2012	7:01:29 PM	H2 valve closed
8/22/2012	7:01:29 PM	BCl3 valve closed
8/22/2012	7:01:29 PM	PH3 valve closed
8/22/2012	7:01:29 PM	SiCl4 pre valve closed
8/22/2012	7:01:29 PM	SiCl4 post valve closed
8/22/2012	7:01:29 PM	Bypass valve closed
8/22/2012	7:01:29 PM	Bubbler valve closed
8/22/2012	7:01:29 PM	Helium valve opened
8/22/2012	7:01:29 PM	Main Vac valve opened
8/22/2012	7:01:29 PM	Helium MFC set to  20.000000
8/22/2012	7:01:29 PM	H2 MFC set to  0.000000
8/22/2012	7:01:29 PM	BCl3 MFC set to  0.000000
8/22/2012	7:01:29 PM	PH3 MFC set to  0.000000
8/22/2012	7:01:29 PM	SiCl4 MFC set to  0.000000
8/22/2012	7:01:29 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	7:01:29 PM	Tube furnace set to 150
8/22/2012	7:01:59 PM	Helium valve closed
8/22/2012	7:01:59 PM	H2 valve closed
8/22/2012	7:01:59 PM	BCl3 valve closed
8/22/2012	7:01:59 PM	PH3 valve closed
8/22/2012	7:01:59 PM	SiCl4 pre valve closed
8/22/2012	7:01:59 PM	SiCl4 post valve closed
8/22/2012	7:01:59 PM	Bypass valve closed
8/22/2012	7:01:59 PM	Bubbler valve closed
8/22/2012	7:01:59 PM	Main Vac valve opened
8/22/2012	7:01:59 PM	Helium MFC set to  0.000000
8/22/2012	7:01:59 PM	H2 MFC set to  0.000000
8/22/2012	7:01:59 PM	BCl3 MFC set to  0.000000
8/22/2012	7:01:59 PM	PH3 MFC set to  0.000000
8/22/2012	7:01:59 PM	SiCl4 MFC set to  0.000000
8/22/2012	7:01:59 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	7:01:59 PM	Tube furnace set to 150
8/22/2012	7:02:29 PM	H2 valve closed
8/22/2012	7:02:29 PM	BCl3 valve closed
8/22/2012	7:02:29 PM	PH3 valve closed
8/22/2012	7:02:29 PM	SiCl4 pre valve closed
8/22/2012	7:02:29 PM	SiCl4 post valve closed
8/22/2012	7:02:29 PM	Bypass valve closed
8/22/2012	7:02:29 PM	Bubbler valve closed
8/22/2012	7:02:29 PM	Helium valve opened
8/22/2012	7:02:29 PM	Main Vac valve opened
8/22/2012	7:02:29 PM	Helium MFC set to  20.000000
8/22/2012	7:02:29 PM	H2 MFC set to  0.000000
8/22/2012	7:02:29 PM	BCl3 MFC set to  0.000000
8/22/2012	7:02:29 PM	PH3 MFC set to  0.000000
8/22/2012	7:02:29 PM	SiCl4 MFC set to  0.000000
8/22/2012	7:02:29 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	7:02:29 PM	Tube furnace set to 150
8/22/2012	7:02:59 PM	Helium valve closed
8/22/2012	7:02:59 PM	H2 valve closed
8/22/2012	7:02:59 PM	BCl3 valve closed
8/22/2012	7:02:59 PM	PH3 valve closed
8/22/2012	7:02:59 PM	SiCl4 pre valve closed
8/22/2012	7:02:59 PM	SiCl4 post valve closed
8/22/2012	7:02:59 PM	Bypass valve closed
8/22/2012	7:02:59 PM	Bubbler valve closed
8/22/2012	7:03:00 PM	Main Vac valve opened
8/22/2012	7:03:00 PM	Helium MFC set to  0.000000
8/22/2012	7:03:00 PM	H2 MFC set to  0.000000
8/22/2012	7:03:00 PM	BCl3 MFC set to  0.000000
8/22/2012	7:03:00 PM	PH3 MFC set to  0.000000
8/22/2012	7:03:00 PM	SiCl4 MFC set to  0.000000
8/22/2012	7:03:00 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	7:03:00 PM	Tube furnace set to 150
8/22/2012	7:03:01 PM	Run finished at 7:03 PM
8/22/2012	7:12:03 PM	Main Vac valve closed
8/22/2012	7:12:15 PM	Main Vac valve opened
8/22/2012	7:13:18 PM	Recipe started at 7:13 PM
8/22/2012	7:13:18 PM	Helium valve closed
8/22/2012	7:13:18 PM	H2 valve closed
8/22/2012	7:13:18 PM	BCl3 valve closed
8/22/2012	7:13:18 PM	PH3 valve closed
8/22/2012	7:13:18 PM	SiCl4 pre valve closed
8/22/2012	7:13:18 PM	SiCl4 post valve closed
8/22/2012	7:13:18 PM	Main Vac valve closed
8/22/2012	7:13:18 PM	Bypass valve closed
8/22/2012	7:13:18 PM	Bubbler valve closed
8/22/2012	7:13:18 PM	Helium MFC set to  0.000000
8/22/2012	7:13:18 PM	H2 MFC set to  0.000000
8/22/2012	7:13:18 PM	BCl3 MFC set to  0.000000
8/22/2012	7:13:18 PM	PH3 MFC set to  0.000000
8/22/2012	7:13:18 PM	SiCl4 MFC set to  0.000000
8/22/2012	7:13:18 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	7:13:18 PM	Tube furnace set to 0
8/22/2012	7:13:21 PM	Helium valve closed
8/22/2012	7:13:21 PM	BCl3 valve closed
8/22/2012	7:13:21 PM	PH3 valve closed
8/22/2012	7:13:21 PM	SiCl4 pre valve closed
8/22/2012	7:13:21 PM	SiCl4 post valve closed
8/22/2012	7:13:21 PM	Main Vac valve closed
8/22/2012	7:13:21 PM	Bypass valve closed
8/22/2012	7:13:21 PM	Bubbler valve closed
8/22/2012	7:13:21 PM	H2 valve opened
8/22/2012	7:13:21 PM	Helium MFC set to  0.000000
8/22/2012	7:13:21 PM	H2 MFC set to  500.000000
8/22/2012	7:13:21 PM	BCl3 MFC set to  0.000000
8/22/2012	7:13:21 PM	PH3 MFC set to  0.000000
8/22/2012	7:13:21 PM	SiCl4 MFC set to  0.000000
8/22/2012	7:13:21 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	7:13:21 PM	Tube furnace set to 50
8/22/2012	7:14:32 PM	Helium valve closed
8/22/2012	7:14:32 PM	BCl3 valve closed
8/22/2012	7:14:32 PM	PH3 valve closed
8/22/2012	7:14:32 PM	SiCl4 pre valve closed
8/22/2012	7:14:32 PM	SiCl4 post valve closed
8/22/2012	7:14:32 PM	Main Vac valve closed
8/22/2012	7:14:32 PM	Bypass valve closed
8/22/2012	7:14:32 PM	H2 valve opened
8/22/2012	7:14:32 PM	Bubbler valve opened
8/22/2012	7:14:32 PM	Helium MFC set to  0.000000
8/22/2012	7:14:32 PM	H2 MFC set to  500.000000
8/22/2012	7:14:32 PM	BCl3 MFC set to  0.000000
8/22/2012	7:14:32 PM	PH3 MFC set to  0.000000
8/22/2012	7:14:32 PM	SiCl4 MFC set to  0.000000
8/22/2012	7:14:32 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	7:14:33 PM	Tube furnace set to 50
8/22/2012	7:14:34 PM	Helium valve closed
8/22/2012	7:14:34 PM	BCl3 valve closed
8/22/2012	7:14:34 PM	PH3 valve closed
8/22/2012	7:14:34 PM	SiCl4 pre valve closed
8/22/2012	7:14:34 PM	SiCl4 post valve closed
8/22/2012	7:14:34 PM	Main Vac valve closed
8/22/2012	7:14:34 PM	Bypass valve closed
8/22/2012	7:14:34 PM	H2 valve opened
8/22/2012	7:14:34 PM	Bubbler valve opened
8/22/2012	7:14:34 PM	Helium MFC set to  0.000000
8/22/2012	7:14:34 PM	H2 MFC set to  450.000000
8/22/2012	7:14:34 PM	BCl3 MFC set to  0.000000
8/22/2012	7:14:34 PM	PH3 MFC set to  0.000000
8/22/2012	7:14:34 PM	SiCl4 MFC set to  0.000000
8/22/2012	7:14:34 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	7:14:34 PM	Tube furnace set to 1000
8/22/2012	7:34:34 PM	Helium valve closed
8/22/2012	7:34:34 PM	PH3 valve closed
8/22/2012	7:34:34 PM	Main Vac valve closed
8/22/2012	7:34:34 PM	Bypass valve closed
8/22/2012	7:34:34 PM	H2 valve opened
8/22/2012	7:34:34 PM	BCl3 valve opened
8/22/2012	7:34:34 PM	SiCl4 pre valve opened
8/22/2012	7:34:34 PM	SiCl4 post valve opened
8/22/2012	7:34:34 PM	Bubbler valve opened
8/22/2012	7:34:34 PM	Helium MFC set to  0.000000
8/22/2012	7:34:34 PM	H2 MFC set to  450.000000
8/22/2012	7:34:34 PM	BCl3 MFC set to  1.200000
8/22/2012	7:34:34 PM	PH3 MFC set to  0.000000
8/22/2012	7:34:34 PM	SiCl4 MFC set to  50.000000
8/22/2012	7:34:34 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	7:34:34 PM	Tube furnace set to 1000
8/22/2012	7:49:34 PM	Helium valve closed
8/22/2012	7:49:34 PM	BCl3 valve closed
8/22/2012	7:49:34 PM	PH3 valve closed
8/22/2012	7:49:34 PM	SiCl4 pre valve closed
8/22/2012	7:49:34 PM	SiCl4 post valve closed
8/22/2012	7:49:34 PM	Main Vac valve closed
8/22/2012	7:49:34 PM	Bypass valve closed
8/22/2012	7:49:34 PM	H2 valve opened
8/22/2012	7:49:34 PM	Bubbler valve opened
8/22/2012	7:49:34 PM	Helium MFC set to  0.000000
8/22/2012	7:49:34 PM	H2 MFC set to  500.000000
8/22/2012	7:49:34 PM	BCl3 MFC set to  0.000000
8/22/2012	7:49:34 PM	PH3 MFC set to  0.000000
8/22/2012	7:49:34 PM	SiCl4 MFC set to  0.000000
8/22/2012	7:49:34 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	7:49:34 PM	Tube furnace set to 750
8/22/2012	7:59:34 PM	H2 valve closed
8/22/2012	7:59:34 PM	BCl3 valve closed
8/22/2012	7:59:34 PM	PH3 valve closed
8/22/2012	7:59:34 PM	SiCl4 pre valve closed
8/22/2012	7:59:34 PM	SiCl4 post valve closed
8/22/2012	7:59:34 PM	Main Vac valve closed
8/22/2012	7:59:34 PM	Bypass valve closed
8/22/2012	7:59:34 PM	Helium valve opened
8/22/2012	7:59:34 PM	Bubbler valve opened
8/22/2012	7:59:34 PM	Helium MFC set to  400.000000
8/22/2012	7:59:34 PM	H2 MFC set to  0.000000
8/22/2012	7:59:34 PM	BCl3 MFC set to  0.000000
8/22/2012	7:59:34 PM	PH3 MFC set to  0.000000
8/22/2012	7:59:34 PM	SiCl4 MFC set to  0.000000
8/22/2012	7:59:34 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	7:59:35 PM	Tube furnace set to 0
8/22/2012	8:24:34 PM	Helium valve closed
8/22/2012	8:24:35 PM	H2 valve closed
8/22/2012	8:24:35 PM	BCl3 valve closed
8/22/2012	8:24:35 PM	PH3 valve closed
8/22/2012	8:24:35 PM	SiCl4 pre valve closed
8/22/2012	8:24:35 PM	SiCl4 post valve closed
8/22/2012	8:24:35 PM	Main Vac valve closed
8/22/2012	8:24:35 PM	Bypass valve closed
8/22/2012	8:24:35 PM	Bubbler valve closed
8/22/2012	8:24:35 PM	Helium MFC set to  0.000000
8/22/2012	8:24:35 PM	H2 MFC set to  0.000000
8/22/2012	8:24:35 PM	BCl3 MFC set to  0.000000
8/22/2012	8:24:35 PM	PH3 MFC set to  0.000000
8/22/2012	8:24:35 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:24:35 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:24:35 PM	Tube furnace set to 50
8/22/2012	8:25:13 PM	Run aborted at 8:25 PM
8/22/2012	8:25:14 PM	Helium valve closed
8/22/2012	8:25:14 PM	H2 valve closed
8/22/2012	8:25:14 PM	BCl3 valve closed
8/22/2012	8:25:14 PM	PH3 valve closed
8/22/2012	8:25:14 PM	SiCl4 pre valve closed
8/22/2012	8:25:14 PM	SiCl4 post valve closed
8/22/2012	8:25:14 PM	Bypass valve closed
8/22/2012	8:25:14 PM	Main Vac valve closed
8/22/2012	8:25:14 PM	Bubbler valve closed
8/22/2012	8:25:14 PM	Helium MFC set to  0.000000
8/22/2012	8:25:14 PM	H2 MFC set to  0.000000
8/22/2012	8:25:14 PM	BCl3 MFC set to  0.000000
8/22/2012	8:25:14 PM	PH3 MFC set to  0.000000
8/22/2012	8:25:14 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:25:14 PM	Tube furnace set to 0
8/22/2012	8:25:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	8:25:16 PM	Recipe started at 8:25 PM
8/22/2012	8:25:16 PM	Helium valve closed
8/22/2012	8:25:16 PM	H2 valve closed
8/22/2012	8:25:16 PM	BCl3 valve closed
8/22/2012	8:25:16 PM	PH3 valve closed
8/22/2012	8:25:16 PM	SiCl4 pre valve closed
8/22/2012	8:25:16 PM	SiCl4 post valve closed
8/22/2012	8:25:16 PM	Main Vac valve closed
8/22/2012	8:25:16 PM	Bypass valve closed
8/22/2012	8:25:16 PM	Bubbler valve closed
8/22/2012	8:25:16 PM	Helium MFC set to  0.000000
8/22/2012	8:25:16 PM	H2 MFC set to  0.000000
8/22/2012	8:25:16 PM	BCl3 MFC set to  0.000000
8/22/2012	8:25:16 PM	PH3 MFC set to  0.000000
8/22/2012	8:25:16 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:25:16 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:25:16 PM	Tube furnace set to 0
8/22/2012	8:25:20 PM	H2 valve closed
8/22/2012	8:25:20 PM	BCl3 valve closed
8/22/2012	8:25:20 PM	PH3 valve closed
8/22/2012	8:25:20 PM	SiCl4 pre valve closed
8/22/2012	8:25:20 PM	SiCl4 post valve closed
8/22/2012	8:25:20 PM	Main Vac valve closed
8/22/2012	8:25:20 PM	Bypass valve closed
8/22/2012	8:25:20 PM	Bubbler valve closed
8/22/2012	8:25:20 PM	Helium valve opened
8/22/2012	8:25:20 PM	Helium MFC set to  500.000000
8/22/2012	8:25:20 PM	H2 MFC set to  0.000000
8/22/2012	8:25:20 PM	BCl3 MFC set to  0.000000
8/22/2012	8:25:20 PM	PH3 MFC set to  0.000000
8/22/2012	8:25:20 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:25:20 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:25:20 PM	Tube furnace set to 0
8/22/2012	8:25:20 PM	Helium valve closed
8/22/2012	8:25:20 PM	H2 valve closed
8/22/2012	8:25:20 PM	BCl3 valve closed
8/22/2012	8:25:20 PM	PH3 valve closed
8/22/2012	8:25:20 PM	SiCl4 pre valve closed
8/22/2012	8:25:20 PM	SiCl4 post valve closed
8/22/2012	8:25:20 PM	Main Vac valve closed
8/22/2012	8:25:20 PM	Bypass valve closed
8/22/2012	8:25:20 PM	Bubbler valve closed
8/22/2012	8:25:20 PM	Helium MFC set to  0.000000
8/22/2012	8:25:20 PM	H2 MFC set to  0.000000
8/22/2012	8:25:20 PM	BCl3 MFC set to  0.000000
8/22/2012	8:25:20 PM	PH3 MFC set to  0.000000
8/22/2012	8:25:20 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:25:20 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:25:20 PM	Tube furnace set to 0
8/22/2012	8:25:21 PM	Run finished at 8:25 PM
8/22/2012	8:25:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	8:32:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	8:32:29 PM	Recipe started at 8:32 PM
8/22/2012	8:32:29 PM	Helium valve closed
8/22/2012	8:32:29 PM	H2 valve closed
8/22/2012	8:32:29 PM	BCl3 valve closed
8/22/2012	8:32:29 PM	PH3 valve closed
8/22/2012	8:32:29 PM	SiCl4 pre valve closed
8/22/2012	8:32:29 PM	SiCl4 post valve closed
8/22/2012	8:32:29 PM	Main Vac valve closed
8/22/2012	8:32:29 PM	Bubbler valve closed
8/22/2012	8:32:29 PM	Bypass valve opened
8/22/2012	8:32:29 PM	Helium MFC set to  0.000000
8/22/2012	8:32:29 PM	H2 MFC set to  0.000000
8/22/2012	8:32:29 PM	BCl3 MFC set to  0.000000
8/22/2012	8:32:29 PM	PH3 MFC set to  0.000000
8/22/2012	8:32:29 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:32:29 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:32:29 PM	Tube furnace set to 0
8/22/2012	8:33:52 PM	Helium valve closed
8/22/2012	8:33:52 PM	H2 valve closed
8/22/2012	8:33:52 PM	BCl3 valve closed
8/22/2012	8:33:52 PM	PH3 valve closed
8/22/2012	8:33:52 PM	SiCl4 pre valve closed
8/22/2012	8:33:52 PM	SiCl4 post valve closed
8/22/2012	8:33:52 PM	Main Vac valve closed
8/22/2012	8:33:52 PM	Bubbler valve closed
8/22/2012	8:33:52 PM	Bypass valve opened
8/22/2012	8:33:52 PM	Helium MFC set to  0.000000
8/22/2012	8:33:52 PM	H2 MFC set to  0.000000
8/22/2012	8:33:52 PM	BCl3 MFC set to  0.000000
8/22/2012	8:33:52 PM	PH3 MFC set to  0.000000
8/22/2012	8:33:52 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:33:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:33:52 PM	Tube furnace set to 0
8/22/2012	8:34:52 PM	Helium valve closed
8/22/2012	8:34:52 PM	H2 valve closed
8/22/2012	8:34:52 PM	BCl3 valve closed
8/22/2012	8:34:52 PM	PH3 valve closed
8/22/2012	8:34:52 PM	SiCl4 pre valve closed
8/22/2012	8:34:52 PM	SiCl4 post valve closed
8/22/2012	8:34:52 PM	Bypass valve closed
8/22/2012	8:34:52 PM	Bubbler valve closed
8/22/2012	8:34:52 PM	Main Vac valve opened
8/22/2012	8:34:52 PM	Helium MFC set to  0.000000
8/22/2012	8:34:52 PM	H2 MFC set to  0.000000
8/22/2012	8:34:52 PM	BCl3 MFC set to  0.000000
8/22/2012	8:34:52 PM	PH3 MFC set to  0.000000
8/22/2012	8:34:52 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:34:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:34:52 PM	Tube furnace set to 0
8/22/2012	8:34:53 PM	Run finished at 8:34 PM
8/22/2012	8:34:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	8:44:17 PM	Recipe started at 8:44 PM
8/22/2012	8:44:17 PM	Helium valve closed
8/22/2012	8:44:17 PM	H2 valve closed
8/22/2012	8:44:17 PM	BCl3 valve closed
8/22/2012	8:44:17 PM	PH3 valve closed
8/22/2012	8:44:17 PM	SiCl4 pre valve closed
8/22/2012	8:44:17 PM	SiCl4 post valve closed
8/22/2012	8:44:17 PM	Main Vac valve closed
8/22/2012	8:44:17 PM	Bubbler valve closed
8/22/2012	8:44:17 PM	Bypass valve opened
8/22/2012	8:44:17 PM	Helium MFC set to  0.000000
8/22/2012	8:44:17 PM	H2 MFC set to  0.000000
8/22/2012	8:44:17 PM	BCl3 MFC set to  0.000000
8/22/2012	8:44:17 PM	PH3 MFC set to  0.000000
8/22/2012	8:44:17 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:44:17 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:44:17 PM	Tube furnace set to 150
8/22/2012	8:44:17 PM	Helium valve closed
8/22/2012	8:44:17 PM	H2 valve closed
8/22/2012	8:44:17 PM	BCl3 valve closed
8/22/2012	8:44:17 PM	PH3 valve closed
8/22/2012	8:44:17 PM	SiCl4 pre valve closed
8/22/2012	8:44:17 PM	SiCl4 post valve closed
8/22/2012	8:44:17 PM	Main Vac valve closed
8/22/2012	8:44:17 PM	Bubbler valve closed
8/22/2012	8:44:17 PM	Bypass valve opened
8/22/2012	8:44:17 PM	Helium MFC set to  0.000000
8/22/2012	8:44:17 PM	H2 MFC set to  0.000000
8/22/2012	8:44:17 PM	BCl3 MFC set to  0.000000
8/22/2012	8:44:17 PM	PH3 MFC set to  0.000000
8/22/2012	8:44:17 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:44:17 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:44:18 PM	Tube furnace set to 150
8/22/2012	8:44:19 PM	Helium valve closed
8/22/2012	8:44:19 PM	H2 valve closed
8/22/2012	8:44:19 PM	BCl3 valve closed
8/22/2012	8:44:19 PM	PH3 valve closed
8/22/2012	8:44:19 PM	SiCl4 pre valve closed
8/22/2012	8:44:19 PM	SiCl4 post valve closed
8/22/2012	8:44:19 PM	Bypass valve closed
8/22/2012	8:44:19 PM	Bubbler valve closed
8/22/2012	8:44:19 PM	Main Vac valve opened
8/22/2012	8:44:19 PM	Helium MFC set to  0.000000
8/22/2012	8:44:19 PM	H2 MFC set to  0.000000
8/22/2012	8:44:19 PM	BCl3 MFC set to  0.000000
8/22/2012	8:44:19 PM	PH3 MFC set to  0.000000
8/22/2012	8:44:19 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:44:19 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:44:19 PM	Tube furnace set to 150
8/22/2012	8:44:19 PM	H2 valve closed
8/22/2012	8:44:19 PM	BCl3 valve closed
8/22/2012	8:44:19 PM	PH3 valve closed
8/22/2012	8:44:19 PM	SiCl4 pre valve closed
8/22/2012	8:44:19 PM	SiCl4 post valve closed
8/22/2012	8:44:19 PM	Bypass valve closed
8/22/2012	8:44:19 PM	Bubbler valve closed
8/22/2012	8:44:19 PM	Helium valve opened
8/22/2012	8:44:19 PM	Main Vac valve opened
8/22/2012	8:44:19 PM	Helium MFC set to  20.000000
8/22/2012	8:44:19 PM	H2 MFC set to  0.000000
8/22/2012	8:44:19 PM	BCl3 MFC set to  0.000000
8/22/2012	8:44:19 PM	PH3 MFC set to  0.000000
8/22/2012	8:44:19 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:44:19 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:44:20 PM	Tube furnace set to 150
8/22/2012	8:44:50 PM	Helium valve closed
8/22/2012	8:44:50 PM	H2 valve closed
8/22/2012	8:44:50 PM	BCl3 valve closed
8/22/2012	8:44:50 PM	PH3 valve closed
8/22/2012	8:44:50 PM	SiCl4 pre valve closed
8/22/2012	8:44:50 PM	SiCl4 post valve closed
8/22/2012	8:44:50 PM	Bypass valve closed
8/22/2012	8:44:50 PM	Bubbler valve closed
8/22/2012	8:44:50 PM	Main Vac valve opened
8/22/2012	8:44:50 PM	Helium MFC set to  0.000000
8/22/2012	8:44:50 PM	H2 MFC set to  0.000000
8/22/2012	8:44:50 PM	BCl3 MFC set to  0.000000
8/22/2012	8:44:50 PM	PH3 MFC set to  0.000000
8/22/2012	8:44:50 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:44:50 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:44:50 PM	Tube furnace set to 150
8/22/2012	8:45:20 PM	H2 valve closed
8/22/2012	8:45:20 PM	BCl3 valve closed
8/22/2012	8:45:20 PM	PH3 valve closed
8/22/2012	8:45:20 PM	SiCl4 pre valve closed
8/22/2012	8:45:20 PM	SiCl4 post valve closed
8/22/2012	8:45:20 PM	Bypass valve closed
8/22/2012	8:45:20 PM	Bubbler valve closed
8/22/2012	8:45:20 PM	Helium valve opened
8/22/2012	8:45:20 PM	Main Vac valve opened
8/22/2012	8:45:20 PM	Helium MFC set to  20.000000
8/22/2012	8:45:20 PM	H2 MFC set to  0.000000
8/22/2012	8:45:20 PM	BCl3 MFC set to  0.000000
8/22/2012	8:45:20 PM	PH3 MFC set to  0.000000
8/22/2012	8:45:20 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:45:20 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:45:20 PM	Tube furnace set to 150
8/22/2012	8:45:50 PM	Helium valve closed
8/22/2012	8:45:50 PM	H2 valve closed
8/22/2012	8:45:50 PM	BCl3 valve closed
8/22/2012	8:45:50 PM	PH3 valve closed
8/22/2012	8:45:50 PM	SiCl4 pre valve closed
8/22/2012	8:45:50 PM	SiCl4 post valve closed
8/22/2012	8:45:50 PM	Bypass valve closed
8/22/2012	8:45:50 PM	Bubbler valve closed
8/22/2012	8:45:50 PM	Main Vac valve opened
8/22/2012	8:45:50 PM	Helium MFC set to  0.000000
8/22/2012	8:45:50 PM	H2 MFC set to  0.000000
8/22/2012	8:45:50 PM	BCl3 MFC set to  0.000000
8/22/2012	8:45:50 PM	PH3 MFC set to  0.000000
8/22/2012	8:45:50 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:45:50 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:45:50 PM	Tube furnace set to 150
8/22/2012	8:46:20 PM	H2 valve closed
8/22/2012	8:46:20 PM	BCl3 valve closed
8/22/2012	8:46:20 PM	PH3 valve closed
8/22/2012	8:46:20 PM	SiCl4 pre valve closed
8/22/2012	8:46:20 PM	SiCl4 post valve closed
8/22/2012	8:46:20 PM	Bypass valve closed
8/22/2012	8:46:20 PM	Bubbler valve closed
8/22/2012	8:46:20 PM	Helium valve opened
8/22/2012	8:46:20 PM	Main Vac valve opened
8/22/2012	8:46:20 PM	Helium MFC set to  20.000000
8/22/2012	8:46:20 PM	H2 MFC set to  0.000000
8/22/2012	8:46:20 PM	BCl3 MFC set to  0.000000
8/22/2012	8:46:20 PM	PH3 MFC set to  0.000000
8/22/2012	8:46:20 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:46:20 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:46:21 PM	Tube furnace set to 150
8/22/2012	8:46:51 PM	Helium valve closed
8/22/2012	8:46:51 PM	H2 valve closed
8/22/2012	8:46:51 PM	BCl3 valve closed
8/22/2012	8:46:51 PM	PH3 valve closed
8/22/2012	8:46:51 PM	SiCl4 pre valve closed
8/22/2012	8:46:51 PM	SiCl4 post valve closed
8/22/2012	8:46:51 PM	Bypass valve closed
8/22/2012	8:46:51 PM	Bubbler valve closed
8/22/2012	8:46:51 PM	Main Vac valve opened
8/22/2012	8:46:51 PM	Helium MFC set to  0.000000
8/22/2012	8:46:51 PM	H2 MFC set to  0.000000
8/22/2012	8:46:51 PM	BCl3 MFC set to  0.000000
8/22/2012	8:46:51 PM	PH3 MFC set to  0.000000
8/22/2012	8:46:51 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:46:51 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:46:51 PM	Tube furnace set to 150
8/22/2012	8:47:21 PM	H2 valve closed
8/22/2012	8:47:21 PM	BCl3 valve closed
8/22/2012	8:47:21 PM	PH3 valve closed
8/22/2012	8:47:21 PM	SiCl4 pre valve closed
8/22/2012	8:47:21 PM	SiCl4 post valve closed
8/22/2012	8:47:21 PM	Bypass valve closed
8/22/2012	8:47:21 PM	Bubbler valve closed
8/22/2012	8:47:21 PM	Helium valve opened
8/22/2012	8:47:21 PM	Main Vac valve opened
8/22/2012	8:47:21 PM	Helium MFC set to  20.000000
8/22/2012	8:47:21 PM	H2 MFC set to  0.000000
8/22/2012	8:47:21 PM	BCl3 MFC set to  0.000000
8/22/2012	8:47:21 PM	PH3 MFC set to  0.000000
8/22/2012	8:47:21 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:47:21 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:47:21 PM	Tube furnace set to 150
8/22/2012	8:47:51 PM	Helium valve closed
8/22/2012	8:47:51 PM	H2 valve closed
8/22/2012	8:47:51 PM	BCl3 valve closed
8/22/2012	8:47:51 PM	PH3 valve closed
8/22/2012	8:47:51 PM	SiCl4 pre valve closed
8/22/2012	8:47:51 PM	SiCl4 post valve closed
8/22/2012	8:47:51 PM	Bypass valve closed
8/22/2012	8:47:51 PM	Bubbler valve closed
8/22/2012	8:47:51 PM	Main Vac valve opened
8/22/2012	8:47:51 PM	Helium MFC set to  0.000000
8/22/2012	8:47:51 PM	H2 MFC set to  0.000000
8/22/2012	8:47:51 PM	BCl3 MFC set to  0.000000
8/22/2012	8:47:51 PM	PH3 MFC set to  0.000000
8/22/2012	8:47:51 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:47:51 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:47:51 PM	Tube furnace set to 150
8/22/2012	8:48:21 PM	H2 valve closed
8/22/2012	8:48:21 PM	BCl3 valve closed
8/22/2012	8:48:21 PM	PH3 valve closed
8/22/2012	8:48:21 PM	SiCl4 pre valve closed
8/22/2012	8:48:21 PM	SiCl4 post valve closed
8/22/2012	8:48:21 PM	Bypass valve closed
8/22/2012	8:48:22 PM	Bubbler valve closed
8/22/2012	8:48:22 PM	Helium valve opened
8/22/2012	8:48:22 PM	Main Vac valve opened
8/22/2012	8:48:22 PM	Helium MFC set to  20.000000
8/22/2012	8:48:22 PM	H2 MFC set to  0.000000
8/22/2012	8:48:22 PM	BCl3 MFC set to  0.000000
8/22/2012	8:48:22 PM	PH3 MFC set to  0.000000
8/22/2012	8:48:22 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:48:22 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:48:22 PM	Tube furnace set to 150
8/22/2012	8:48:52 PM	Helium valve closed
8/22/2012	8:48:52 PM	H2 valve closed
8/22/2012	8:48:52 PM	BCl3 valve closed
8/22/2012	8:48:52 PM	PH3 valve closed
8/22/2012	8:48:52 PM	SiCl4 pre valve closed
8/22/2012	8:48:52 PM	SiCl4 post valve closed
8/22/2012	8:48:52 PM	Bypass valve closed
8/22/2012	8:48:52 PM	Bubbler valve closed
8/22/2012	8:48:52 PM	Main Vac valve opened
8/22/2012	8:48:52 PM	Helium MFC set to  0.000000
8/22/2012	8:48:52 PM	H2 MFC set to  0.000000
8/22/2012	8:48:52 PM	BCl3 MFC set to  0.000000
8/22/2012	8:48:52 PM	PH3 MFC set to  0.000000
8/22/2012	8:48:52 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:48:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:48:52 PM	Tube furnace set to 150
8/22/2012	8:49:22 PM	H2 valve closed
8/22/2012	8:49:22 PM	BCl3 valve closed
8/22/2012	8:49:22 PM	PH3 valve closed
8/22/2012	8:49:22 PM	SiCl4 pre valve closed
8/22/2012	8:49:22 PM	SiCl4 post valve closed
8/22/2012	8:49:22 PM	Bypass valve closed
8/22/2012	8:49:22 PM	Bubbler valve closed
8/22/2012	8:49:22 PM	Helium valve opened
8/22/2012	8:49:22 PM	Main Vac valve opened
8/22/2012	8:49:22 PM	Helium MFC set to  20.000000
8/22/2012	8:49:22 PM	H2 MFC set to  0.000000
8/22/2012	8:49:22 PM	BCl3 MFC set to  0.000000
8/22/2012	8:49:22 PM	PH3 MFC set to  0.000000
8/22/2012	8:49:22 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:49:22 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:49:22 PM	Tube furnace set to 150
8/22/2012	8:49:52 PM	Helium valve closed
8/22/2012	8:49:52 PM	H2 valve closed
8/22/2012	8:49:52 PM	BCl3 valve closed
8/22/2012	8:49:52 PM	PH3 valve closed
8/22/2012	8:49:52 PM	SiCl4 pre valve closed
8/22/2012	8:49:52 PM	SiCl4 post valve closed
8/22/2012	8:49:52 PM	Bypass valve closed
8/22/2012	8:49:52 PM	Bubbler valve closed
8/22/2012	8:49:52 PM	Main Vac valve opened
8/22/2012	8:49:52 PM	Helium MFC set to  0.000000
8/22/2012	8:49:52 PM	H2 MFC set to  0.000000
8/22/2012	8:49:52 PM	BCl3 MFC set to  0.000000
8/22/2012	8:49:52 PM	PH3 MFC set to  0.000000
8/22/2012	8:49:52 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:49:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:49:53 PM	Tube furnace set to 150
8/22/2012	8:50:23 PM	H2 valve closed
8/22/2012	8:50:23 PM	BCl3 valve closed
8/22/2012	8:50:23 PM	PH3 valve closed
8/22/2012	8:50:23 PM	SiCl4 pre valve closed
8/22/2012	8:50:23 PM	SiCl4 post valve closed
8/22/2012	8:50:23 PM	Bypass valve closed
8/22/2012	8:50:23 PM	Bubbler valve closed
8/22/2012	8:50:23 PM	Helium valve opened
8/22/2012	8:50:23 PM	Main Vac valve opened
8/22/2012	8:50:23 PM	Helium MFC set to  20.000000
8/22/2012	8:50:23 PM	H2 MFC set to  0.000000
8/22/2012	8:50:23 PM	BCl3 MFC set to  0.000000
8/22/2012	8:50:23 PM	PH3 MFC set to  0.000000
8/22/2012	8:50:23 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:50:23 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:50:23 PM	Tube furnace set to 150
8/22/2012	8:50:53 PM	Helium valve closed
8/22/2012	8:50:53 PM	H2 valve closed
8/22/2012	8:50:53 PM	BCl3 valve closed
8/22/2012	8:50:53 PM	PH3 valve closed
8/22/2012	8:50:53 PM	SiCl4 pre valve closed
8/22/2012	8:50:53 PM	SiCl4 post valve closed
8/22/2012	8:50:53 PM	Bypass valve closed
8/22/2012	8:50:53 PM	Bubbler valve closed
8/22/2012	8:50:53 PM	Main Vac valve opened
8/22/2012	8:50:53 PM	Helium MFC set to  0.000000
8/22/2012	8:50:53 PM	H2 MFC set to  0.000000
8/22/2012	8:50:53 PM	BCl3 MFC set to  0.000000
8/22/2012	8:50:53 PM	PH3 MFC set to  0.000000
8/22/2012	8:50:53 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:50:53 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:50:53 PM	Tube furnace set to 150
8/22/2012	8:51:23 PM	H2 valve closed
8/22/2012	8:51:23 PM	BCl3 valve closed
8/22/2012	8:51:23 PM	PH3 valve closed
8/22/2012	8:51:23 PM	SiCl4 pre valve closed
8/22/2012	8:51:23 PM	SiCl4 post valve closed
8/22/2012	8:51:23 PM	Bypass valve closed
8/22/2012	8:51:23 PM	Bubbler valve closed
8/22/2012	8:51:23 PM	Helium valve opened
8/22/2012	8:51:23 PM	Main Vac valve opened
8/22/2012	8:51:23 PM	Helium MFC set to  20.000000
8/22/2012	8:51:23 PM	H2 MFC set to  0.000000
8/22/2012	8:51:23 PM	BCl3 MFC set to  0.000000
8/22/2012	8:51:23 PM	PH3 MFC set to  0.000000
8/22/2012	8:51:23 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:51:23 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:51:23 PM	Tube furnace set to 150
8/22/2012	8:51:53 PM	Helium valve closed
8/22/2012	8:51:53 PM	H2 valve closed
8/22/2012	8:51:53 PM	BCl3 valve closed
8/22/2012	8:51:53 PM	PH3 valve closed
8/22/2012	8:51:53 PM	SiCl4 pre valve closed
8/22/2012	8:51:53 PM	SiCl4 post valve closed
8/22/2012	8:51:53 PM	Bypass valve closed
8/22/2012	8:51:53 PM	Bubbler valve closed
8/22/2012	8:51:53 PM	Main Vac valve opened
8/22/2012	8:51:53 PM	Helium MFC set to  0.000000
8/22/2012	8:51:53 PM	H2 MFC set to  0.000000
8/22/2012	8:51:53 PM	BCl3 MFC set to  0.000000
8/22/2012	8:51:53 PM	PH3 MFC set to  0.000000
8/22/2012	8:51:53 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:51:53 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:51:54 PM	Tube furnace set to 150
8/22/2012	8:52:24 PM	H2 valve closed
8/22/2012	8:52:24 PM	BCl3 valve closed
8/22/2012	8:52:24 PM	PH3 valve closed
8/22/2012	8:52:24 PM	SiCl4 pre valve closed
8/22/2012	8:52:24 PM	SiCl4 post valve closed
8/22/2012	8:52:24 PM	Bypass valve closed
8/22/2012	8:52:24 PM	Bubbler valve closed
8/22/2012	8:52:24 PM	Helium valve opened
8/22/2012	8:52:24 PM	Main Vac valve opened
8/22/2012	8:52:24 PM	Helium MFC set to  20.000000
8/22/2012	8:52:24 PM	H2 MFC set to  0.000000
8/22/2012	8:52:24 PM	BCl3 MFC set to  0.000000
8/22/2012	8:52:24 PM	PH3 MFC set to  0.000000
8/22/2012	8:52:24 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:52:24 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:52:24 PM	Tube furnace set to 150
8/22/2012	8:52:54 PM	Helium valve closed
8/22/2012	8:52:54 PM	H2 valve closed
8/22/2012	8:52:54 PM	BCl3 valve closed
8/22/2012	8:52:54 PM	PH3 valve closed
8/22/2012	8:52:54 PM	SiCl4 pre valve closed
8/22/2012	8:52:54 PM	SiCl4 post valve closed
8/22/2012	8:52:54 PM	Bypass valve closed
8/22/2012	8:52:54 PM	Bubbler valve closed
8/22/2012	8:52:54 PM	Main Vac valve opened
8/22/2012	8:52:54 PM	Helium MFC set to  0.000000
8/22/2012	8:52:54 PM	H2 MFC set to  0.000000
8/22/2012	8:52:54 PM	BCl3 MFC set to  0.000000
8/22/2012	8:52:54 PM	PH3 MFC set to  0.000000
8/22/2012	8:52:54 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:52:54 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:52:54 PM	Tube furnace set to 150
8/22/2012	8:53:24 PM	H2 valve closed
8/22/2012	8:53:24 PM	BCl3 valve closed
8/22/2012	8:53:24 PM	PH3 valve closed
8/22/2012	8:53:24 PM	SiCl4 pre valve closed
8/22/2012	8:53:24 PM	SiCl4 post valve closed
8/22/2012	8:53:24 PM	Bypass valve closed
8/22/2012	8:53:24 PM	Bubbler valve closed
8/22/2012	8:53:24 PM	Helium valve opened
8/22/2012	8:53:24 PM	Main Vac valve opened
8/22/2012	8:53:24 PM	Helium MFC set to  20.000000
8/22/2012	8:53:24 PM	H2 MFC set to  0.000000
8/22/2012	8:53:24 PM	BCl3 MFC set to  0.000000
8/22/2012	8:53:24 PM	PH3 MFC set to  0.000000
8/22/2012	8:53:24 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:53:24 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:53:24 PM	Tube furnace set to 150
8/22/2012	8:53:54 PM	Helium valve closed
8/22/2012	8:53:54 PM	H2 valve closed
8/22/2012	8:53:54 PM	BCl3 valve closed
8/22/2012	8:53:54 PM	PH3 valve closed
8/22/2012	8:53:54 PM	SiCl4 pre valve closed
8/22/2012	8:53:54 PM	SiCl4 post valve closed
8/22/2012	8:53:54 PM	Bypass valve closed
8/22/2012	8:53:54 PM	Bubbler valve closed
8/22/2012	8:53:54 PM	Main Vac valve opened
8/22/2012	8:53:54 PM	Helium MFC set to  0.000000
8/22/2012	8:53:54 PM	H2 MFC set to  0.000000
8/22/2012	8:53:54 PM	BCl3 MFC set to  0.000000
8/22/2012	8:53:54 PM	PH3 MFC set to  0.000000
8/22/2012	8:53:54 PM	SiCl4 MFC set to  0.000000
8/22/2012	8:53:54 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	8:53:55 PM	Tube furnace set to 150
8/22/2012	8:53:56 PM	Run finished at 8:53 PM
8/22/2012	9:09:59 PM	Main Vac valve closed
8/22/2012	9:10:11 PM	Main Vac valve opened
8/22/2012	9:11:12 PM	Recipe started at 9:11 PM
8/22/2012	9:11:12 PM	Helium valve closed
8/22/2012	9:11:12 PM	H2 valve closed
8/22/2012	9:11:12 PM	BCl3 valve closed
8/22/2012	9:11:12 PM	PH3 valve closed
8/22/2012	9:11:12 PM	SiCl4 pre valve closed
8/22/2012	9:11:12 PM	SiCl4 post valve closed
8/22/2012	9:11:12 PM	Main Vac valve closed
8/22/2012	9:11:12 PM	Bypass valve closed
8/22/2012	9:11:12 PM	Bubbler valve closed
8/22/2012	9:11:13 PM	Helium MFC set to  0.000000
8/22/2012	9:11:13 PM	H2 MFC set to  0.000000
8/22/2012	9:11:13 PM	BCl3 MFC set to  0.000000
8/22/2012	9:11:13 PM	PH3 MFC set to  0.000000
8/22/2012	9:11:13 PM	SiCl4 MFC set to  0.000000
8/22/2012	9:11:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:11:13 PM	Tube furnace set to 0
8/22/2012	9:11:16 PM	Helium valve closed
8/22/2012	9:11:16 PM	BCl3 valve closed
8/22/2012	9:11:16 PM	PH3 valve closed
8/22/2012	9:11:16 PM	SiCl4 pre valve closed
8/22/2012	9:11:16 PM	SiCl4 post valve closed
8/22/2012	9:11:16 PM	Main Vac valve closed
8/22/2012	9:11:16 PM	Bypass valve closed
8/22/2012	9:11:16 PM	Bubbler valve closed
8/22/2012	9:11:16 PM	H2 valve opened
8/22/2012	9:11:16 PM	Helium MFC set to  0.000000
8/22/2012	9:11:16 PM	H2 MFC set to  500.000000
8/22/2012	9:11:16 PM	BCl3 MFC set to  0.000000
8/22/2012	9:11:16 PM	PH3 MFC set to  0.000000
8/22/2012	9:11:16 PM	SiCl4 MFC set to  0.000000
8/22/2012	9:11:16 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:11:16 PM	Tube furnace set to 50
8/22/2012	9:12:28 PM	Helium valve closed
8/22/2012	9:12:28 PM	BCl3 valve closed
8/22/2012	9:12:28 PM	PH3 valve closed
8/22/2012	9:12:28 PM	SiCl4 pre valve closed
8/22/2012	9:12:28 PM	SiCl4 post valve closed
8/22/2012	9:12:28 PM	Main Vac valve closed
8/22/2012	9:12:28 PM	Bypass valve closed
8/22/2012	9:12:28 PM	H2 valve opened
8/22/2012	9:12:28 PM	Bubbler valve opened
8/22/2012	9:12:28 PM	Helium MFC set to  0.000000
8/22/2012	9:12:28 PM	H2 MFC set to  500.000000
8/22/2012	9:12:28 PM	BCl3 MFC set to  0.000000
8/22/2012	9:12:28 PM	PH3 MFC set to  0.000000
8/22/2012	9:12:28 PM	SiCl4 MFC set to  0.000000
8/22/2012	9:12:28 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:12:28 PM	Tube furnace set to 50
8/22/2012	9:12:29 PM	Helium valve closed
8/22/2012	9:12:29 PM	BCl3 valve closed
8/22/2012	9:12:29 PM	PH3 valve closed
8/22/2012	9:12:29 PM	SiCl4 pre valve closed
8/22/2012	9:12:29 PM	SiCl4 post valve closed
8/22/2012	9:12:30 PM	Main Vac valve closed
8/22/2012	9:12:30 PM	Bypass valve closed
8/22/2012	9:12:30 PM	H2 valve opened
8/22/2012	9:12:30 PM	Bubbler valve opened
8/22/2012	9:12:30 PM	Helium MFC set to  0.000000
8/22/2012	9:12:30 PM	H2 MFC set to  450.000000
8/22/2012	9:12:30 PM	BCl3 MFC set to  0.000000
8/22/2012	9:12:30 PM	PH3 MFC set to  0.000000
8/22/2012	9:12:30 PM	SiCl4 MFC set to  0.000000
8/22/2012	9:12:30 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:12:30 PM	Tube furnace set to 1000
8/22/2012	9:32:30 PM	Helium valve closed
8/22/2012	9:32:30 PM	PH3 valve closed
8/22/2012	9:32:30 PM	Main Vac valve closed
8/22/2012	9:32:30 PM	Bypass valve closed
8/22/2012	9:32:30 PM	H2 valve opened
8/22/2012	9:32:30 PM	BCl3 valve opened
8/22/2012	9:32:30 PM	SiCl4 pre valve opened
8/22/2012	9:32:30 PM	SiCl4 post valve opened
8/22/2012	9:32:30 PM	Bubbler valve opened
8/22/2012	9:32:30 PM	Helium MFC set to  0.000000
8/22/2012	9:32:30 PM	H2 MFC set to  450.000000
8/22/2012	9:32:30 PM	BCl3 MFC set to  1.200000
8/22/2012	9:32:30 PM	PH3 MFC set to  0.000000
8/22/2012	9:32:30 PM	SiCl4 MFC set to  50.000000
8/22/2012	9:32:30 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:32:30 PM	Tube furnace set to 1000
8/22/2012	9:47:30 PM	Helium valve closed
8/22/2012	9:47:30 PM	BCl3 valve closed
8/22/2012	9:47:30 PM	PH3 valve closed
8/22/2012	9:47:30 PM	SiCl4 pre valve closed
8/22/2012	9:47:30 PM	SiCl4 post valve closed
8/22/2012	9:47:30 PM	Main Vac valve closed
8/22/2012	9:47:30 PM	Bypass valve closed
8/22/2012	9:47:30 PM	H2 valve opened
8/22/2012	9:47:30 PM	Bubbler valve opened
8/22/2012	9:47:30 PM	Helium MFC set to  0.000000
8/22/2012	9:47:30 PM	H2 MFC set to  500.000000
8/22/2012	9:47:30 PM	BCl3 MFC set to  0.000000
8/22/2012	9:47:30 PM	PH3 MFC set to  0.000000
8/22/2012	9:47:30 PM	SiCl4 MFC set to  0.000000
8/22/2012	9:47:30 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:47:30 PM	Tube furnace set to 750
8/22/2012	9:57:30 PM	H2 valve closed
8/22/2012	9:57:30 PM	BCl3 valve closed
8/22/2012	9:57:30 PM	PH3 valve closed
8/22/2012	9:57:30 PM	SiCl4 pre valve closed
8/22/2012	9:57:30 PM	SiCl4 post valve closed
8/22/2012	9:57:30 PM	Main Vac valve closed
8/22/2012	9:57:30 PM	Bypass valve closed
8/22/2012	9:57:30 PM	Helium valve opened
8/22/2012	9:57:30 PM	Bubbler valve opened
8/22/2012	9:57:30 PM	Helium MFC set to  400.000000
8/22/2012	9:57:30 PM	H2 MFC set to  0.000000
8/22/2012	9:57:30 PM	BCl3 MFC set to  0.000000
8/22/2012	9:57:30 PM	PH3 MFC set to  0.000000
8/22/2012	9:57:30 PM	SiCl4 MFC set to  0.000000
8/22/2012	9:57:30 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	9:57:30 PM	Tube furnace set to 0
8/22/2012	10:11:06 PM	Run aborted at 10:11 PM
8/22/2012	10:11:06 PM	Helium valve closed
8/22/2012	10:11:06 PM	H2 valve closed
8/22/2012	10:11:06 PM	BCl3 valve closed
8/22/2012	10:11:06 PM	PH3 valve closed
8/22/2012	10:11:06 PM	SiCl4 pre valve closed
8/22/2012	10:11:06 PM	SiCl4 post valve closed
8/22/2012	10:11:06 PM	Bypass valve closed
8/22/2012	10:11:06 PM	Main Vac valve closed
8/22/2012	10:11:06 PM	Bubbler valve closed
8/22/2012	10:11:06 PM	Helium MFC set to  0.000000
8/22/2012	10:11:06 PM	H2 MFC set to  0.000000
8/22/2012	10:11:06 PM	BCl3 MFC set to  0.000000
8/22/2012	10:11:06 PM	PH3 MFC set to  0.000000
8/22/2012	10:11:06 PM	SiCl4 MFC set to  0.000000
8/22/2012	10:11:06 PM	Tube furnace set to 0
8/22/2012	10:11:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	10:11:11 PM	Recipe started at 10:11 PM
8/22/2012	10:11:11 PM	Helium valve closed
8/22/2012	10:11:11 PM	H2 valve closed
8/22/2012	10:11:11 PM	BCl3 valve closed
8/22/2012	10:11:11 PM	PH3 valve closed
8/22/2012	10:11:11 PM	SiCl4 pre valve closed
8/22/2012	10:11:11 PM	SiCl4 post valve closed
8/22/2012	10:11:11 PM	Main Vac valve closed
8/22/2012	10:11:11 PM	Bypass valve closed
8/22/2012	10:11:11 PM	Bubbler valve closed
8/22/2012	10:11:11 PM	Helium MFC set to  0.000000
8/22/2012	10:11:11 PM	H2 MFC set to  0.000000
8/22/2012	10:11:11 PM	BCl3 MFC set to  0.000000
8/22/2012	10:11:11 PM	PH3 MFC set to  0.000000
8/22/2012	10:11:11 PM	SiCl4 MFC set to  0.000000
8/22/2012	10:11:11 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:11:12 PM	Tube furnace set to 0
8/22/2012	10:11:15 PM	H2 valve closed
8/22/2012	10:11:15 PM	BCl3 valve closed
8/22/2012	10:11:15 PM	PH3 valve closed
8/22/2012	10:11:15 PM	SiCl4 pre valve closed
8/22/2012	10:11:15 PM	SiCl4 post valve closed
8/22/2012	10:11:15 PM	Main Vac valve closed
8/22/2012	10:11:15 PM	Bypass valve closed
8/22/2012	10:11:15 PM	Bubbler valve closed
8/22/2012	10:11:15 PM	Helium valve opened
8/22/2012	10:11:15 PM	Helium MFC set to  500.000000
8/22/2012	10:11:15 PM	H2 MFC set to  0.000000
8/22/2012	10:11:15 PM	BCl3 MFC set to  0.000000
8/22/2012	10:11:15 PM	PH3 MFC set to  0.000000
8/22/2012	10:11:15 PM	SiCl4 MFC set to  0.000000
8/22/2012	10:11:15 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:11:15 PM	Tube furnace set to 0
8/22/2012	10:11:15 PM	Helium valve closed
8/22/2012	10:11:15 PM	H2 valve closed
8/22/2012	10:11:15 PM	BCl3 valve closed
8/22/2012	10:11:15 PM	PH3 valve closed
8/22/2012	10:11:15 PM	SiCl4 pre valve closed
8/22/2012	10:11:15 PM	SiCl4 post valve closed
8/22/2012	10:11:15 PM	Main Vac valve closed
8/22/2012	10:11:15 PM	Bypass valve closed
8/22/2012	10:11:15 PM	Bubbler valve closed
8/22/2012	10:11:15 PM	Helium MFC set to  0.000000
8/22/2012	10:11:15 PM	H2 MFC set to  0.000000
8/22/2012	10:11:15 PM	BCl3 MFC set to  0.000000
8/22/2012	10:11:15 PM	PH3 MFC set to  0.000000
8/22/2012	10:11:15 PM	SiCl4 MFC set to  0.000000
8/22/2012	10:11:15 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:11:15 PM	Tube furnace set to 0
8/22/2012	10:11:16 PM	Run finished at 10:11 PM
8/22/2012	10:11:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2012	10:14:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2012	10:14:56 PM	Recipe started at 10:14 PM
8/22/2012	10:14:57 PM	Helium valve closed
8/22/2012	10:14:57 PM	H2 valve closed
8/22/2012	10:14:57 PM	BCl3 valve closed
8/22/2012	10:14:57 PM	PH3 valve closed
8/22/2012	10:14:57 PM	SiCl4 pre valve closed
8/22/2012	10:14:57 PM	SiCl4 post valve closed
8/22/2012	10:14:57 PM	Main Vac valve closed
8/22/2012	10:14:57 PM	Bubbler valve closed
8/22/2012	10:14:57 PM	Bypass valve opened
8/22/2012	10:14:57 PM	Helium MFC set to  0.000000
8/22/2012	10:14:57 PM	H2 MFC set to  0.000000
8/22/2012	10:14:57 PM	BCl3 MFC set to  0.000000
8/22/2012	10:14:57 PM	PH3 MFC set to  0.000000
8/22/2012	10:14:57 PM	SiCl4 MFC set to  0.000000
8/22/2012	10:14:57 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:14:57 PM	Tube furnace set to 0
8/22/2012	10:16:12 PM	Helium valve closed
8/22/2012	10:16:12 PM	H2 valve closed
8/22/2012	10:16:12 PM	BCl3 valve closed
8/22/2012	10:16:12 PM	PH3 valve closed
8/22/2012	10:16:12 PM	SiCl4 pre valve closed
8/22/2012	10:16:12 PM	SiCl4 post valve closed
8/22/2012	10:16:12 PM	Main Vac valve closed
8/22/2012	10:16:12 PM	Bubbler valve closed
8/22/2012	10:16:12 PM	Bypass valve opened
8/22/2012	10:16:12 PM	Helium MFC set to  0.000000
8/22/2012	10:16:12 PM	H2 MFC set to  0.000000
8/22/2012	10:16:12 PM	BCl3 MFC set to  0.000000
8/22/2012	10:16:12 PM	PH3 MFC set to  0.000000
8/22/2012	10:16:12 PM	SiCl4 MFC set to  0.000000
8/22/2012	10:16:12 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:16:12 PM	Tube furnace set to 0
8/22/2012	10:17:12 PM	Helium valve closed
8/22/2012	10:17:12 PM	H2 valve closed
8/22/2012	10:17:12 PM	BCl3 valve closed
8/22/2012	10:17:12 PM	PH3 valve closed
8/22/2012	10:17:12 PM	SiCl4 pre valve closed
8/22/2012	10:17:12 PM	SiCl4 post valve closed
8/22/2012	10:17:12 PM	Bypass valve closed
8/22/2012	10:17:12 PM	Bubbler valve closed
8/22/2012	10:17:12 PM	Main Vac valve opened
8/22/2012	10:17:12 PM	Helium MFC set to  0.000000
8/22/2012	10:17:12 PM	H2 MFC set to  0.000000
8/22/2012	10:17:12 PM	BCl3 MFC set to  0.000000
8/22/2012	10:17:12 PM	PH3 MFC set to  0.000000
8/22/2012	10:17:12 PM	SiCl4 MFC set to  0.000000
8/22/2012	10:17:12 PM	Bypass solenoid MFC set to  0.000000
8/22/2012	10:17:13 PM	Tube furnace set to 0
8/22/2012	10:17:14 PM	Run finished at 10:17 PM
8/22/2012	10:17:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
